Advanced Ceramic Heater Thermal Solutions Heating Vacuum Check Z-AXIS Thermal Solution™ Traditional industrial heater designs are usually 2-dimensional and have inherent heat transfer and thermal solution limitations. Durex’ aluminum nitride (AlN) ceramic heater technology gives engineers the ability to actualize a Z-axis thermal solution. The Advanced Ceramic Heater Thermal Solutions Rapid Fire™ Aluminum Nitride (AlN) Heaters Durex Industries’ Rapid Fire aluminum nitride (AlN) ceramic heater solutions combine the thermal conductivity of aluminum and dielectric strength of specialty ceramics with physical properties similar to stainless steel. Additionally, a tungsten (W) RTD Sensor is integrated into the multi-layer heater construction to provide maximum control of this high watt density heater. New levels of machine design and thermal performance can be achieved through the excellent thermal, dielectric and physical properties of AlN heaters. Cooling (Microfluidic Channels) AlN material layers and circuits are sintered at high temperature to form a monolithic 3-dimensional solution. This integrated thermal solution may include multi-layers of heater circuits, RTD sensor elements, RF grids, ground plains, cooling, gas and vacuum channels. Monolithic AIN Chiller Technology Heater Sheath Material Thermal and Physical Properties* Aluminum Nitride AlN Thermal Conductivity (W/K·m) Thermal Conductivity is a measurement of a material's ability to conduct heat: higher value = faster more uniform heat transfer Coefficient of Thermal Expansion (x10-6/°C) Coefficient of Thermal Expansion (CTE) is a measurement of material expansion resulting from change in temperature: lower value = less material expansion Heat Capacity is amount of heat required to raise temperature of a material one degree centigrade: higher value = less energy to heat material Density is the measurement of a material's weight to volume: lower value = less weight and fast heating Vicker Hardness is a measurement of the physical hardness of a material: higher value = harder material Young’s Modulus of Elasticity (Gpa) Young's Modulus of Elasticity is the ratio of a material's uniaxil stress over uniaxil strain : higher value = less tensile strength Flexural Strength is the measurement of a material's bend or fracture strength: higher value = better material flexibility Dielectric Strength is a measurement of a material's electrical insulation resistance: higher value = better electrical insulation * Property values reflect typical performance and can vary by adding alloys and / or process procedures. Ceramic heater technologies offer significant advantages over metal based sheath heaters that have limitations in thermal performance or material compatibility. Durex’ ceramic heaters can operate in atmospheric and vacuum environments up to 1000°C (1832°F). With its excellent thermal conductivity, AlN heaters can be designed with a multilayer construction that can deliver up to 2000 W/in2 (310 W/cm2). With chemical resistance to most acidic and alkaline solutions, these compact robust heaters are an ideal solution for demanding thermal applications. Ceramic heaters can be custom designed to optimize thermal performance for instrumentation and equipment applications. Rapid Fire AlN Advantages • Thermal conductivity equivalent to aluminum for fast and uniform thermal response • Watt density higher than any metal or ceramic heater technology for concentrated heat in a small area • Integrated RTD sensor for optimum heater temperature control • Dielectric strength eliminates need for magnesium oxide insulation (MgO) layer used in metal heaters • Heater temperature up to 1000°C (1832°F) for high temperature applications • Low porosity non-stick surface reduces potential for process contamination • Chemically inert to most acid and alkaline environments • High mechanical strength, hardness and wear resistance for industrial applications Visit us online at: www.durexindustries.com or e-mail: [email protected] © 2016 Durex Industries, 190 Detroit Street, Cary, IL 60013-2979 Ph: 847-639-5600 Fax: 847-639-2199 www.durexindustries.com

Advanced Ceramic Heater Thermal Solutions • Thermal conductivity equivalent to aluminum for fast and uniform thermal response • Watt density: up to 2000 W/in2 (310 W/cm2). • AlN thermal conductivity: 180 W/mK • Rapid ramp rate: 0-400°C (32 to 752°F) in less than 2 seconds • Atmospheric and inert gas environments applications Precision manufacturing processes and machining capabilities allow for unique 3D designs such as a cylindrical (tube) heater. Cylindrical heater applications include gas and liquid heating in instrumentation such as gas chromatographs, mass spectrometers, and medical devices....

Advanced Ceramic Heater Thermal Solutions • Thermal conductivity equivalent to aluminum for fast and uniform thermal response • Watt density: up to 2000 W/in2 (310 W/cm2). • AlN thermal conductivity: 180 W/mK • Rapid ramp rate: 0-400°C (32 to 752°F) in less than 2 seconds • Atmospheric and inert gas environments applications Precision manufacturing processes and machining capabilities allow for unique 3D designs such as a cylindrical (tube) heater. Cylindrical heater applications include gas and liquid heating in instrumentation such as gas chromatographs, mass spectrometers, and medical devices....

Advanced Ceramic Heater Thermal Solutions Heating Vacuum Check Z-AXIS Thermal Solution™ Traditional industrial heater designs are usually 2-dimensional and have inherent heat transfer and thermal solution limitations. Durex’ aluminum nitride (AlN) ceramic heater technology gives engineers the ability to actualize a Z-axis thermal solution. The Advanced Ceramic Heater Thermal Solutions Rapid Fire™ Aluminum Nitride (AlN) Heaters Durex Industries’ Rapid Fire aluminum nitride (AlN) ceramic heater solutions combine the thermal conductivity of aluminum and dielectric strength of specialty ceramics...