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Laser Selection Guide 4 Excimer Lasers4 Applications Matrix 7 Applications Labs Worldwide 9 Excimer Lasers ExciStar XS10 Xantos XS12 BraggStar Industrial Series14 IndyStar18 COMPexPro20 LPXPro Series22 LAMBDASX24 On-Site Requirements30 UV Optical Systems and Components 32 Laser Measurementand Control Accessories 42 > www.Coherent.com [email protected]

Laser Selection Guide Wavelength (nm)Max.Energy (mJ)Max.Repetition Rate (Hz) ExciStar XS > 1 1571200/5001935200/5002488200/500 3514200/500 Xantos XS > 1 157150019355002488500 3514500 BraggStar Industrial Series > 1 BraggStar Industrial 19371000 248101000 BraggStar Industrial LN 193>0.51000 24821000 IndyStar > 1 193121000 248161000 COMPexPro COMPexPro F2 1571650 COMPexPro 50 19310050 24815050 COMPexPro 100 193200100248400100308250100 351200100 COMPexPro 200 193400502487005030750050 35130050 > 1 Max.energy (mJ) is stabilized energy.

Laser Selection Guide Wavelength (nm)Max.Energy (mJ)Max.Repetition Rate (Hz) LPXPro Series LPFPro 200 15750200 LPXPro 210 193450100248800100308500100 351400100 LPXPro 220 193300200248550200308300200 351200200 LPXPro 305 1936005024811005030870050 35140050 LAMBDASX LAMBDASX C-Series 300 Hz 3081050300 LAMBDA SX K-Series 2481000300 LAMBDA SX C-Series600 Hz 308900600 > www.Coherent.com [email protected]

Glass Marking (courtesy of Carl Zeiss Vision) Laser ModelExciStar XS Wavelength (nm)193 Number of Shots Per PermanentMark300 to 400 Total Costs Per Mark ( )0.1 to 0.2 > Applications Matrix Cylinder Honing Laser ModelLAMBDASX Wavelength (nm)308 Repetition Rate (Hz)300 Advanced Wafer Marking (courtesy of Innolas) Laser ModelIndyStar Wavelength (nm)193 Number of Shots Per Wafer Mark2500 Laser DirectPatterning of Circuits (courtesy of LPKF) Laser ModelLAMBDA SX Wavelength (nm)308 Repetition Rate (Hz)Up to 300 > www.Coherent.com [email protected]

Applications Matrix Excimer Laser Advantages HighPulseEnergy > Mostflexible,variable,and powerful UV lasersource available on the market. FlexibleRepetitionRate LowCoherence > LaserPulses onDemand Stable BeamPropertiesover OperationRange >

Specifications (continued) Wavelength (nm)157193248351 PartNo.EXS-200-157 nm-XSEXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz,withoutenergy monitor)-w/o emon -w/o emon-w/o emon -w/o emon 111588111158791115884On requestPartNo.EXS-200-157 nm-XSEXS-200-193 nm-XS EXS-200-248 nm-XS EXS-200-351 nm-XS (200 Hz,with energy monitor)111588211158801115885On request PartNo.EXS-500-157 nm-XSEXS-500-193 nm-XS EXS-500-248 nm-XS EXS-500-351 nm-XS (500 Hz,withoutenergy monitor)-w/o emon-w/o emon-w/o emon-w/o emon 112441111244131124415On requestPartNo.EXS-500-157 nm-XSEXS-500-193 nm-XSEXS-500-248...

Specifications (continued) Wavelength (nm)157193248351PartNo.Xantos XS-500- Xantos XS-500- Xantos XS-500-Xantos XS-500-(always includes energy monitor 157 nm193 nm248 nm351 nm and electromechanical shutter)1123361112336211233631123364 4.Weight/Utilities/Dimensions 5.Accessories Weight170 kg/374.8 lbs. No accessories available. CoolingAir-cooledElectrical230V,50 to 60 Hz,2000 VAC,16A (recommended external fuse), > Excimer Lasers single-phaseDimensions900 x 400 x 1045 mm (L x W x H)(35.4 x 15.8 x 41.1 in.) [including signal lamp] > www.Coherent.com [email protected]

3.Specifications > 1 BraggStar IndustrialBraggStar Industrial LN Wavelength (nm)193248193248 Max.Repetition Rate (Hz)1000100010001000 Max.Pulse Energy (mJ)111614 Stabilized Pulse Energy (mJ)710>0.52 Average Pulse Power > 2 (W)710>0.52 Energy Stability > 2 (sigma,%)3363 Beam Dimensions (FWHM,V x H,mm > 2 )6 x 36 x 36 x 1.56 x 1.5 Beam Divergence (FWHM,V x H,mrad > 2 )2 x 12 x 12 x 12 x 1 Pulse Duration (ns)(typ.)12151215 > Excimer Lasers Temporal Coherence (FWHM,m)>30>120>3000>3000 Spatial Coherence (FWHM,յm)>700>1500>300>600 Spectral Bandwidth > 3 (FWHM)naturalnatural<15<15 Wavelength (nm)193248193248PartNo.BSI...

5.Accessories PartNo.ProductDescription 3-15-0004-000External heatexchangerKB200V 19" version (for 50 or 60 Hz and 100,115,200,208 and 230V), Cooling capacity 2.0 kW,water-to-air > Excimer Lasers www.Coherent.com ו [email protected]

1.Description 2.Key Features and Customer Benefits The IndyStar series represents the successor of the ExciStar S-Industrial.With the integrated new tube technology AlmetaӔthe IndyStar provides multiple lifetimes for consumables like LDU (laser discharge unit) and optics aboutseveral billion pulses compared to the ExciStar S-Industrial.IndyStar excimer lasers are highly effective lightsources,featuring a compactdesign and easy integration and operation,delivering superior results in demanding applications,such as photomask inspection (classificationand detection of mask defects) and micromachining...

1.Description 2.Key Features + Customer Benefits The LAMBDA SX industrial excimer laser series provideshighly stabilized UV power to the production floor.Itis designed to deliver the bestenergy stability available,and also features a number of innovative technologies forunsurpassed performance and reliability. Key Features Customer Benefits Industrial Design ٕ Rugged and reliable Modular setupIndustrial Interfaces Օ Integrated industrial PC Serial interface RS-232 Օ DirectControl Port(DCP) for easyintegration into PowerLok Proprietary PowerLok technology brings every pulse of a bursttrain to...

3.Specifications > 1 LAMBDA SX 300KLAMBDA SX 200K Wavelength (nm)248248 Maximum Stabilized Pulse Energy (mJ)800 to 1000550 to 670 Maximum Stabilized Average Power > 1 (W)300200 Maximum Repetition Rate (Hz)300300 Energy Stability (rms,%)<_2<_2 Pulse Duration (FWHM)(ns)3424 Beam Dimensions (FWHM,V x H,mm > 2 ) > 2 36 x 1636 x 16 Beam Divergence (FWHM,V x H,mrad)<_4.5 x 1.5<_4.5 x 1.5Dynamic Gas Lifetime >40>40 > Excimer Lasers (atmax.stabilized energy) (mio.pulses) PartNo.111390331139031 LAMBDA SX 300K,400 VAC,50/60 Hz LAMBDA SX 200K,400 VAC,50/60 HZ > 1 All specifications are typical data and...