Equipment and Services for Solar Cell Manufacturing brochure

Product catalog summary

Overview: Edwards is a prominent provider of vacuum systems and exhaust management technologies, particularly for solar cell manufacturing. With nearly a century of experience, Edwards offers a comprehensive range of products and services supported by a global network.

Products:

Dry Vacuum Pumps: The GV Drystar Series is known for its high reliability, low cost, and compact design, suitable for crystal pulling and PECVD applications.
Turbomolecular Pumps: These pumps offer high pumping speed and reliability, with a mean time between failures (MTBF) of over 20 years, ideal for dry etch and PVD tools.
Exhaust Management: Systems like Spectra-Z and Atlas are designed for hazardous gas abatement.
Integrated Systems: Zenith systems enhance safety and efficiency.

Services:

Comprehensive services including equipment service and repair, product exchange, and refurbished equipment.
Field and on-site services, remote diagnostics, and product training.

Key Features:

Cost Efficiency: Innovative liquid abatement systems reduce maintenance costs and chemical usage.
Global Support: A vast service network ensures local support worldwide.
Environmental Protection: Advanced technologies provide full environmental protection.

Applications:

Processes such as PECVD, LPCVD, PVD, and lamination in solar cell manufacturing.
Handling high hydrogen flows and fluorine gases in thin film solar applications.

Key Products and Systems:

Spectra-Z: A high-capacity combustion system for hazardous gases like silane (SiH4) with a 4-stage combustion system.
Atlas and HOx Systems: Fuel-fired thermal abatement technology for PFC global warming gases and toxic/corrosive gases.
Zenith Integrated System: Provides process-specific vacuum and abatement systems for solar applications.
ERIX HF Concentrator: Reduces HF wastewater volume and recycles over 90% of scrubber water.

Global Service Support: Edwards offers a comprehensive service portfolio through a global network of service centers, ensuring local support worldwide.

Global Presence: Edwards maintains a strong global presence with service centers in the United States, Europe, and Asia/Pacific regions.

Contact Information: Customers are encouraged to contact their local Edwards representative for more details or to determine the optimal configuration for specific applications.

Catalog excerpts

Equipment and Services for Solar Cell Manufacturing brochure-1

WWW. EDWARDSVACUUM .COM/solar > GLOBAL STRENGTHLOCAL SUPPORTVACUUM EXPERTISEINNOVATIVE PRODUCTS size="-1">

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Equipment and Services for Solar Cell Manufacturing brochure-3

Bolton, UKCrawley, UKBrno, Czech RepublicMunich, Germany Gennevilliers, France Avezzano, ItalyQiryat, IsraelBrussels, Belgium > SingaporeTaiwanShanghaiAustraliaIna, Japan Chunan City, KoreaIndia > Wilmington, MADallas, TX Tempe, AZ Santa Clara, CA City of Industry, CA Cleveland, OH Hillsboro, OR Wappinger Falls, NY Sao Paulo, Brazil >

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Equipment and Services for Solar Cell Manufacturing brochure-5

For large substrates (1.4 m > 2 ) a-Si/-Si thin film solar applications, high flows of hydrogen are required during silicon deposition as well as substantial flows of fluorine containing gases for chamber cleans. The diHXK modular vacuum systems used so successfully in the FPD sector, lend themselves perfectly for these high flow applications. Edwards also supplies diFXK modular loadlock systems for the fast pumpdown of large loadlock chambers from atmosphere to vacuum. Both systems consist of just the right number of pumping modules to meet pumping speed requirements and provide the user with...

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Equipment and Services for Solar Cell Manufacturing brochure-6

The Spectra-Z is a high capacity combustion system that provides reliable, high performance and cost effective abatement of hazardous gases from solar cell processes that use large flows of silane (SiH > 4 ). The Spectra-Z employs 4-stage combustion, an effective powder handling system and can be configured with up to six process gas inlets. The Spectra-Z has low CoO, no water or oxygen required and is suitable for indoor or outdoor installation. Applications include: PECVD a-Si/-Si deposition, LPCVDՕ Gases abated: SiH > 4 , PH > 3 , NH > 3 , TMB, NF > 3 Capacity: 800 slm and 3,000 slm > Edwards...

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Equipment and Services for Solar Cell Manufacturing brochure-7

Concentrates wastewater from POU scrubbersTotal volume sent to treatment is reduced freeing up capacity for other waste sources 90 of POU scrubber water is recycledReduces maintenance costs and chemical usage > Cost-saving high-yield solutionsCustom designed and application-specific configurationsTurnkey proect design and supportManual to fully-automated both dry-in wet-out and dry-in dry-out >

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