Parallel Kinematic Piezoelectric Stage Description The PKA-XYZ-400 nanopositioning stage was developed and commercialized with Switzerland’s Paul Scherrer Institute and uses a parallel kinematic architecture for high stiffness and resonant frequency with three translational degrees of freedom. It features flexure-guided motion over a nominal 400 um travel range. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal roll and tilt as well as dynamic responsiveness for excellent position stability and control. It is designed to include high-resolution metrology that, when combined with a suitable 3 channel low-noise piezoelectric amplifier, can deliver position resolution of 12 nm or better. Applications Parallel kinematic mechanisms are recommended for applications where high natural frequency and stiffness are needed with multiple degrees of freedom. Control of parallel kinematics is more complicated than stacked serial stages, so parallel kinematic designs are generally reserved for high performance systems. Specifications • Open-Loop Travel: • Closed-Loop Resolution: Runout (Ɵх, Ɵу): Unloaded Resonant Freq: Resonant Freq with 50 g: Electrical Capacitance: Operating Temp Range: Dimensions: • Material: • Ultra-High Vacuum Compatible 400 micron in X, Y, or Z – see plot with range of motion metrology dependent – 12 nanometers typical with capacitive probe <20 micro radians typical >450 Hz >400 Hz 32 µF per channel 25 to 50 degrees Celsius 183 mm diameter by 77 mm tall Stainless steel, titanium Highlights of the PKA Stage Design • Flexure-guided for smooth, parallel motion • Minimal and repeatable angular runout • Option for integrated metrology • High natural frequencies and rapid response • Displacement range of 400 µm • Customizable and scalable for new applications About the Original Application The Paul Scherrer Institute is the largest national research institute in Switzerland. The PKA-XYZ-400 was designed to be used in an assembly that performs scanning X-ray microscopy. PSI is a world leader in this area, having recently achieved a world record in X-ray tomography resolution. [email protected] Due to parallel kinematics, the volume of points that can be reached by the output of the PKA is roughly diamond-shape