LPXpro Series High-Duty-Cycle Excimer Lasers Features • Highest UV-pulse energies up to 1.1J for efficient processing per pulse • F-version multi-wavelength for 193, 248, 351 nm changeable operation • High peak power nanosecond pulses for precise and clean micromachining • C-version for 308 nm operation • LPF deep UV version for 157 and 193 nm operation • Flexible pulse energy and repetition rate for efficient operation • Internal burst generator • Longest gas life on the market • Hand-held terminal or RS-232 interface • True specs: performance specified with margin for reliable long-term operation Mechanical Specifications Beam Exit Side View Connection Side View 45 mm + 40 mm (1.8 in. + 1.5 in.) Superior Reliability & Performance

LPXpro™ Series High-Duty-Cycle Excimer Lasers System Specifications Max. Stabilized Pulse Energy (mJ) at Full Repetition Rate Max. Rep. Rate (Hz) Max. Stabilized Avg. Power (W) Energy Stability (at 5 Hz, 1 sigma, %) Pulse Duration (FWHM, ns, typ.) Beam Dimensions (V x H) (FWHM, mm2, typ.) Beam Divergence (V x H) (FWHM, mrad2, typ.) Electrical Water Cooling Weight Dimensions (L x W x H) Laser Head Power Supply Laser Head Power Supply 157 nm with LPFpro only; 193 nm, 248 nm, and 351 nm with LPXpro F-version only; 308 nm with LPXpro C-version only. At 193 nm (300 Hz only). 3 Max. average power at...