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FQCW266-200

Product catalog summary

Overview: The document provides technical specifications for the FQCW 266-200, a diode-pumped continuous wave solid-state laser developed by CryLaS GmbH. This laser operates at a wavelength of 266 nm and is designed for applications in lithography, inspection, spectroscopy, and analytics.

Specifications:

Optical Data: The laser emits at 266 ± 1 nm with a nominal output power of 200 ± 5 mW. It features a linewidth of less than 300 kHz and a coherence length greater than 1000 meters. The beam propagation factor is M² < 1.3, TEM00, with a beam diameter of 0.6 ± 0.1 mm and divergence of less than 0.8 mrad.
Electrical Data: The laser consumes less than 100 W on average, with a maximum of 160 W. It operates on a line voltage of 85 - 264 V AC (47-63 Hz) and includes USB/RS232 communication interfaces.
Safety Features: The system includes a key switch and interlock for safety, and it is classified as a Class 4 laser according to IEC 60825-1 standards.
Miscellaneous: The laser head dimensions are 91 x 270 x 379 mm³, and it weighs 14.7 kg. The control unit dimensions are 42 x 165 x 164 mm³, weighing 1.0 kg. The warm-up time is less than 15 minutes, and the operating temperature range is 20 - 35 °C.

Design and Patents: The laser features a patented design, protected by patents DE102022104383B3, DE102010064382B4, and US9429814B2. It includes an Automatic Crystal Shifter (ACS) and a Manual Window Shifter (MWS) for external photo contamination management.

Compliance: The laser complies with IEC 60825-1:2014 and 21CFR 1040.10 and 1040.11, with specific deviations as per Laser Notice No. 50.

Catalog excerpts

Crystal Laser Systems _________________________________________________ FQCW 266-200 Diode Pumped Continuous Wave Solid State Laser 266 nm Continuous Wave Single Frequency Low Intensity Noise M² < 1.3, TEM00 Up to 200 mW Conduction Cooled Patented Design (*) lithography · inspection · spectroscopy · analytics Optical Data Wavelength Nominal Output Power Output Power Adjustability Coherence Length Beam Propagation Factor M² Polarisation orientation and purity Beam Diameter Beam Divergence Beam Pointing Stability Static Alignment Tolerance Electrical Data lateral ± 0.25 mm, angular ± 2.5 mrad Power Consumption Mean (Max) Line Voltage for external power supply Communication Interfaces Safety Features Warm-up Time (cold starting) Operating Temperature (laser head) < 100 W (160 W) 85 - 264 V AC (47-63 Hz) USB / RS232 key switch, interlock < 15 min 20 - 35 °C non-condensing Laser Head Dimensions Control Unit Dimensions (w/o connectors) Laser Head Weight Control Unit Weight Notes 1. After 30 minutes warm-up in the temperature range 20 - 35 °C, temperature change < 1 K/h. 2. Position and angle of static alignment tolerances are specified with regard to laser beam exit. 3. The exit window is equipped with the Manual Window Shifter (MWS) in case of external photo contamination. This laser system is equipped with the Automatic Crystal Shifter (ACS). (*) Protected by patents: DE102022104383B3, DE102010064382B4, US9429814B2 Rev. 10 Page 1 of 2 CryLaS GmbH · Ostendstraße 25 · D-12459 Berlin · Fon +49(0)30 - 5304 2400 · Fax +49(0)30 - 5304

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Crystal Laser Systems _________________________________________________ Dimensions Laser Head: Control Unit: Laser Safety Labels FQCW266 laser sources are class 4 / IV lasers according to IEC 60825-1 Model: Wavelength: Max. Output Power: Laser Class: Complies with IEC 60825-1:2014 Complies with 21CFR 1040.10 and 1040.11 except for deviations pursuent to Laser Notice No. 50, dated July 26, 2001. © Mar. 2024, Rev 10, CryLaS GmbH. All rights reserved. Product specifications are subject to change without notice Rev. 10 Page 2 of 2 CryLaS GmbH · Ostendstraße 25 · D-12459 Berlin · Fon +49(0)30 - 5304...

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FQCW266-200

FQCW266-200

Catalog excerpts

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