ENM Capsule Filters Nylon 6,6 Membrane Photoresists ENM Capsules are hydrophilic and manufactured with the highest quality Nylon 6,6 membrane. The Nylon 6,6 is capable of removing particles below the rated micron size, and exhibits broad chemical compatibility. ENM capsules are used for critical applications in contamination control such as final filtration of ultrapure DI water in the water loop or at the point of use. They are also used for final filtration of solvents, alcohols, photoresists and other liquids in distribution systems or in tools. H igh efficiency retention ratings with broad chemical compatibility Nylon has very low extractables and rinses to high purity very quickly. It is particularly suited for the filtration of solvents used in the production of low nanometer geometry products. Final filtration of UPDI water, resists, solvents V ery low extractables; rinses to high purity very quickly Capsule Length Flow Rate / Filtration Area The following table represents typical water flow at a one psi (69 mbar) pressure differential across a single 2 inch capsule with 1.0 ft² (930 cm²) of media with 1/2” FNPT ports. The test fluid is water at ambient temperature. Higher pressure drops are acceptable, but as flows increase the pressure drop of the housing becomes more apparent. 0.10 μm Pore Size * For approximate flow rates for 5” through 30” capsules, refer to the appropriate cartridge data sheet Construction Materials Maximum Operating Parameters Liquid Operational Pressure Filtration Media Gases Operational Pressure Media Support Operating Temperature Center Core Outer Support Cage Sealing Method Thermal Bonding Forward Differential Pressure 50 psid (3.4 bard) at 20 °C (68 °F) Reverse Differential Pressure Recommended Changeout Pressure Electronics Grade ENM Capsule Filters - Filtration Area

Integrity Test Specifications Pore Size Quality Assurance and Standards Max Diffusion Rate (cc/min -water wetted membrane) The levels of extractables in aqueous extracts from E-grade capsule filters are below 3ppb of TOC after product rinse during manufacturing. E-grade filters typically exhibit very low levels of non-volatile residues during startup. Critical Process Filtration uses state of the art computer controlled equipment to consistently produce high quality products as well as significantly reduce hand operations that can compromise quality. All manufacturing and testing is continuously...