Surface Profile Analyzer SPA 25
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Measuring sys tem for sur f ace topography and roughness parameters

S u r f a c e P r o f i l e A n a l y z e r S PA 2 5 The Surface Profile Analyzer SPA 25 can measure surface topography and roughness parameters with exceptional speed and resolution. High resolution measuring technique height resolution / system noise [nm] The SPA 25 utilises the white-light interferometry technique that features a height resolution of down to 0.1 nm even with small magnification factors. This gives the SPA 25 a significant advantage over rivalling systems that use other techniques like focus variation or confocal microscopy. focus variation confocal microscopy white-light...

white-light interferometry precision piezoelectric drive with gauge control scan range (Z-direction) scan speed at full resolution scanning modes 11.3 µm/s vertical scanning interferometry extended phase shift interferometry height resolution (Z-direction) camera system USB 3 high speed camera 1920 x 1200 pixel with 170 frames/s up to 3000 frames/s with restricted ROI objectives magnification factor measuring field (X [mm] x Y [mm]) Mirau interferometer microscope objectives 2.5x sample table positioning resolution load capacity measuring head stand manual adjustment of z-axis fast...

DataPhysics Instruments GmbH • Raiffeisenstraße 34 • 70794 Filderstadt, Germany phone +49 (0)711 770556-0 • fax +49 (0)711 770556-99 sales@dataphysics-instruments.com • www.dataphysics-instruments.com © Copyright by DataPhysics Instruments GmbH, Filderstadt. Technical information is subject to change. Errors and omissions excepted. is a registered trademark of DataPhysics Instruments GmbH DS/SPA – 1911 – 1.0/En Photos: Daniel Maier. Artwork and layout: Daniel Maier