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Model XSA-0200C

Model XSA-0200C
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XSA-0200C: 200 micron Nanopositioning Stage Description DSM’s nanopositioning piezoelectric XSA-0200C stage features flexure-guided motion over a 200 micron travel range for scanning, metrology, and inspection processes. The stage’s stable and stiff kinematic design promotes parallelism in the output motion with minimal pitch and yaw as well as dynamic responsiveness for excellent position stability and control. Open-Loop Travel: Stiffness: Linearity: Pitch / Yaw: Unloaded Resonant Freq: Blocking Force: Push/pull force capacity: Electrical Capacitance: Operating Temp Range: Operating Voltage: Dimensions: Mass: Material: Cable Length: 200 micron ± 10% 0.8N/micron ± 10% 0.12% typical <20 micro radians typical 420 Hz ± 10% 160 N ± 10% 40 N Max 3.6 micro Farads ± 10% -20 to 80 degrees Celsius -30 to 150 V 60 x 60 x 12.5 mm 0.31 kilogram ± 10% Stainless steel Flying Leads (Options Available) Highlights of the X-Stage Design • Flexure guidance provides smooth, parallel motion with no backlash • Stiff construction for responsive dynamic behavior • Customizable mounting configurations

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