Model XSA-0200C

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Model XSA-0200C

Product catalog summary

Overview of X-Stage Design

Flexure guidance ensures smooth, parallel motion without backlash.
Sturdy construction enhances dynamic responsiveness.
Mounting configurations can be customized.

XSA-0200C Nanopositioning Stage Specifications

Open-Loop Travel: 200 microns ± 10%
Stiffness: 0.8 N/micron ± 10%
Linearity: Typically 0.12%
Pitch/Yaw: Typically less than 20 micro radians
Unloaded Resonant Frequency: 420 Hz ± 10%
Blocking Force: 160 N ± 10%
Push/Pull Force Capacity: Maximum 40 N
Electrical Capacitance: 3.6 micro Farads ± 10%
Operating Temperature Range: -20 to 80 degrees Celsius
Operating Voltage: -30 to 150 V
Dimensions: 60 x 60 x 12.5 mm

Product Description

The DSM XSA-0200C nanopositioning piezoelectric stage is designed for applications in scanning, metrology, and inspection. It features flexure-guided motion over a 200 micron range, ensuring stable and parallel output motion with minimal pitch and yaw. The stage's kinematic design provides excellent position stability and control.

Additional Information

Mass: 0.31 kg ± 10%
Material: Stainless steel
Cable Length: Flying leads with options available

Dimensions (mm/inches)

A: 60 / 2.4
B: 60 / 2.4
C: 12.5 / 0.5
D: 50 / 2
E: 50 / 2
F: 15 / 0.6
G: 15 / 0.6
H: 22.5 / 0.9
I: 21.5 / 0.8
J: 5 / 0.2

Catalog excerpts

XSA-0200C: 200 micron Nanopositioning Stage Description DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control. Open-Loop Travel: Stiffness: Linearity: Pitch / Yaw: Unloaded Resonant Freq: Blocking Force: Push/pull force capacity: Electrical Capacitance: Operating Temp Range: Operating Voltage: Dimensions: Mass: Material: Cable Length: 200 micron ± 10% 0.8N/micron ± 10% 0.12% typical <20 micro radians typical 420 Hz ± 10% 160 N ± 10% 40 N Max 3.6 micro Farads ± 10% -20 to 80 degrees Celsius -30 to 150 V 60 x 60 x 12.5 mm 0.31 kilogram ± 10% Stainless steel Flying Leads (Options Available) Highlights of the X-Stage Design • Flexure guidance provides smooth, parallel motion with no backlash • Stiff construction for responsive dynamic behavior • Customizable mounting configurations

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Model XSA-0200C

Model XSA-0200C

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