Excimer Lasers & UV Optical Systems Superior Reliability & Performance

Award Winning Excimer Laser Technology Landkreis Gottingen DEUTSCHER ZUKUNFTSPREIS Superior Reliability & Performance • www.Coherent.com • [email protected]

Excimer Lasers and UV Optical Systems Laser Selection Guide 4 5 Applications Labs Worldwide 11 Excimer Lasers UV Optical Systems and Components 32-33 Laser Measurement and Control Accessories 47-49 Visit the Coherent Website

Laser Selection Guide Excimer Lasers Customer Support Excimer Lasers Laser Selection Guide ExciStar XS IndyStar1 COMPexPro COMPexPro 50 COMPexPro 100 COMPexPro 200 BraggStar M Max. energy (mJ) is stabilized energy. Superior Reliability & Performance

Laser Selection Guide Excimer Lasers Wavelength Max. Energy Max. Repetition Rate

Applications Matrix LPXpro Series Applications Excimer Lasers UV Optical Systems Customer Support LMC Accessories Polymer Drilling (Inkjet Nozzle, Filter) Hard and Brittle Drilling FBG Writing Thin Film Structuring (TCO, ITO, ZnO, FiNx, etc.) Laser Lift-Off (LLO) Surface Treatment Excimer Laser Annealing (ELA/SLS) Cylinder Honing Pulsed Laser Deposition (PLD) Laser Direct Synthesis (LDS) Laser Direct Patterning (LDP) Laser-Induced Forward Transfer (LIFT) Ion Implantation/Doping/Implant Activation Surface Cleaning Measurement Combustion Analysis Optics/Coating Testing Mask Inspection Spectroscopy,...

Applications Examples LASIK Vision Correction Laser Model Cylinder Honing Laser Model Laser Selection Guide Glass Marking Laser Model Excimer Lasers UV Optical Systems Customer Support LMC Accessories Laser Lift-Off processing of wafers and panels Laser Model LEAP, LAMBDA SX, UVblade

Applications Examples Excimer Lasers Laser Selection Guide Laser CVD and PLD generated thin films (courtesy of SuperOx Japan LLC) Laser Model COMPexPro, LPXpro, LEAP, LAMBDA SX Customer Support Excimer laser debonding of thinned wafers for advanced packaging Laser Model COMPexPro, LPXpro, LEAP, LAMBDA SX Superior Reliability & Performance

Applications Examples Laser Selection Guide Laser Annealing of Low Temperature Polysilicon Laser Model LAMBDA SX, VYPER, LineBeam Applications Excimer Lasers UV Optical Systems Laser ablation-ICP-MS analysis of trace elements in earth sciences and process control Laser Model GeoLasHD, ExciStar XS, COMPexPro Customer Support LMC Accessories

Excimer Laser Applications Bragg Grating Writing Excimer Lasers Laser Selection Guide Laser Direct Patterning Si Wafer Dopant Activation Thin Glass Via Drilling CFRP Pre-Treatment Customer Support Excimer Lasers: Masters of Microprocessing Superior Reliability & Performance

Applications Labs Worldwide Laser Selection Guide Applications Excimer Lasers UV Optical Systems Worldwide Application Lab Locations Customer Support LMC Accessories Our laser applications labs provide state-of-the-art feasibility testing of material processing methods. Please contact your Coherent representative or Coherent sales office for more information. For contact information, please go to page 50. •

Excimer Lasers Laser Selection Guide Excimer Lasers Featuring soft corona preionization, the ExciStar XS provides a homogeneous energy distribution and high pulse-to-pulse stability. Solid-state switching provides immediate and maintenance-free operation, and units are available with maximum repetition rates of 200 Hz and 500 Hz. Customer Support ExciStar XS excimer lasers are tabletop systems with an ultra-compact design for easy installation and operation. Due to the integration of the Almeta XS tube design, they deliver excellent results in low pulse energy applications. Superior Reliability...

Excimer Lasers • Lightweight Design Customer Benefits Flexible integration • Almeta XSTube Design Corona Preionization Extended tube lifetime High pulse-to-pulse stability Homogeneous beam profile Solid-State Switch Energy Monitor Immediate operation Maintenance-free operation Preset stabilized energy operation Specifications Wavelength ExciStar XS 200/ ExciStar XS 500/ (nm) ExciStar XS 200 emon ExciStar XS 500 emon Stabilized Pulse Energy (W) 157 1 1 Average Pulse Power (W) (1) 157 0.2 0.5 Energy Stability (sigma, %) All <2 <3 Maximum Repetition Rate (Hz) All 200 500 Beam Dimension (FWHM.VxH,...

Excimer Lasers Laser Selection Guide Excimer Lasers The IndyStar Series represents a compact laser series for applications needing high repetition rates up to 2000 Hz and low pulse energy. Available for 193 nm and 248 nm, it combines the demanding requirements of a semi-S2-certification with an extended components lifetime. Customer Support The IndyStar from Coherent is setting new standards for components lifetime in industrial applications. Based on the Almeta-tube-technology, the IndyStar achieves lifetimes of many billion pulses, resulting in a reduction of the overall costs of operation....

IndyStar Excimer Lasers • High uptime • Low maintenance • Homogeneous beam profile • “Soft” discharge for better pointing and energy stability • No warm-up time, maintenance-free • All metal sealed tube design • Extended lifetimes for many billion pulses • Proven design • “POWERLOK” function integrated • Lowest jitter by “TIMELOK” function • Laser operation at preset stabilized energy • Quick and easy integration Weight/Utilities/ Dimensions Weight Cooling 1 kHz-version 2 kHz-version Electrical Dimensions (L x W x H) Customer Support Parameter Wavelength (nm) Max. Repetition Rate (Hz) Stabilized...

Excimer Lasers Laser Selection Guide Excimer Lasers Featuring new ceramic preionization, the COMPexPro provides multi-hundred millijoules output, plus unmatched pulse-to-pulse stability. The COMPexPro also comes with an improved gas processor that extends both gas and optics lifetimes. Customer Support COMPexPro lasers are highly effective light sources, featuring a compact design and easy installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICPMS), material research (PLD) and precise material processing. Product Description Unstable...