iH SERIES DRY PUMPS Giving you a clear edge

A CLEAR EDGE IN PRODUCT INNOVATION Pumping expertise Proven design Low cost of ownership Optimised footprint iH series dry pump first choice for vacuum solutions Edwards is a leading supplier of integrated process-enabling technologies, materials and services for semiconductor and Flat Panel Display (FPD) processes. Products include vacuum pumps, exhaust gas management, liquid abatement, and monitoring and control equipment. An extensive range of services includes equipment repair, and on-site materials and equipment support. Edwards has over 200,000 pumps installed, supporting 200 mm and 300...

Pumping expertise and leadership Edwards is the global market leader for advanced vacuum pumps, supplying over 40% of the pumps currently installed in 300 mm fabs. With more than 200,000 Edwards dry pumps supplying vacuum on 200 mm and 300 mm processes, reliability has been Proven design The iH Series has been designed with cantilevered shafts and specially profiled rotors for better handling of particles. Reserve motor power also maximises reliability on harsh-duty CVD applications. Corrosion resistant materials allow pumping of corrosive gases while higher operating temperatures provide ample...

Range of pumps The iH Series is the product of over 30 years dry vacuum pump expertise and field experience. iH dry pumps are the preferred pumps for many 200 and 300 mm production lines. iH pumps provide application-specific solutions for the full range of semiconductor fabrication processes. The major OEMs recommend iH Series dry pumps for harsh processes. The optional Tool and Network Interface Modules (iTIM and NIM) allow control by any OEM tool and fabwide monitoring using FabWorks IMS maximises equipment availability. iH1800 and iH1800HTX The iH1800 dry pumps are designed to provide high...

Technical data Peak speed Ultimate pressure (typical with shaft seals purge only) Typical purge flow Inlet connection Outlet connection Typical cooling water flow at 15 psi pressure drop Weight Power at ultimate (1) Rated motor power Oil capacity All figures are typical without gas ballast (1) Average power at 700T exhaust pressure

1 INLET 2 OUTLET 3 AIR EXTRACTION PORT 4 INVERTER BOX (iH1000 only) A SIDE VIEW B PLAN VIEW

Technical data

1 INLET 2 OUTLET 3 AIR EXTRACTION PORT 4 INVERTER BOX A SIDE VIEW B PLAN VIEW

Ordering information The iH80 and iH160 systems include as standard: an optimally designed 5-stage dry pump for harsh applications with enclosed water-cooled motor; on-board electronics and sensor control; integral gas purge systems; facilities for communication and control links for accessories and process tools. The iH600 and iH1000 systems include an iH80 dry pump and incorporate a direct-drive booster. The iH1800 includes an iH160 dry pump and incorporates a large capacity direct-drive booster for high-throughput applications. All systems are fully enclosed and include seismic restraints....

Global support Edwards provides service and support through its operations in every major semiconductor and FPD region of the world. With more than 700 qualified service technicians and a site presence at nearly 100 fabs worldwide, customers benefit from the support of a trained service team – delivered locally and backed by a global infrastructure. Edwards services are designed to lower overall cost of ownership while increasing process equipment availability and throughput. No other company can match Edwards for an on- and off-site, comprehensive customer service and support package that includes:...

GLOBAL CONTACTS Taiwan R.O.C. Jhunan Town +886 3758 1000 Publication Number: A59000895, Issue E © Edwards Limited 2015. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited. Whilst we make every effort to ensure that we accurately describe our products and services, we give no warranty as to the accuracy or completeness of any information provided in this brochure.