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COHERENT
Product catalogue

Product catalogue

Product catalog summary

Overview: This document is a 2008 product catalog for Coherent's excimer lasers and UV optical systems, emphasizing their reliability and performance. Coherent is recognized as the largest laser manufacturer globally and a leader in excimer technology, offering a wide range of excimer and UV lasers.

Main Sections:

Company Advantages: Coherent is a leader in UV technology with global applications labs, providing high power, high pulse energy, compact light sources, OEM integration, and excellent customer service.
Laser Selection Guide: Details specifications for various excimer laser models, including ExciStar XS, Xantos XS, BraggStar Industrial Series, IndyStar, COMPexPro, LPXPro Series, and LAMBDA SX. Key parameters include wavelength, maximum energy, and repetition rate.
Applications Matrix: Lists potential applications for excimer lasers, such as marking, material processing, surface treatment, measurement, and medical procedures, with examples like high-speed cable marking and refractive eye surgery.
Applications Labs Worldwide: Coherent has labs in Japan, the USA, and Germany for feasibility testing in material processing.
Product Descriptions and Specifications: Provides detailed descriptions and specifications for laser models, highlighting features like compact design, gas management, and maintenance-free operation.
Accessories: Lists available accessories for specific laser models, such as energy monitors and electromechanical shutters.

Key Features and Benefits:

ExciStar XS: Features an ultra-compact design, lightweight, extended tube lifetime, homogeneous beam profile, and maintenance-free operation.
Xantos XS: Offers integrated gas management, high pulse-to-pulse stability, and compliance with safety standards.
BraggStar Industrial Series: Known for high uptime, low maintenance, suitable for FBG writing, and available with line-narrowing for high coherence applications.

Conclusion: Coherent's excimer lasers are designed for high performance and reliability, supported by global facilities and extensive expertise in UV technology.

IndyStar Excimer Lasers:

Key Features: Industrial design for high uptime and low maintenance, corona preionization for a homogeneous beam profile, solid-state pulser for stability, and air-cooled design for easy integration.
Specifications: Available at 193 nm and 248 nm wavelengths, with a maximum repetition rate of 1000 Hz and pulse energy up to 16 mJ.
Utilities: Weighs 135 kg, air-cooled with optional water cooling, and requires 230V electrical input.

COMPexPro Excimer Lasers:

Key Features: Ceramic preionization for stability, integrated vacuum pump, and air-cooled design for easy integration.
Specifications: Offers multiple models with varying wavelengths and pulse energies, with a maximum repetition rate of 100 Hz.
Utilities: Weighs between 250 kg and 325 kg, requires water cooling, and operates on 230V or 115V electrical input.

LPXPro Excimer Lasers:

Key Features: External resonator optics for stability, ceramic preionization, and integrated energy monitor.
Specifications: Available in various models with wavelengths from 157 nm to 351 nm, offering high pulse energies and repetition rates up to 200 Hz.
Utilities: Weighs between 270 kg and 300 kg, requires water cooling, and operates on 208V or 440V electrical input.

LAMBDA SX Excimer Lasers:

Key Features: Industrial design with modular setup, external resonator for stability, and advanced diagnostics.
Specifications: Models available with wavelengths of 248 nm and 308 nm, offering high stabilized pulse energies and repetition rates up to 600 Hz.
Utilities: Weighs between 1320 kg and 1480 kg, requires significant water cooling, and operates on 400 VAC electrical input.

Excimer Lasers On-Site Requirements:

Cooling: Excimer lasers have low efficiency (2-3%), with most energy dissipated as heat. Low duty cycle lasers are air-cooled, while medium to high power lasers require water or external heat exchangers.
Exhaust Ventilation: Laser systems must be connected to an exhaust ventilation system. Specific models like COMPexPro, LPXPro, and LAMBDA SX have built-in fans for necessary negative pressure.
Beam Path Purging: Operation at 157 nm and 193 nm requires nitrogen purging to prevent air absorption.
Power Supply: Power requirements vary by model, with options for single-phase or three-phase connections.
Gas Supply: The active medium is a mix of rare gas, halogen, and buffer gas. Additional gases like nitrogen and helium are needed for purging and service procedures.

UV Optical Systems:

Functional Blocks: UV optical systems include illumination and imaging beam paths, shaping laser radiation to illuminate a mask and project onto a substrate.
VarioLas Systems: These systems are flexible tools for R&D in micromachining, offering adjustable optics for varying parameters and high-resolution imaging.
Specifications: VarioLas 100 and 500 systems offer different wavelength options, field sizes, and energy densities, suitable for various applications like drilling and material processing.

