EPS Capsule Filters Symmetric Polyethersulfone (PES) Membrane Photo Processing Chemicals Acids & Bases Etch Baths Plating Solutions EPS Capsules are hydrophilic and manufactured with the highest quality symmetric polyethersulfone (PES) membrane. PES membrane exhibits excellent flow rates with precise retention ratings. EPS capsules are used for critical applications in contamination control. Excellent flow rates with precise retention ratings Final filtration of UPDI Water, acids, bases, resists, solvents V ery low extractables and rinses to high purity very quickly Capsule Length Polyethersulfone has high flow rates and very low extractables and rinses to high purity very quickly. It is particularly suited for the filtration of water and aqueous solutions used in the production of the latest low nanometer geometry products. Flow Rate / Filtration Area The following table represents typical water flow at a one psi (69 mbar) pressure differential across a single 2 inch capsule with 1.0 ft² (930 cm²) of media with 1/2” FNPT ports. The test fluid is water at ambient temperature. Higher pressure drops are acceptable, but as flows increase the pressure drop of the housing becomes more apparent.. 0.03 μm Pore Size * For approximate flow rates for 5” through 30” capsules, refer to the appropriate cartridge data sheet Construction Materials Maximum Operating Parameters Liquid Operational Pressure Filtration Media Symmetric Polyethersulfone (PES) Membrane Gases Operational Pressure Operating Temperature Media Support Forward Differential Pressure 50 psid (3.4 bard) at 20 °C (68 °F) Center Core Reverse Differential Pressure Outer Support Cage Sealing Method Thermal Bonding Recommended Changeout Pressure Electronics Grade EPS Capsule Filters - Filtration Area EPS capsule filters are used for final filtration of ultrapure DI water, low to moderate temperature final filtration of acids and bases, solvents, alcohols, copper plating solutions, photo resists and other liquids. Electronics grade PS capsules are most often applied for final filtration in tools at the point of dispensing.

Integrity Test Specifications Pore Size Quality Assurance and Standards Max Diffusion Rate (cc/min -water wetted membrane) The levels of extractables in aqueous extracts from electronics grade capsule filters are below 3ppb of TOC after product rinse during manufacturing. Electronics grade filters typically exhibit very low levels of extractables during startup. Critical Process Filtration uses state of the art computer controlled equipment to consistently produce high quality products as well as significantly reduce hand operations that can compromise quality. All manufacturing and testing is...