Semiconductor and Photovoltaic Manufacturing Equipment

Durex Industries is the Semiconductor and Photovoltaic Equipment Industry’s premier supplier of high performance radiant, convection, and conduction thermal solutions. Equipment used in manufacturing processes for transistors, memory devices, microprocessors, crystal silicon photovoltaic (PV) cells, and thin film PV cells all require thermal solutions. Knowing the importance of temperature, Durex continues to innovate and provide customer specific thermal solutions that are critical to next generation equipment and processes. The best thermal solutions not only take into consideration the process...

pedestal / vacuum chamber / cast heaters In-situ Vacuum Critical process steps for CVD, PVD, etch, and ion implantation applications require elevated temperature in vacuum environments. Key specifications for the thermal solution include precision temperature uniformity, precision machining tolerances, material compatibility with the chemical or gas environment and a neutral source of contamination. Durex Industries has over 20 years of proven experience and capabilities for designing and manufacturing thermal solutions for the most demanding in-situ vacuum applications. Aluminum Pedestal Heaters...

SENTINEL heater and insulation system SENTINEL® Heater and Insulation Systems Durex Industries’ SENTINEL Heater and Insulation Systems is a turnkey thermal solution for PECVD, LPCVD, MOCVD, ALD, plasma etch and other vacuum applications. Low vapor pressure gas delivery lines need to be held at a temperature higher than the gas vaporization point in order to prevent condensation that will affect process yields. Vacuum exhaust lines remove the vapor phase bi-products from the semiconductor process. Sublimation occurs when the vapor phase materials cool in a vacuum line. By heating the forelines,...

HALO controllers HALO® Temperature Controller Durex Industries’ HALO process temperature controllers are an integrated thermal solution combining temperature control, integrated high limit control, heater current sensing, visual alarm indication, high/ low temperature alarm, digital I/O, Graphical User Interface (GUI), and RS 485/Modbus® communications. The HALO controller represents a new convergence of technologies that improves thermal system performance while substantially reducing costs of ownership. The HALO Temperature Controller and SENTINEL Gas and Pump Line Heaters are a superior thermal...

AIN rapid fire heaters Rapid Fire™ Aluminum Nitride (AlN) Heaters Durex industries’ Rapid Fire aluminum nitride (AlN) ceramic heater solutions combine the thermal conductivity of aluminum and dielectric strength of specialty ceramics with physical properties similar to stainless steel. Additionally, a tungsten (W) RTD Sensor is integrated into the multi-layer heater construction to provide maximum control of this high watt density heater. New levels of machine design and thermal performance can be achieved through the excellent thermal, dielectric and physical properties of AlN heaters. Rapid...

AIN rapid fire heaters • Thermal conductivity equivalent to aluminum for fast and uniform thermal response • Watt density: up to 2000 W/in2 (310 W/cm2). • AIN thermal conductivity: 190 W/mK • Rapid ramp rate: 0-400°C (32 to 752°F) in less than 2 seconds Atmospheric and inert gas environments applications Complex and 3 dimensional geometries Thickness: 0.05 in. to 0.200 in (1.27 mm 5.08 mm) Size: Up to 10.25 in2 (66.13 cm2) Encapsulated tungsten (W) RTD sensor • Surface metallization

cable | tubular heaters Cable (Coil) Heaters are high temperature corrosion and oxidation resistant heaters that can be manufactured in small diameters and formed into geometries that optimize the thermal profile of a heated part. • Operating temperature < 650°C (1200°F) • 304, 316 stainless steel or Incoloy® • Diameter < 0.40 inches (10.16 mm) • Voltage to 240V • Paralleled coil resistance wire for applications to 1000 inches • Series resistance wire for applications > 1000 inches • High ductility for forming geometries • Integrated thermocouple sensors Standard Tubular Heater Assemblies are...

assembly / sensors Assembly Packaging and Test Applications Completed wafers are tested at cryogenic and elevated temperatures to identify and sort the semiconductor devices for their performance characteristics. The wafers are then sliced into individual die. Leads are attached and the devices are packaged before a final performance test.Temperature is a critical variable in most of the process steps. Polyimide Heaters and integrated Assemblies represent a thermal solution for application requiring precision temperature profiles at lower process temperatures. By supplying a thermal assembly...

1/B Inch Magnum cartridge! Durex Industries’ 1/8th Inch (3.175 mm) Cartridge Heater was developed for Original Equipment Manufacturers (OEMs) that required a small high power thermal solution. Typical applications include injectors used in a gas chromatograph, ion sources used in mass spectrometer, lead attachment in die bonders and other applications requiring a high watt density in a small area. This miniature cartridge heater is designed with a thin 304 stainless steel wall for fast temperature response, and is swaged for low internal temperatures and longer life. Additionally, Durex’ proprietary...

solar photovoltaic / radiant / conduction Solar Photovoltaic Thermal Solutions PV Cells are manufactured using a series of deposition, doping, etch and metallization processes on substrates that may be crystalline silicon wafers (cSi), glass, metal, polymer or other materials. PV cost-per-watt, efficiency, life, and other performance characteristics are directly related to substrate material and thin film materials used to form the cells. Packaging of the PV cells into arrays and modules includes string and lamination steps. Like semiconductor wafer processing, most PV process steps require precision...