PRODUCT DATA SHEET BGV STAINLESS STEEL GATE VALVE MANUAL AND PNEUMATIC Edwards BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable. They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10 -8 mbar (1.2 x 105 to 1 x 10 -6 Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed. The simple but innovative wedge sealing mechanism, incorporating PEEK gliders, make the valve especially suited to applications with high levels of process by-product in the gas stream: • No oil, grease or complex moving parts within the valve, removing the risk of damage to the mechanism due to contamination from process debris. • PEEK gliders provide no metal-to-metal contact and act to control the compression of the O ring. • As the gate closes the O ring brushes across the sealing surface briefly before it seals, helping to clean debris from the sealing surface thus giving a better seal. BGV gate valves are available with a choice of manual or pneumatic actuation. The BGV manual valves have a visual indication of the gate position on the side of the assembly to show when it is open. The BGV Mk2 pneumatic variant has reed switches which can be used by your control equipment to determine if the valve is open or closed, these also contain LEDs providing a visual display of the valve position. Each BGV Mk2 pneumatic valve is fitted with a 24 V a.c./d.c. solenoid and pre-wired plug for direct connection to your Edwards latest generation vacuum pump. This 15-way “D” plug offers a single point of connection for both power to the solenoid and the signal from the reed switch position indicators. Able to withstand 1.2 bar absolute in either direction Avoiding re-start issues by keeping the pump running during maintenance Pneumatic solenoid and pre-wired option Pre-configured simple ‘plug and play’ installation Stainless steel construction and robust design Long service life and reliability in harsh environments Simple grease-free sealing mechanism Minimises damage due to particulates in dust

PRODUCT DATA SHEET TECHNICAL DATA Ambient operating temperature range Maximum bake-out temperatures (1) 0 °C to 50 °C Valve body Actuator Position indicator Solenoid Pressure range Differential pressure on the gate Differential pressure at opening Leak tightness To the outside Across the seat Average life before first service (2) 5000 cycles at ambient temperature (1) Maximum values; depending on operating conditions and sealing materials (2) Depending on the process conditions shorter service intervals may be required Pneumatic valve only Electrical supply Position indicator contact rating Pneumatic...

PRODUCT DATA SHEET DIMENSIONS BGV Manual Gate Valve NW50 BGV Mk2 Pneumatic Gate Valve NW50 Valve seat side Leak detection hole Electrical connection Position indicator Compressed air connection Form B

PRODUCT DATA SHEET ORDERING INFORMATION BGV Manual valves Common spares and accessories B90000595 BGV manual gate valve ISO80 BGV manual gate valve ISO100 BGV manual gate valve ISO160 Accessories Extension Lead (5 m) BGV manual gate valve NW50 BGV manual gate valve ISO63 BGV Mk2 Pneumatic gate valve NW50 with solenoid BGV Mk2 Pneumatic gate valve ISO63 with solenoid BGV Mk2 Pneumatic gate valve ISO80 with solenoid BGV Mk2 Pneumatic gate valve ISO100 with solenoid BGV Mk2 Pneumatic gate valve ISO160 with solenoid NOTE: The BGV Mk2 pneumatic valve can be plugged directly into Edwards latest generation...