Donaldson LITHOGUARD®-12 Chemical Contamination Control The Science of Air Filtration for Critical Process Environments The LITHOGUARD-12 cabinet and its associated chemical removal filter inserts is a high efficiency filtration system that removes gas-phase contaminants such as volatile bases, acid gases, condensable organics, as well as particles. Designed for high end lithography tools, including 248nm, 193nm “dry” and 193nm immersion exposure tools, it provides an ultra-clean environment that enables critical chemical processes and prevents the degradation and contamination of optical elements. The LITHOGUARD-12 is a small footprint cabinet, featuring: • High efficiency filtration (each individual filter achieving 99+% removal efficiency) • Serial filtration that enables air sampling between the filters • Low cost of ownership due to: - long filter life - refillable filter option • Particulate filtration - HEPA efficiency • No facility requirements. No connection to CDA or compressed N2 required.

Donaldson LITHOGUARD®-12 Chemical Contamination Control Specifications Supply • The LITHOGUARD-12 requires: 12 - Donaldson BSMmax chemical filters AND 6 - Donaldson HEPA particulate filters Airflow • Real-time air sampling via integrated sampling ports allows for continuous performance management. • Using the latest airflow modeling technology, the LITHOGUARD-12 was designed to: - Utilise a small print - Optimise the amount of media within it - Ensure even distribution of airflow through each filter element - Maximise the efficiency and life of each filter element Utility Requirements • No electrical...