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Dry pump brochure

Dry pump brochure
12Pages

Catalog excerpts

BOC Edwards is a leading supplier of integrated process-enabling technologies,materials and services for semiconductor and Flat Panel Display (FPD) processes. Products include process gases,gas delivery systems,vacuum pumps,chillers, exhaust gas management,chemical blend and dispense systems,liquid abatement,and monitoring and control equipment.An extensive range of services includes tool component cleaning,equipment repair,and on-site materials and equipment support. BOC Edwards has over 100,000 pumps installed,supporting 200 mm and 300 mm fabs worldwide and operates in every major...

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iH80 iH600 iH1800 The iH Series is the product of over 20 years dryvacuum pump expertise and field experience.iH dry pumps are the preferred pumps for most 300 mm production lines.iH pumps provide application-specific solutions for the full range of semiconductor fabrication processes.The major OEMs recommend iH Series drypumps forharsh processes.The optional Tool and Network Interface Modules(iTIM and NIM) allow control by any OEM tool and fab- wide monitoring maximizes equipment availability. > The iH1800 dry pumps are designed to provide high-throughput pumping for harsh 300 mm process...

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Typical shaft seal nitrogen flowslm444444 > Typical cooling waterl h > -1 120120240240240240flow at 15 psi pressure dropl min > -1 224444 > Oil capacityl0.70.71.431.431.481.48 > All figures are typical without gas ballast

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iH80 > 1INLET2OUTLET 3AIR EXTRACTION PORT 4INVERTER BOX (iH1000 only) ASIDE VIEWBPLAN VIEW

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Ultimate vacuummbar1 x 10 > -2 1 x 10 > -3 (with shaft seal purge only)Torr7.5 x 10 > -3 7.5 x 10 > -4 Pa10.1 > Typical shaft seal nitrogen flowslm44 > Typical cooling water flow atl h > -1 12024015psi pressure dropl min > -1 24 > Oil capacityl0.851.6 > All figures are typical without gas ballast

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iH160 > A B 1INLET2OUTLET 3AIR EXTRACTION PORT 4INVERTOR BOX A SIDE VIEW BPLAN VIEW iH1800/HTX > A B iH1800 iH160 size="-2">

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BOC Edwards provides service and support through its operations in every majorsemiconductor and FPD region of the world.With more than 700 qualified service technicians and a site presence at nearly 100 fabs worldwide,customers benefit from the support of a trained service team delivered locally and backed by a global infrastructure.BOC Edwards services are designed to lower overall cost of ownership while increasing process equipment availability and throughput.No other company can match BOC Edwards for an on- and off-site,comprehensivecustomer service and support package that includes: >...

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