LITHOGUARD ® Series Chemical Contamination Filtration Cabinets

Product catalog summary

Overview: Donaldson LITHOGUARD filtration cabinets are designed to protect lithography tools and processes by offering a broad range of air filtration solutions. The LITHOGUARD v2.0 is an advanced, compact unit that builds on previous designs, featuring patented parallel airflow distribution for optimal contaminant removal.

Specifications:

Airflow: Each filter is designed for 210 cfm (360 m3/h). Units typically contain two, five, or seven filters.
Utility Requirements: Requires clean compressed air or nitrogen with a supply line pressure of 25 to 300 psi (172 - 2068 kPa).
Options: Available in configurations of two, five, or seven filters. Integrated fans with CE and UL approvals are available, along with variable frequency drives or mechanical airflow control.

Construction and Features:

Standard sized filters compatible with other LITHOGUARD cabinets.
Various filtration media types available.
Configurable to meet specific airflow requirements.
Stainless steel construction with transition options.
Global sales and service support.

Filtration Systems:

2-High Unit: Rated airflow of 420 cfm (714 m3/h), dimensions 26.88”W x 27.85”D x 29.27”H, weight 260 lbs (118 kg).
5-High Unit: Rated airflow of 1050 cfm (1785 m3/h), dimensions 26.88”W x 27.85”D x 60.98”H, weight 650 lbs (295 kg).
7-High Unit: Rated airflow of 1470 cfm (2500 m3/h), dimensions 26.88”W x 27.85”D x 82.12”H, weight 910 lbs (413 kg).

Contact Information: Donaldson Europe BVBA, Research Park Zone 1, Interleuvenlaan 1, 3001 - Leuven, BELGIUM. Tel: +32 16 38 37 10, Fax: +32 16 38 37 11, Website, Email: [email protected]

Catalog excerpts

LITHOGUARD ® Series Chemical Contamination Filtration Cabinets-1

LITHOGUARD® Series Chemical Contamination Filtration Cabinets The Science of Air Filtration for Critical Process Environments Donaldson LITHOGUARD filtration cabinets offer the broadest range of protection for your lithography tools and processes. Building upon the success of earlier designs, the LITHOGUARD v2.0 provides a more compact unit than either the LITHOGUARD v1.0 or CFS cabinet. Donaldson’s patented parallel airflow distribution, designed using Fluent® analysis and advanced computer technology, ensures optimum contaminant removal efficiency. • • • • • • • Standard sized filters common to other LITHOGUARD cabinets Different types of filtration media available Configurable to meet your air flow requirements Integrated air-inlet supply fans available Stainless steel construction Transition options Global sales and service

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LITHOGUARD ® Series Chemical Contamination Filtration Cabinets-2

LITHOGUARD® Series Chemical Contamination Filtration Cabinets Specifications Airflow • Designed for 210cfm (360m3/h) airflow per filter. A LITHOGUARD filtration unit typically has two, five or seven filters. Utility Requirements • Clean compressed air or nitrogen with a supply line pressure of 25 to 300psi. (172 - 2068 kPa) Options • Units available in two, five or seven filter configurations as standard • Integrated fans available for all units (with CE and UL approvals) single-phase and three-phase motors • Variable frequency drives or mechanical airflow control LITHOGUARD® CABINETS Filtration...

Open the catalog to page 2