LITHOGUARD® Series Chemical Contamination Filtration Cabinets The Science of Air Filtration for Critical Process Environments Donaldson LITHOGUARD filtration cabinets offer the broadest range of protection for your lithography tools and processes. Building upon the success of earlier designs, the LITHOGUARD v2.0 provides a more compact unit than either the LITHOGUARD v1.0 or CFS cabinet. Donaldson’s patented parallel airflow distribution, designed using Fluent® analysis and advanced computer technology, ensures optimum contaminant removal efficiency. • • • • • • • Standard sized filters common to other LITHOGUARD cabinets Different types of filtration media available Configurable to meet your air flow requirements Integrated air-inlet supply fans available Stainless steel construction Transition options Global sales and service

LITHOGUARD® Series Chemical Contamination Filtration Cabinets Specifications Airflow • Designed for 210cfm (360m3/h) airflow per filter. A LITHOGUARD filtration unit typically has two, five or seven filters. Utility Requirements • Clean compressed air or nitrogen with a supply line pressure of 25 to 300psi. (172 - 2068 kPa) Options • Units available in two, five or seven filter configurations as standard • Integrated fans available for all units (with CE and UL approvals) single-phase and three-phase motors • Variable frequency drives or mechanical airflow control LITHOGUARD® CABINETS Filtration...