Crystal Laser Systems _________________________________________________ FQCW 266-100 Diode Pumped Continuous Wave Solid State Laser 266 nm Continuous Wave Single Frequency Low Intensity Noise M² < 1.3, TEM00 Up to 100 mW Conduction Cooled Patented Design (*) lithography · inspection · spectroscopy · analytics Optical Data Wavelength Nominal Output Power Output Power Adjustability Coherence Length Beam Propagation Factor M² Polarisation orientation and purity Beam Diameter Beam Divergence Beam Pointing Stability Static Alignment Tolerance Electrical Data lateral ± 0.25 mm, angular ± 2.5 mrad Power Consumption Mean (Max) Line Voltage for external power supply Communication Interfaces Safety Features Warm-up Time (cold starting) Operating Temperature (laser head) < 100 W (160 W) 85 - 264 V AC (47-63 Hz) USB / RS232 key switch, interlock < 15 min 20 - 35 °C non-condensing Laser Head Dimensions Control Unit Dimensions (w/o connectors) Laser Head Weight Control Unit Weight Notes 1. After 30 minutes warm-up in the temperature range 20 - 35 °C, temperature change < 1 K/h. 2. Position and angle of static alignment tolerances are specified with regard to laser beam exit. 3. The exit window is equipped with the Manual Window Shifter (MWS) in case of external photo contamination. This laser system is equipped with the Automatic Crystal Shifter (ACS). (*) Protected by patents: DE102022104383B3, DE102010064382B4, US9429814B2 Rev. 10 Page 1 of 2 CryLaS GmbH · Ostendstraße 25 · D-12459 Berlin · Fon +49(0)30 - 5304 2400 · Fax +49(0)30 - 5304

Crystal Laser Systems _________________________________________________ Dimensions Laser Head: Control Unit: Laser Safety Labels FQCW266 laser sources are class 4 / IV lasers according to IEC 60825-1 Model: Model: Wavelength: Wavelength: Max. Max. Output Output Power: Power: Laser Laser Class: Class: Complies Complies with withIEC IEC60825-1:2014 60825-1:2014 Complies with with21CFR 21CFR1040.10 1040.10and and1040.11 1040.11 except except for fordeviations deviations Complies pursuentto to Laser Laser Notice Notice No. No.50, 50, dated datedJuly July26, 26,2001. 2001. pursuent © Mar. 2024, Rev...