MicroLas UV Beam Delivery Solutions Superior Reliability & Performance

UV Laser Beam Delivery Solutions The power of experience. Coherent has delivered more excimer lasers than all other laser companies combined, and has provided excimer beam delivery solutions longer than anyone. This unparalleled experience means you get cutting-edge performance based on time-proven products. Precision and stability. Ultraviolet processing with excimer lasers often involves sub-micron precision, particularly for applications such as micro-hole drilling. We understand how to produce the necessary mechanical stability and precision, while delivering the required energy uniformity...

Coherent is the major supplier of excimer lasers for the annealing and crystallization of thin silicon films used in AMLCD. MicroLas, LineBeam, CrystaLas, GeoLas, VarioLas, Attenuator Module • Active matrix liquid crystal displays (AMLCD) • Thin-film transistors • Laser ablation inductively coupled plasma mass spectrometry (LA-ICPMS) • Pulsed laser deposition (PLD) • Surface annealing • Laser-induced fluorescence (LIF) Application-Optimized Excimer Solutions Successful integration of an excimer laser with a particular process requires transforming and optimizing the laser’s output for that particular...

High-precision micromachining applications, such as inkjet nozzle drilling, typically require uniform illumination of a photomask and demagnified re-imaging of this mask onto the work surface. The modular MicroLas 5X Optical System answers this need. Cutting-Edge Applications Our unique optical products enable many cutting-edge applications. For example, producing the latest high-resolution displays for PDAs involves the re-crystallization of a polysilicon layer. For this procedure, the sequential lateral solidification (SLS) process has been developed. This new scheme, accomplished with just...

Integrated, versatile VarioLas tool for R&D, prototyping and small batch manufacturing. Other Systems & Accessories VarioLas™ is the most flexible member of the MicroLas product line. It is used in various R&D applications, including glass marking, materials research, and combustion studies, as well as for micromachining metal, polyimide, Teflon, and quartz. VarioLas is a useradjustable system that enables the energy density to be varied over a range of fluences, while maintaining high spatial resolution at the substrate. VarioLas systems are also available to support a wide variety of field...

Coherent as your partner. To compete and succeed in today’s fast-paced research and manufacturing environments, you need a laser partner who understands your needs. A partner who can provide a wide range of technology solutions, and the support that goes with them. Since 1966, Coherent has been helping customers by providing complete laser-based solutions for a wide range of commercial and scientific applications. With a heritage of innovation and an uncompromising position on quality, Coherent is the most forward-thinking and diversified manufacturer of solid-state, gas, excimer and semiconductor...