GX NEXT GENERATION DRYPUMPS The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. A compact footprint allows installation options including on-tool, close proximity, or remote. Features and Benefits • Reduced Cost of Ownership ― Up to a 50% reduction in utilities cost compared to iL/iH drypumps ― No preventative maintenance ― Small and light for easy installation ― On-tool, close proximity, or remote ― Pumping speed identical at 50 and 60 Hz • Reduced Ambient Noise • Flexible Installation Options • Possible Tool Throughput Improvements • Consistent Pumping Performance Globally ― One of the fastest loadlock pumps available ― Only 55 dB(A) • Wide Range of Peak Speed ― 100, 300, 600 and 800 m3h-1 W W W. E D WA R D S vA c u u m . C O M

GX NEXT GENERATION DRYPUMPS Peak Speed Ultimate pressure Power at 700 torr exhaust AUC (Active Utility Controller) Water inlet Installation details Footprint (excl. exhaust) Inlet connection Outlet connection * Requires constant flow valve accessory ** Nitrogen purge can be manually adjusted to a maximum flow tivc gasas used Corrosive or reaclive gases used (1) If proem t*rr» ever to imrtH ui lh* QX'N" wlwil. Contact Edwards for additional technical information on a particular application.

Speed Curves Pri'Siuri' {mbarl Lower Utilities Costs Typically a 40% saving can be made on utilities costs over an • Based on a 300mm fab in the US, containing 200 tools, • GX fitted with constant flow water valve 1 Nitrogen □ Water □ Power Highly efficient cooling - High conductivity materials and good design enables low water flow Precision ceramic bearings - Very high load capability for reliability Designed for Energy Efficiency • High performance motors and inverter drives • - Low operating power consumption - Lower power standby mode using Active Utility Nitrogen dilution can be tuned to...

GX NEXT GENERATION DRYPUMPS 1 Inlet FLarvge 2 Exhaust Flange Ordering Information Edwards continually updates its products to match the evolving needs of the semiconductor industry. Specifications given here are subject to change without notice. Global Contacts UK Local Rate (UK only) 08459 212223 Toll free (USA only) +1 800 848 9800 ASIA PACIFIC Taiwan R.O.C. Toufen Town +886 37 611422 info© ed wards vacu um. com Publication Number: A53710895, Issue C © Edwards Limited 2008. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.