Plasma Systems For Production And Research Diener electronic GmbH + Co. KG

Tetra 30/50 Technical Data Standard: Tetra-30-LF / Tetra-50-LF 1. Dimensions of cabinet (19“ Rack): without connections: Tetra-30: approx. W 600mm x H 1800 mm x D 800 mm Tetra-50: approx. W 600mm x H 1800 mm x D 800 mm Weight: approx. 250 kg (without pump) 2. Dimensions of vacuum chamber: Tetra-30: approx. W 305 mm x H 300 mm x D 370 mm Tetra-50: approx. W 305 mm x H 300 mm x D 625 mm Chamber volume: approx. 33 l / 57 l 3. Gas connections: 2 gas channels through needle valve 4. Plasma generator: 40 kHz / 0 – 1.000 W, innitely variable 5. Electrodes and goods-carriers: The machine can be equipped...

Technical Data Standard: Tetra-30-LF-PC / Tetra-50-LF-PC 1. Dimensions of cabinet (19“ Rack): Tetra-30: approx. W 600mm x H 1800 mm x D 800 mm Tetra-50: approx. W 600mm x H 1800 mm x D 800 mm Weight: approx. 250 kg (without pump) 2. Dimensions of vacuum chamber: Tetra-30: approx. W 305 mm x H 300 mm x D 370 mm Tetra-50: approx. W 305 mm x H 300 mm x D 625 mm Chamber volume: approx. 33 l / 57 l 3. Gas connections: 2 gas channels through mass ow controller 4. Plasma generator: 40 kHz / 0 – 1.000 W, innitely variable 5. Electrodes and goods-carriers: The machine can be equipped with one to eight...

Diener electronic GmbH + Co. KG

Tetra 100/150 Technical Data Standard: Tetra 100 LF / Tetra 150 LF 1. Dimensions of cabinet (19“ Rack): without connections: Tetra-100: approx. W 1000 mm x H 1800 mm x D 1000 mm Tetra-150: approx. W 1000 mm x H 2400 mm x D 1000 mm Weight: approx. 300 kg (without pump) 2. Dimensions of vacuum chamber: Tetra-100: approx. W 400 mm x H 400 mm x D 625 mm Tetra-150: approx. W 400 mm x H 600 mm x D 625 mm Chamber volume: approx. 100 l / 150 l 3. Gas connections: 2 gas channels through needle valve 4. Plasma generator: 40 kHz / 0 – 2.500 W, innitely variable 5. Electrodes and trays: The machine can be...

Technical Data Standard: Tetra 100 LF PC / Tetra 150 LF PC 1. Dimensions of cabinet (19“ Rack): Tetra-100: approx. W 1000 mm x H 1800 mm x D 1000 mm Tetra-150: approx. W 1000 mm x H 2200 mm x D 1000 mm Weight: approx. 300 kg (without pump) 2. Dimensions of vacuum chamber: Tetra-100: approx. W 400 mm x H 400 mm x D 625 mm Tetra-150: approx. W 400 mm x H 600 mm x D 625 mm Chamber volume: approx. 100 l / 150 l 3. Gas connections: 2 gas channels through mass ow controller 4. Plasma generator: 40 kHz / 0 – 2.500 W, innitely variable 5. Electrodes and trays: The machine can be equipped with one to...

The Fully Automatic Control: The fully automatic control was conceived for continuously running processes with only a few parameter changes. In contrast to the PC variant gas flow, pressure and power are only steered and not elec- tronically regulated. button, the plasma process runs fully automatic: Plasma process There is also the possibility of starting and of terminating each manually. For this the buttons The PC-control was developed by us, for applications with frequent changes of pa- rameters and a high requirement to the process regulation and the process docu- Simple operation Password...

Available options: 13.56 MHz generator 2.45 GHz generator intake lter for vacuum pump carbon exhaust lter automatic door barcode reader bias voltage measurement buttery valves rotary drum (bulk goods, powder) pressure-reducing valve spare parts set faraday box gas shower heating plate ion measuring sensor corrosive gas version monomer bottle network connection PC-control polymerization accessories RIE electrode safety valve software (also customized) special anges temperature sensors test inks vacuum pump systems device for powder treatment trays (also customized) service contract additional...

Applications Applications • degreasing / cleaning • photoresist ashing • powder treatment • pre-treatment before printing • pre-treatment before bonding • pre-treatment before painting • pre-treatment before soldering • pre-treatment before molding • pre-treatment before casting • pre-treatment before gluing • Automotive industry • Elastomer technology • Electron microscopy • Precision mechanics technology • Semiconductor technology • Small-batch manufacturing • Plastic industry • Medical devices manufacturing • Micro system technology • Solar cell technology • Textile technology • Individual...