Components:

Attenuator Modules: Available in manual and motorized versions, these modules provide variable attenuation with high thermal stability.
Mirror Modules: Include HR mirrors for beam deflection and observation, with specific dimensions and reflectivity based on wavelength.
Lenses: Various cylindrical and spherical lenses are available, AR-coated for specific wavelengths.
Homogenizers: Different sizes and configurations are offered, with options for field dimensions and homogeneity.
Projection Lenses: These lenses offer various demagnification ratios and spatial resolutions, suitable for different wavelengths and applications.

Overview: This document provides detailed information on various laser measurement and control accessories offered by Coherent, Inc. It includes specifications, recommendations, and contact information for different regions.

Specifications: The document lists several models of laser measurement devices such as FieldMaxII-TO, LabMax-TOP, and various EnergyMax sensors. Each model is described with its capabilities, such as power and energy measurement ranges, compatibility with different sensors, and connectivity options.

Procedures and Recommendations: The document includes a matrix of recommendations for wavelength, power measurement, and energy measurement. It also provides guidance on using optional heat sinks with EnergyMax sensors to enhance measurement accuracy.

Norms and Standards: The sensors are NIST-traceable, ensuring measurement accuracy. The document emphasizes the importance of spectral mapping and thermal compensation for precise measurements.

Contact Information: Coherent provides contact details for technical sales support in the USA, Europe, Japan, and other regions. The document encourages reaching out for further information or advice on measurement equipment.

Company Information: Coherent, Inc. is presented as a reliable partner in laser technology, offering a wide range of solutions for commercial and scientific applications. The company has a history of providing reliable and high-performance laser products.

Catalog excerpts

Superior Reliability & Performance >

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Laser Selection Guide 4 Excimer Lasers4 Applications Matrix 7 Applications Labs Worldwide 9 Excimer Lasers ExciStar XS10 Xantos XS12 BraggStar Industrial Series14 IndyStar18 COMPexPro20 LPXPro Series22 LAMBDASX24 On-Site Requirements30 UV Optical Systems and Components 32 Laser Measurementand Control Accessories 42 > www.Coherent.com [email protected]

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Laser Selection Guide Wavelength (nm)Max.Energy (mJ)Max.Repetition Rate (Hz) ExciStar XS > 1 1571200/5001935200/5002488200/500 3514200/500 Xantos XS > 1 157150019355002488500 3514500 BraggStar Industrial Series > 1 BraggStar Industrial 19371000 248101000 BraggStar Industrial LN 193>0.51000 24821000 IndyStar > 1 193121000 248161000 COMPexPro COMPexPro F2 1571650 COMPexPro 50 19310050 24815050 COMPexPro 100 193200100248400100308250100 351200100 COMPexPro 200 193400502487005030750050 35130050 > 1 Max.energy (mJ) is stabilized energy.

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Laser Selection Guide Wavelength (nm)Max.Energy (mJ)Max.Repetition Rate (Hz) LPXPro Series LPFPro 200 15750200 LPXPro 210 193450100248800100308500100 351400100 LPXPro 220 193300200248550200308300200 351200200 LPXPro 305 1936005024811005030870050 35140050 LAMBDASX LAMBDASX C-Series 300 Hz 3081050300 LAMBDA SX K-Series 2481000300 LAMBDA SX C-Series600 Hz 308900600 > www.Coherent.com [email protected]

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Glass Marking (courtesy of Carl Zeiss Vision) Laser ModelExciStar XS Wavelength (nm)193 Number of Shots Per PermanentMark300 to 400 Total Costs Per Mark ( )0.1 to 0.2 > Applications Matrix Cylinder Honing Laser ModelLAMBDASX Wavelength (nm)308 Repetition Rate (Hz)300 Advanced Wafer Marking (courtesy of Innolas) Laser ModelIndyStar Wavelength (nm)193 Number of Shots Per Wafer Mark2500 Laser DirectPatterning of Circuits (courtesy of LPKF) Laser ModelLAMBDA SX Wavelength (nm)308 Repetition Rate (Hz)Up to 300 > www.Coherent.com [email protected]

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Applications Matrix Excimer Laser Advantages HighPulseEnergy > Mostflexible,variable,and powerful UV lasersource available on the market. FlexibleRepetitionRate LowCoherence > LaserPulses onDemand Stable BeamPropertiesover OperationRange >

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Specifications (continued) Wavelength (nm)157193248351 PartNo.EXS-200-157 nm-XSEXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz,withoutenergy monitor)-w/o emon -w/o emon-w/o emon -w/o emon 111588111158791115884On requestPartNo.EXS-200-157 nm-XSEXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz,with energy monitor)111588211158801115885On request PartNo.EXS-500-157 nm-XSEXS-500-193 nm-XS EXS-500-248 nm-XS EXS-500-351 nm-XS (500 Hz,withoutenergy monitor)-w/o emon-w/o emon-w/o emon-w/o emon 112441111244131124415On requestPartNo.EXS-500-157 nm-XSEXS-500-193 nm-XSEXS-500-248...

