video corpo

BSMmax
1 /2Pages

BSMmax

BSMmax
1 /2Pages

Catalog excerpts

BSMmax-1

AIRBORNE MOLECULAR CONTAMINATION FILTERS Semiconductor Filtration BSMmax - THE NEXT GENERATION OF BROAD SPECTRUM MEDIA FILTRATION Since Donaldson first introduced broad spectrum filter media for the semiconductor industry, considerable studies have gone into the actual levels of contaminant types in ambient air. Simultaneously, tool manufacturers have shown increasing concern about the presence of Si-containing compounds in cleanroom air and the resulting irreversible damage to optical elements. To meet these increasingly complex and stringent demands, Donaldson developed the BSMmax filter that offers the maximum protection, filter life, and flexibility for the broadest spectrum of contaminants that can degrade tools and processes. FEATURES & BENEFITS • Condensable organics (HMDSO, TMS) • More capacity than current carbon filters • These filters are eligible for the Donaldson Refill Program • Global sales and service BSMmax chemical filters are available for chemical filtration cabinets.

 Open the catalog to page 1
BSMmax-2

BSMmax FILTERS SYSTEM RESULTS Expected Life with BSMmax - Ammonia* Expected Life with BSMmax - Sulfur Dioxide* Expected Life with BSMmax - HMDSO* BSMmax Filter Part No. System WxHxD Design Airflow Pressure Drop Approx. Weight * Expected life is dependent upon actual fab conditions and based on system results using Donaldson filters in a LITHOGUARD-12 cabinet. Contact Donaldson today for more information! Hong Kong/China © 2009 Donaldson Company. All Rights Reserved. Information in this document is subject to change without notice.

 Open the catalog to page 2

All DONALDSON catalogs and technical brochures

  1. P-EGS

    3  Pages

  2. (P)-GS N

    6  Pages

  3. PLEATED BAGS

    3  Pages

  4. HPK05

    6  Pages

  5. Bulk hP

    4  Pages

  6. ULTRAPOREX SB

    2  Pages

  7. LITHOGUARD®

    2  Pages

  8. DT filter

    22  Pages

  9. Strainers

    4  Pages

  10. Valves

    6  Pages

  11. Breathers

    14  Pages

  12. TT15/30/60

    2  Pages

  13. SP100/120

    4  Pages

  14. WL16

    4  Pages

  15. W613

    4  Pages

  16. FPK02

    6  Pages

  17. HPK02

    4  Pages

  18. panel filter

    1  Page

  19. GDX

    4  Pages

  20. SYNTEQ XP M/S

    2  Pages

  21. Synteq XP

    4  Pages

  22. Ultrac? AK

    2  Pages

  23. Ultrapoly? PE

    2  Pages

  24. ULTRAC A

    2  Pages

  25. Rotary Valves

    10  Pages

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.