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LPXpro Series

LPXpro Series

Product catalog summary

Overview: The LPXpro Series High-Duty-Cycle Excimer Lasers are designed for high-performance applications, offering features such as high UV-pulse energies, flexible operation, and superior reliability. These lasers are suitable for precise micromachining and efficient processing.

Key Features:

UV-pulse energies up to 1.1J for efficient processing.
High peak power nanosecond pulses for precise micromachining.
Flexible pulse energy and repetition rate.
Longest gas life in the market.
Multi-wavelength operation for various applications (193, 248, 351 nm).
Specific versions for 308 nm and deep UV (157 and 193 nm).
Internal burst generator and multiple interface options.

Specifications:

Wavelengths: 157 to 800 nm, with specific models for different ranges.
Max Pulse Energy: Up to 1.8J depending on the model and wavelength.
Max Repetition Rate: Up to 400 Hz.
Energy Stability: Less than 1% at 5 Hz for 248 nm.
Pulse Duration: 10 to 50 ns.
Beam Dimensions and Divergence: Specified for various wavelengths.
Electrical Requirements: 208 or 400V, 50/60 Hz, 3-phase.
Cooling: Water cooling required, up to 7 l/min.
Weight and Dimensions: Laser head and power supply dimensions and weights provided.

Safety and Compliance: The lasers comply with Federal Regulations and are classified as Class IV laser radiation products. Users should avoid exposure to direct or scattered radiation.

Warranty and Support: Coherent offers a limited warranty for the LPXpro Series. Details are available on their website or through local sales representatives.

Contact Information: Coherent, Inc. provides contact details for various regions, including phone numbers and email addresses for technical sales support.

Catalog excerpts

LPXpro Series High-Duty-Cycle Excimer Lasers Features • Highest UV-pulse energies up to 1.1J for efficient processing per pulse • F-version multi-wavelength for 193, 248, 351 nm changeable operation • High peak power nanosecond pulses for precise and clean micromachining • C-version for 308 nm operation • LPF deep UV version for 157 and 193 nm operation • Flexible pulse energy and repetition rate for efficient operation • Internal burst generator • Longest gas life on the market • Hand-held terminal or RS-232 interface • True specs: performance specified with margin for reliable long-term operation Mechanical Specifications Beam Exit Side View Connection Side View 45 mm + 40 mm (1.8 in. + 1.5 in.) Superior Reliability & Performance

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LPXpro™ Series High-Duty-Cycle Excimer Lasers System Specifications Max. Stabilized Pulse Energy (mJ) at Full Repetition Rate Max. Rep. Rate (Hz) Max. Stabilized Avg. Power (W) Energy Stability (at 5 Hz, 1 sigma, %) Pulse Duration (FWHM, ns, typ.) Beam Dimensions (V x H) (FWHM, mm2, typ.) Beam Divergence (V x H) (FWHM, mrad2, typ.) Electrical Water Cooling Weight Dimensions (L x W x H) Laser Head Power Supply Laser Head Power Supply 157 nm with LPFpro only; 193 nm, 248 nm, and 351 nm with LPXpro F-version only; 308 nm with LPXpro C-version only. At 193 nm (300 Hz only). 3 Max. average power at...

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