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Analyzers for Ultra-high Purity Gas Quality Control

Analyzers for Ultra-high Purity Gas Quality Control

Analyzers for Ultra-high Purity Gas Quality Control

Product catalog summary
Overview
The document discusses the importance of ultra-high purity (UHP) gases in semiconductor manufacturing, emphasizing the need for precise measurement of trace impurities such as oxygen, moisture, and other gases. It highlights the use of high-precision analyzers and gas chromatographs to ensure the quality of these gases.

Measurement Parameters
  • Trace Moisture: Detection limit (LDL) of 1 ppbV with Pura.
  • Trace Oxygen: LDL <100 ppt.
  • Trace Gases: LDL down to <100 ppt with MultiDetek3 and LD8000 Plus.

Applications in Semiconductor Processes
  • Deposition: Utilizes gases like NH3, N2O, SiH4, and others.
  • Doping: Involves hydrides such as AsH3, BF3, and PH3.
  • Lithography: Uses laser gases and carbon dioxide.
  • Annealing: Involves oxygen, hydrogen, and argon.
  • Etching: Utilizes fluorocarbons and halides.
  • Chamber Cleaning: Uses nitrogen trifluoride and other fluoride gases.

Benefits
  • Reliable measurements of trace impurities down to parts per trillion.
  • Comprehensive measurement and analysis solutions from a single supplier.
  • Capability for multiple trace impurity measurements with a single analyzer system.

Selected Applications
  • Monitoring oxygen and moisture contamination of UHP gases.
  • Confirming the purity of UHP specialty gases in processes like plasma etching.
  • Heat treating silicon wafers and cleaning processes in chemical vapor deposition chambers.
  • Ambient monitoring for personnel safety.

Product Features
  • LDetek MultiDetek3: Modular process gas chromatograph for sub-ppb trace measurements.
  • Analytical Industries Inc PI2-MS: Oxygen analyzer for UHP gases with cost-effective sensors.
  • LDetek LD8000 Plus: Online PPB trace nitrogen analyzer with fast response time.
  • Michell Pura: Transmitters and hygrometers for trace moisture measurement.

Conclusion
The document provides a comprehensive overview of the tools and technologies available for ensuring the purity of gases used in semiconductor manufacturing, highlighting the importance of precise measurement and control of trace impurities.
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Catalog excerpts

Analyzers for Ultra-high Purity Gas Quality Control-1

Analyzers for Ultra-high Purity Gas Quality Control For Semiconductor Manufacture

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Analyzers for Ultra-high Purity Gas Quality Control-2

RDWYEROMEGA Analyzers for Ultra-high Purity Gas Quality Control The speciality gases used in manufacturing semiconductors must be high purity because of the detailed precision of the process. Even the presence of trace impurities measured in parts per trillion will result in the loss of whole batches of wafers. We offer reliable, repeatable measurements of key parameters with lower detection limits down to <100 ppt. Our oxygen and moisture analyzers and sensors, together with process gas chromatographs, provide a complete solution to monitor and control the purity of specialty gases and toxic...

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Analyzers for Ultra-high Purity Gas Quality Control-3

RDWYEROMEGA Analyzers for Ultra-high Purity Gas Quality Control A good analytical tool is essential to ensure the quality of the UHP gases used in semi-conductor manufacture. LDetek’s ranges of gas chromatograph analyzers allow impurity detection down to sub-ppb levels. LDetek MultiDetek3 - Modular Process Gas Chromatograph This compact gas chromatograph combines the functionality of two GCs in one and has the ability to provide online measurements of moisture and O2. • A single analyzer for trace measurement of multiple impurities • Temperature controlled to ensure maximum accuracy and stability...

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Analyzers for Ultra-high Purity Gas Quality Control-4

RDWYEROMEGA Analyzers for Ultra-high Purity Gas Quality Control RDWYEROMEGA Analyzers for Ultra-high Purity Gas Quality Control Automatic pressure controller LDetek L8000 Plus - Online PPB Trace Nitrogen in Argon/Helium Analyzer The LD8000+ is designed with the plasma emission detector (patented PED) maintained in an optimized controlled vacuum equilibrium to offer an extended collision energy level. The PED arrangement is designed with a valve network that allow to balance between 3 excitation sources. From each of the excitation source, an algorithm measures the PED response delta to convert...

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Analyzers for Ultra-high Purity Gas Quality Control-5

Analyzers for Ultra-high Purity Gas Quality Control Trace Oxygen Analytical Industries Inc GPR-1600 – Oxygen Analyzer for Industrial Gas Monitors oxygen in low parts per million in a variety of background gases. • Low measurement range 0...10 ppm • Long sensor life up to 24 months in <1,000 ppm O2 Analytical Industries Inc GPR-1200 – Portable Trace Oxygen Analyzer An economical and reliable portable analyzer for accurate measurements of trace oxygen. • Measurement ranges from 0...10 ppm up to 0...100 %O2 • Accuracy of better than 2 % of range • 24 - 32 months sensor life span (in normal use)...

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Analyzers for Ultra-high Purity Gas Quality Control-6

Improving the world, one measurement at a time™ ProcessSensi ng.com

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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