
Analyzers for Ultra-high Purity Gas Quality Control For Semiconductor Manufacture
Open the catalog to page 1RDWYEROMEGA Analyzers for Ultra-high Purity Gas Quality Control The speciality gases used in manufacturing semiconductors must be high purity because of the detailed precision of the process. Even the presence of trace impurities measured in parts per trillion will result in the loss of whole batches of wafers. We offer reliable, repeatable measurements of key parameters with lower detection limits down to <100 ppt. Our oxygen and moisture analyzers and sensors, together with process gas chromatographs, provide a complete solution to monitor and control the purity of specialty gases and toxic...
Open the catalog to page 2RDWYEROMEGA Analyzers for Ultra-high Purity Gas Quality Control A good analytical tool is essential to ensure the quality of the UHP gases used in semi-conductor manufacture. LDetek’s ranges of gas chromatograph analyzers allow impurity detection down to sub-ppb levels. LDetek MultiDetek3 - Modular Process Gas Chromatograph This compact gas chromatograph combines the functionality of two GCs in one and has the ability to provide online measurements of moisture and O2. • A single analyzer for trace measurement of multiple impurities • Temperature controlled to ensure maximum accuracy and stability...
Open the catalog to page 3RDWYEROMEGA Analyzers for Ultra-high Purity Gas Quality Control RDWYEROMEGA Analyzers for Ultra-high Purity Gas Quality Control Automatic pressure controller LDetek L8000 Plus - Online PPB Trace Nitrogen in Argon/Helium Analyzer The LD8000+ is designed with the plasma emission detector (patented PED) maintained in an optimized controlled vacuum equilibrium to offer an extended collision energy level. The PED arrangement is designed with a valve network that allow to balance between 3 excitation sources. From each of the excitation source, an algorithm measures the PED response delta to convert...
Open the catalog to page 4Analyzers for Ultra-high Purity Gas Quality Control Trace Oxygen Analytical Industries Inc GPR-1600 – Oxygen Analyzer for Industrial Gas Monitors oxygen in low parts per million in a variety of background gases. • Low measurement range 0...10 ppm • Long sensor life up to 24 months in <1,000 ppm O2 Analytical Industries Inc GPR-1200 – Portable Trace Oxygen Analyzer An economical and reliable portable analyzer for accurate measurements of trace oxygen. • Measurement ranges from 0...10 ppm up to 0...100 %O2 • Accuracy of better than 2 % of range • 24 - 32 months sensor life span (in normal use)...
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