EXT75DX & EXT255DX TURBOMOLECULAR PUMPS I N N O VATI V E P R O D U C T S G L O B A L STRENGTH LOCAL SUPPORT VACUUM EXPERTISE
Open the catalog to page 1Turbomolecular pumps with on-board controller Edwards is a world leader in the design and manufacture of turbomolecular pumps with over 200,000 units installed worldwide. The range of products includes the EXT75DX and EXT255DX compound turbomolecular pumps that combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board controller and a 24V motor. On-board intelligent control gives ability to run at reduced power for lower cost of ownership. In addition, the controller adds electronic...
Open the catalog to page 2Basic System Basic system Mains cable (TIC and relay XDD/DX/EXDC extension cable Comprehensive system Comprehensive System B Mains cable (TIC and relay box supply) F AIM inverted magnetron gauge M TIC logic interface cable P TIC logic interface cable Q XDD/DX/EXDC extension cable S Active gauge cable * For use with water-cooled pumps only # EXT75DX used for illustrative purposes on diagram Note: The pumps are also available in pre-configured EXPT pumping stations. Contact Edwards for details. WWW.ECDWAniDS\/ACZUUM (ZCDM
Open the catalog to page 4Technical Data Inlet flange Compression ratio Outlet flange Recommended backing pump* Vent port Purge port Maximum continuous inlet pressure (light gas pumping)* Water cooling (water at 15 °C, ambient temp at 40 °C) Forced air cooled, 35 °C ambient Pump rotational speed Nominal rotational speed Standby rotational speed Programmable power limit settings Start time to 90% speed Analogue outputs Ambient air temperature for forced air cooling Minimum cooling water flow rate (water 15 °C) Water temperature range Maximum inlet flange temperature Operating attitude Noise level at 1 metre Maximum magnetic...
Open the catalog to page 5The TIC controller automatically recognises and supports one 24V turbomolecular pump from the EXT range. Cooling and vent valve support is provided directly from the controller. Backing pump power is provided for a compact 24V diaphragm pump (on 200W versions only), or where greater pumping speeds are required, mains backing pumps (up to RV12) may be controlled via an optional relay box. The relay box can also be used to control a mains heater band and backing line isolation valve. Time delays and normal speed signals may be used to control events such as turbo start and there is a comprehensive...
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