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HPFSDataProperties

HPFSDataProperties

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HPFSDataProperties

Product catalog summary

Specifications and Grades:

HPFS® 7979: Available in IR Grade with inclusion class 0, 1, 2 and homogeneity grades AA, A, C, F. Birefringence is 5 nm/cm, and metallic impurities are less than 100 ppb.
HPFS® 7980: Offers multiple grades including Standard, KrF, ArF, and Mirror Grades. Standard Grade has inclusion class 0 - 5 and homogeneity grades AA - F, with metallic impurities less than 1000 ppb. KrF and ArF Grades have inclusion class 0, 1, 2 and homogeneity grades AA, A, C, F, with metallic impurities less than 500 ppb and 100 ppb respectively.
HPFS® 8652 and 8655: Both are ArF Grades with inclusion class 0, 1, 2 and homogeneity grades AA, A, C, F, with metallic impurities less than 10 ppb.

Additional Notes:

Lower specifications for birefringence are available upon request.
Some grades, such as the ArF Grade, are designed to have no visible fluorescence when exposed to a deuterium source from 215 nm to 400 nm, and contain hydrogen to minimize absorption under UV exposures.
HPFS 7980 Standard Fluorescence-Free Grade is available upon request.

Catalog excerpts

* No visible fluorescence when exposed to deuterium source from 215 nm - 400 nm. Material contains hydrogen to minimize absorption under UV exposures. ** HPFS 7980 Standard Fluorescence-Free Grade available upon request.

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