Low Pressure Plasma System (e.g. before bonding, soldering or gluing) (e.g. before printing, varnishing or gluing) (e.g. before microsfructuring of silicon or (e.g. deposition of hydrophobic / hydrophilic Diener electronic GmbH + Co. KG Technical Data Weight: approx. 50 kg (without pump) Chamber volume: approx. 8 litres 2 pes. gas channels controlled with needle valves 4. Plasma power supply: Fully automatic, process timer Rotary vane pump, suction power: min. 4 m3/hr Pump is able to run with 02 Plasma system Tetra 8: back side Elastomer industry Medical technology Micro systems technology Plastics industry Precision mechanics Semiconductor industry Small scale manufacturing Textile treatment Options / Accessories • Additional trays • Bias voltage measurement • Carbon exhaust filter • Device for powder treatment • Faraday cage • Heating plate • Monomer bottle • Polymerization accessories • Pressure reducing valve • Rotary drum • Temperature measurement Diener electronic GmbH + Co. KG e-mail: [email protected]