Diener electronic GmbH + Co. KG www.plasma.de

RF-GENERATOR • Rated RF power output: 100 Watts • Frequency: 13.560 MHz ± 100ppm • Adjustable RF power range: 0 – 100 Watts, continuous • Generator can be pulsed: Min. on-time: 5µs • Impedance: 50 Ohms • RF stability: less than 5 % • Load missmatch protection (built-in) against open output and short circuit • Regulation tolerance load: VSWR = 1,2 • Capable of switching power to 100 % immediately • Mains input: 88 - 264 VAC / 47 – 63 Hz (when combined with external power supply) • Mains power consumption: max. 220 Watts • Remote interface connector intended for: - RF switch ON/OFF - RF power adjustment...