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For large substrates (1.4 m > 2 ) a-Si/-Si thin film solar applications, high flows of hydrogen are required during silicon deposition as well as substantial flows of fluorine containing gases for chamber cleans. The diHXK modular vacuum systems used so successfully in the FPD sector, lend themselves perfectly for these high flow applications. Edwards also supplies diFXK modular loadlock systems for the fast pumpdown of large loadlock chambers from atmosphere to vacuum. Both systems consist of just the right number of pumping modules to meet pumping speed requirements and provide the user with...

The Spectra-Z is a high capacity combustion system that provides reliable, high performance and cost effective abatement of hazardous gases from solar cell processes that use large flows of silane (SiH > 4 ). The Spectra-Z employs 4-stage combustion, an effective powder handling system and can be configured with up to six process gas inlets. The Spectra-Z has low CoO, no water or oxygen required and is suitable for indoor or outdoor installation. Applications include: PECVD a-Si/-Si deposition, LPCVDՕ Gases abated: SiH > 4 , PH > 3 , NH > 3 , TMB, NF > 3 Capacity: 800 slm and 3,000 slm > Edwards...

Concentrates wastewater from POU scrubbersTotal volume sent to treatment is reduced freeing up capacity for other waste sources 90 of POU scrubber water is recycledReduces maintenance costs and chemical usage > Cost-saving high-yield solutionsCustom designed and application-specific configurationsTurnkey proect design and supportManual to fully-automated both dry-in wet-out and dry-in dry-out >