Semiconductor Manufacturing Process Sensing Solutions Cubic Sensor and Instrument Co.,Ltd.

Cubic Sensor and Instrument Co., Ltd. (hereinafter referred to as "Cubic") is a publicly listed company in SSE STAR Market (stock code:688665), specializing in smart gas sensors and superior gas analyzers. Established in 2003 in Wuhan Optics Valley, Cubic has established gas sensing technology platforms including optical technologies (NDIR, Ultraviolet Light Scattering, Laser Raman), ultrasonic technology, MEMS metal oxide semiconductor (MOX) technology, electrochemical technology, ceramic thick-film technology based high temperature solid electrolyte technology. Cubic has obtained more than...

20+Years Focus Emission Monitoring Solutions Core Technologies Quick Service Response Technical Support Numerous National Invention Patents International PCT Patents wtffi f'HHzca s picc*

I1CFM Online Particle Counter OPC-6510DS Description OPC-6510DS is a cleanroom airborne particle counter, which can accurately detect and calculate the number of different size particles in the air per unit volume. The device can simultaneously output the particle number of 5 channels of >0.3pm, >0.5pm, >1.0pm, >5.0pm, >10pm in pcs/28.3L or pcs/m3. The screen can realtime display the monitoring data, cleanroom IS014644-1 2015 grade and alarm once the particle quantity exceeds the set threshold. The touch screen also supports setting the output unit, display channel, concentration alarm threshold,...

I1CFM Portable Particle Counter 0PC-6511DS CUBIC Description Cubic portable particle counter 0PC-6511DS adopts the principle of light scattering with built-in unique laser diode, consistant RPM fan, and well-designed ultrasonic flow sensor, it is compliant to ISO 21501-4 requirement. Equipped with a high-capacity lithium battery and a user-friendly touch screen, the device displays monitoring data in real time, enabling efficient spot checking across multiple sites. Features ■ Built-in rechargeable Li-battery. ■ Sound and lightalarm once particle quantity exceeds the set threshold. ■ Calibration...

I Trace Moisture Sensor Gasboard-2520-H20 Description Gasboard-2520~H20 is TDLAS trace moisture sensor, designed for the measurement of trace moisture content in ultra-high purity gases for semiconductor industry manufacturing processes monitoring. With a long optical path for multiple light reflections, it can achieve ultra-low detection limit of 1 ppm and high resolution of 0.1 ppm in the low concentration range. Features ■ Tunable diode laser absorption spectroscopy (TDLAS) technology ensures high-precision and high-resolution trace moisture (H2O) measurement. ■ Narrowband laser spectroscopic...

Trace Oxygen Sensor Gasboard-2520-02 Description Cubic Gasboard-2520-02 is a high-performance oxygen gas sensor developed for trace amounts of oxygen monitoring during semiconductor manufacturing process. Based on tunable diode laser absorption spectroscopy (TDLAS) technology, it achieves highly accurate oxygen measurement with a minimum detection limit of Ippm and resolution of O.lppm. Features ■ Tunable diode laser absorption spectroscopy (TDLAS) technology ensures high-precision and high-resolution 02 measurement. ■ Narrowband laser spectroscopic absorption technology realizes unique selectivity...

| Mass Flow Controller Description Cubic offers a wide range of mass flow controllers and mass flow meters, featuring high accuracy and fast response. ■ Equipped with reliablethermal sensors and solenoid valves ■ Wide tu rndown ratio and broad measu rement range, f rom 10 SCCM to 500 SLM ■ Chem ically resistant to corrosive gases and vapors ■ Low pressure drop and easy installation ■ Supports multiple communication protocolsand power supply options * For more information, please contact: [email protected] Application ■ SemiconductorCVD Equipment ■ High-purity Gas Monitoring ■ Semiconductor...

CUBIC NDIR Gas Sensor Description The NDIR gas sensor is based on dual-beam NDIR technology, providing precise measurement of trace specialty gases in semiconductor applications through infrared spectral absorption. With an in-situ design and compact structure, it is particularly suitable for continuous on-site gas monitoring within CVD equipment chambers. Dual-beam NDIR technology for high sensitivity, capable for multiple gas detections ■ In-situ design enables fast response ■ No consumables required, long maintenance intervals and low cost ■ Supporting both analog and digital communication...

Trace Oxygen Analyzer Description Cubic trace oxygen analyzer is developed based on zirconia technology. It offers high accuracy, fast response, and a wide measurement range, making it especially suitable for real-time trace oxygen monitoring in ultraclean environments. ■ High measurementaccuracyatppm levels ■ Fast response time with readings In seconds ■ Excellent stability with no need for regular calibration ■ Compact, modular design for easy integration and installation ■ Enhanced user interface with intuitive display and easy operation ■ Strong anti-interference with low cross-sensitivity...

Trace Moisture Analyzer Description Cubic trace moisture analyzer is developed based on TDLAS technology. It delivers exceptional baseline stability, sensitivity, and fast response. It is specifically designed for real-time monitoring of trace moisture in ultra-clean environments. Features ■ Highly stable TDLAS sensing technology with no drift and no need for on-site calibration ■ High sensitivity with a detection limit as low as 20 ppb ■ High reliability, unaffected by gas cell contamination or mirror reflection losses ■ Easy to integrate and instal I, equipped with one RS-232 and two RS-485...

Add: Fenghuang No.3 Road, Fenghuang Industrial Park, Eastlake Hi-tech Development Zone,Wuhan, 430205, China Tel: +86-27-81628827 Fax: +86-27-87401159 Web:en.gassensor.com.cn E-mail:[email protected]