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FEMTO

Product catalog summary

Overview: The document provides detailed information about the FEMTO low pressure plasma system by Diener electronic GmbH + Co. KG, including its applications, basic configurations, and available options.

Applications:

Surface Cleaning: Used before bonding, soldering, or gluing.
Surface Activation: Prepares surfaces for printing, varnishing, or gluing.
Surface Etching: Suitable for microstructuring silicon or etching PTFE.
Surface Coating: Plasma polymerization for hydrophobic or hydrophilic layer deposition.

Application Areas: The system is applicable in various fields such as analysis (REM, TEM), archaeology, automotive, elastomer industry, medical technology, plastics industry, research and development, semiconductor industry, small scale manufacturing, sensor technology, sterilization, and textile treatment.

Basic Configuration:

Cabinets: Vary based on components/options with chamber volumes from 1.9 to 6 liters.
Power Supply: 230 V AC for tabletop systems and 400 V AC/3 phases for standalone systems.
Gas Supply: Includes needle valves and mass-flow controllers (MFCs).
Vacuum Chambers: Available in stainless steel, aluminum, quartz glass (UHP), and borosilicate glass (UHP) with various dimensions.
Loading Options: Includes trays, quartz glass boats, rotary drums, and flat trays in different materials.
Electrodes: Options for one or multi-level electrodes and RIE-electrodes.
Control Systems: Semi-automatic, PCCE-control (Microsoft Windows CE), and PC-control (Microsoft Windows XPE).
Generators: Frequencies include 40 kHz, 13.56 MHz, and 2.45 GHz with power ranges from 0 to 300 W, adjustable from 0 to 100%.
Vacuum Pumps: Available in various sizes and from different manufacturers, with optional active carbon filters.

Options: The system offers various options such as spare parts sets, pressure gauges, corrosive gas versions, gas bottles, pressure reducers, heating plates, temperature indicators, heatable chambers, Faraday boxes, polymerization equipment, test ink sets, oxygen generators, slow ventilation and pump down of vacuum chambers, TEM sample holder flanges, maintenance/service, documentation in national languages, and on-site installation with training. Additional options are available in the catalog.

Catalog excerpts

Low pressure plasma system / Niederdruck Plasmaanlage (e.g. before bonding, soldering or gluing) (z.B. vor dem Bonden, Loten Oder Verkleben) Low pressure plasma system Niederdruck Plasmaanlage (e.g. before printing, varnishing or gluing) (e.g. microstructuring of silicon or etching of PTFE) Coating of surfaces - plasmapolymerization (e.g. deposition of hydrophobic / hydrophilic layers) Application areas Automotive industry • Elastomer industry • Medical technology • Plastics industry • Semiconductor industry • Small scale manufacturing • Sensor technology • Textile treatment example of a water droplet textile surface. einem Beispiel einen handeltem Textilgewebe. Fabric - untreated Gewebe - unbehandelt (z.B. vor dem Bedrucken, Lackieren Oder Verkleben) (z.B. Strukturierung von Silizium Oder Anatzen von PTFE) durch Plasmapolymerisation (z.B. Abscheidung von hydrophoben / hydrophilen Schichten) Fabric - hydrophilic Gewebe - hydrophi Fabric - hydrophobic Gewebe - hydrophob Diener electronic GmbH + Co. KG Plasma-Surface-Technology D - 72224 Ebhausen (Germany) E-Mail : [email protected] Find us on the web at www.plasma.de / Besuchen Sie uns im Internet unter www.plasma.de

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Low pressure plasma system Niederdruck Plasmaanlage Basic configuration - The cabinets vary depending on the components / options - Chamber volume: depending on the version 1.9 - 6 liters - Power supply: 230 V AC for table top system, 400 V AC / 3 phases for stand alone system - Die Gehäuse variieren je nach Komponenten / Optionen - Kammervolumen: je nach Version 1,9 - 6 Liter - Spannungsversorgung: 230 V für Tischgerät, 400 V / 3 Phasen für Standgerät - Needle valves - Mass-Flow-Controller (MFCs) - Nadelventile - Mass-Flow-Controller (MFCs) Spare parts sets, pressure gauge, corrosive gas version,...

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