EXT75DX turbomolecular pump Edwards is a world leader in the design and manufacture of turbomolecular pumps with over 200,000 units installed worldwide. The range of products includes the EXT75DX compound turbomolecular pumps that combine the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board controller and a 24V dc motor. Features and benefits On-board intelligent control gives ability to run at reduced power for lower cost of ownership. In addition, the controller adds electronic braking, smart cooling fan and automatic vent options Compatible with Edwards TAG and TIC Turbo and Instrument Controller meaning you can add one or more vacuum gauges without the need of an additional display controller Parallel or serial interface. Parallel mode allows traditional control signal interface. Serial mode gives RS232 providing total control of pump status and continuous monitoring of: • vent valve control settings • running speed indication • standby running speed • programmable power settings • power consumption • pump/controller temperature product datasheet Inlet screen supplied as standard (not shown) Permanent magnetic upper bearing for clean vacuum, reduced vibration and minimum wear Manual vent valve (solenoid operated version available for fully automatic venting) Holweck stage for high throughput and high backing pressure tolerance Gas purge port for process gas dilution to protect motor and lower bearing Vacuum science... product

Dimensions and technical data Dimensions in mm (inch) Inlet flange Outlet flange Recommended backing pump Vent port Purge port Maximum continuous inlet pressure (light gas pumping)† Water cooling (water at 15 °C, ambient temp at 40 °C) Forced air cooled, 35 °C ambient Pump rotational speed Nominal rotational speed Standby rotational speed Variable from 49500 to 90000 rpm (63000 rpm default) Programmable power limit settings Variable from 50-120W (80W default) Start time to 90% speed Analogue outputs Pump rotational speed; Power consumption; Pump temperature; Controller temperature Ambient air...

Typical EXT75DX configuration Basic TAG system A Mains cable Backing pump - XDD1 24Vdc diaphragm pump or nXDS scroll pump XDD/DX/EXDC extension cable XDD/DX/EXDC extension cable (optional) Active gauge cable Power supply Mains cable XDD/DX/EXDC extension cable XDD/DX/EXDC extension cable (optional) Backing pump XDD1 24Vdc diaphragm pump or nXDS scroll pump Active gauge cable TIC logic interface cable TIC logic interface cable XDD/DX/EXDC extension cable Mains cable Active gauge cable Note: EXT75DX turbpumps are also available in pre-configured nEXT pumping stations and T-station 75 pumping station....

TIC controller The TIC controller automatically recognises and supports one 24 V turbomolecular pump from the EXT/nEXT range. Cooling and vent valve support is provided directly from the controller. Backing pump power is provided for a compact 24 V diaphragm pump (on 200W versions only), or where greater pumping speeds are required, mains backing pumps (up to RV12) may be controlled via an optional relay box. The relay box can also be used to control a mains CF flange heater and backing line isolation valve. Time delays and normal speed signals may be used to control events such as turbo start...