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Atlas? Gas Abatement Systems

Atlas? Gas Abatement Systems
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ATLAS™ GAS ABATEMENT SYSTEMS Atlas™ from Edwards: the range of combustion gas abatement solutions that offers semiconductor, flat panel display, Solar and MOCVD manufacturers reduced operating costs and enhanced ease-of-use. Atlas abatement technology specific to your process: • Atlas TCS for common CVD gases (NF3/F2) • Atlas TPU for PFC gases (ClF3, C2F6, C3F8) in CVD processes • Atlas Kronis for the low-k CVD gases in next-generation processes • Atlas Etch for semicon etch and flat panel display processes (CF4, SF6 and high flow PFC’s) • Atlas Helios for safe treatment of hydrogen processes in epitaxy and MOCVD Atlas™ systems have low fuel consumption compared with previous-generation gas abatement devices and utilize proven Alzeta™ inward-fired combustor technology to achieve significantly reduced cost of ownership. With one to six inlets with a number of options, including a temperature management system (TMS), they can treat a flow capacity of up to 600 slm and they offer enhanced ease-of-use and more efficient maintenance. Features and Benefits • Low cost of ownership —— Low fuel consumption —— Reduced running costs • Excellent powder handling • Excellent corrosion resistance • Outstanding reliability, even on the harshest applications • Ease of maintenance • Third party certification —— SEMI® S2, CE marked, ETL listed • Unrivalled abatement performance for deposition and clean gases • Flame retardant plastic used in wet stage —— No corrosion from acidic by-products —— Lower risk of thermal discharge

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ATLAS™ GAS ABATEMENT SYSTEMS Inward-fired Combustion Technology Used by most major semiconductor manufacturers, the inward-fired combustor has become a world standard in gas abatement since 1994. This unique combustion technology operates with less fuel, producing a clean, uniform burn chamber. Low temperature combustion ensures very low NOx emissions and the inward flow of gas prevents process material contact with the chamber walls, minimizing blockage by solids. Ceramic construction material is used to ensure the combustors’ immunity to corrosion and unrivalled reliability and safety....

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