A compact active ion gauge with dual yttria coated iridium filaments, a wide measuring range from 5 x 102 to 5 x 1010 Torr (6.6 x 102 to 6.6 X 10"10 mbar) and a 1 Volt/decade linear The AIGX gauge from Edwards incorporates all the benefits of the industry standard active gauging concept, with integral electronics and replaceable tube. The gauge has a degas facility and includes features to protect and extend the life of the filaments. The AIGX benefits from extremely low emissions of charged particles, which makes it an excellent choice for processes where background noise is undesirable. • Full 8-decade measurement capability, to 5 x 10 m • Two versions available, each with three vacuum coupling variants: — 'D' versions have a 9-pin 'D' connector and standard — 'S' versions have enhanced functionality and are fully compatible with the range of Edwards • Up to a thirty-fold reduction in charged particle process contamination compared to leading • Automatic filament protection against switching on at atmosphere and running or degassing at high • Gauge sensitivity remains constant over the whole measuring range, thus maintaining output accuracy at higher pressures. • Continuous pressure measurement output during • Innovative design eliminates the effects of X-ray • Bi-colour LED gives local indication of gauge status. • Wide input voltage range. • Electronics very easily removable for bakeout at • 'S' versions provided with seamless automatic emission current switching, for prolonged filament • 'S' versions provided with diagnostic outputs indicating 'emission off, 'broken filament' and 'overpressure trip' to help with troubleshooting. • 'S' versions provided with a push-button adjustable

Pressue range Power supply Power consumption Output signal Response time Tube details Emission current Maximum overpressure Materials exposed to vacuum Vacuum fittings Diagnostics (error/status - gauge output) Note: all errors require a manual off/on restart Emission off (supply on, emission off) Emission error (e.g. selected filament broken) Overpressure trip (protection against turn-on at atmosphere) Supply connected, emission off Emission initiation Normal operation Overpressure error Emission error High pressure shutdown 'Accuracy is reduced at the lower limit of the measuring range (better...

Set point (open collector transistor) Maximum voltage Maximum current Temperature range Operating temperature Storage temperature External interface connectors Interface cables Electronic design Electromagnetic compatibility Enclosure rating Gauge on/off control Supply common Signal output Supply positive Degas status Degas on/off control Signal common Emission current select Emission status 9-way 'D' type plug (pins) Using an Edwards instrument controller or 24V supply, a maximum cable run of 30m may be achieved using the cables specified (lower supply voltages will reduce cable lengths). Maximum...

Gauge Output Ordering information Product Description Order No. Calibrated gauges are supplied with a certificate of calibration traceable to national standards AIGX-S NW25 + calibration certificate D0485000C AIGX-S DN160CF + calibration certificate D0485100C AIGX-S DN40CF + calibration certificate D0485200C AIGX-D NW25 + calibration certificate D0486000C AIGX-D DN16CF + calibration certificate D0486100C AIGX-D DN40CF + calibration certificate D0486200C ELECTRONICS MODULES SPARE FUSES AIGX spare fuse kit (pk 5) D04850805 REPLACEMENT TUBES 'S' versions (include FCC68 compatible connections 0.5m...