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Specifications (continued) Wavelength (nm)157193248351PartNo.Xantos XS-500- Xantos XS-500- Xantos XS-500-Xantos XS-500-(always includes energy monitor 157 nm193 nm248 nm351 nm and electromechanical shutter)1123361112336211233631123364 4.Weight/Utilities/Dimensions 5.Accessories Weight170 kg/374.8 lbs. No accessories available. CoolingAir-cooledElectrical230V,50 to 60 Hz,2000 VAC,16A (recommended external fuse), > Excimer Lasers single-phaseDimensions900 x 400 x 1045 mm (L x W x H)(35.4 x 15.8 x 41.1 in.) [including signal lamp] > www.Coherent.com [email protected]

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3.Specifications > 1 BraggStar IndustrialBraggStar Industrial LN Wavelength (nm)193248193248 Max.Repetition Rate (Hz)1000100010001000 Max.Pulse Energy (mJ)111614 Stabilized Pulse Energy (mJ)710>0.52 Average Pulse Power > 2 (W)710>0.52 Energy Stability > 2 (sigma,%)3363 Beam Dimensions (FWHM,V x H,mm > 2 )6 x 36 x 36 x 1.56 x 1.5 Beam Divergence (FWHM,V x H,mrad > 2 )2 x 12 x 12 x 12 x 1 Pulse Duration (ns)(typ.)12151215 > Excimer Lasers Temporal Coherence (FWHM,m)>30>120>3000>3000 Spatial Coherence (FWHM,յm)>700>1500>300>600 Spectral Bandwidth > 3 (FWHM)naturalnatural<15<15 Wavelength (nm)193248193248PartNo.BSI...

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5.Accessories PartNo.ProductDescription 3-15-0004-000External heatexchangerKB200V 19" version (for 50 or 60 Hz and 100,115,200,208 and 230V), Cooling capacity 2.0 kW,water-to-air > Excimer Lasers www.Coherent.com ו [email protected]

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1.Description 2.Key Features and Customer Benefits The IndyStar series represents the successor of the ExciStar S-Industrial.With the integrated new tube technology AlmetaӔthe IndyStar provides multiple lifetimes for consumables like LDU (laser discharge unit) and optics aboutseveral billion pulses compared to the ExciStar S-Industrial.IndyStar excimer lasers are highly effective lightsources,featuring a compactdesign and easy integration and operation,delivering superior results in demanding applications,such as photomask inspection (classificationand detection of mask defects) and micromachining...

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1.Description 2.Key Features + Customer Benefits The LAMBDA SX industrial excimer laser series provideshighly stabilized UV power to the production floor.Itis designed to deliver the bestenergy stability available,and also features a number of innovative technologies forunsurpassed performance and reliability. Key Features Customer Benefits Industrial Design ٕ Rugged and reliable Modular setupIndustrial Interfaces Օ Integrated industrial PC Serial interface RS-232 Օ DirectControl Port(DCP) for easyintegration into PowerLok Proprietary PowerLok technology brings every pulse of a bursttrain to...

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3.Specifications > 1 LAMBDA SX 300KLAMBDA SX 200K Wavelength (nm)248248 Maximum Stabilized Pulse Energy (mJ)800 to 1000550 to 670 Maximum Stabilized Average Power > 1 (W)300200 Maximum Repetition Rate (Hz)300300 Energy Stability (rms,%)<_2<_2 Pulse Duration (FWHM)(ns)3424 Beam Dimensions (FWHM,V x H,mm > 2 ) > 2 36 x 1636 x 16 Beam Divergence (FWHM,V x H,mrad)<_4.5 x 1.5<_4.5 x 1.5Dynamic Gas Lifetime >40>40 > Excimer Lasers (atmax.stabilized energy) (mio.pulses) PartNo.111390331139031 LAMBDA SX 300K,400 VAC,50/60 Hz LAMBDA SX 200K,400 VAC,50/60 HZ > 1 All specifications are typical data and...

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