CrystaLas UV Optics System for Excimer Laser Based Crystallization of Thin Silicon Films Superior Reliability & Performance

CrystaLas Mask Stage CrystaLas Diagnostic Tools To ensure full annealing process control and stability, the CrystaLas annealing system is equipped with various diagnostic tools: • CCD camera for laser beam profile analysis (including PC and beam analysis software). This allows checking the emitted laser beam profile in front the optical system. • CCD camera for analysis of the homogenized mask beam (including PC and beam analysis software). This enables the examination of the homogeneity and the size of the beam profile on the mask. • Online monitor for the measurement of the pulse energy incident...

CrystaLas Optical Annealing System • Resolution of 2 μm • Field of view up to 30 mm • Variable pulse duration possible • Mask projection gives flexibility of pattern choice The New Optical Crystallization System CrystaLas is an excimer laser-based optical system for the annealing and crystallization of thin silicon films. It is an ideal research tool for developing new production processes in the semiconductor industry. The flexible system design allows annealing processes on laboratory samples as well as on large size substrates. Thus, research results can be easily transferred to fabrication...

Masked exposure provides large direction-oriented silicon crystals. CrystaLas Homogenizer Optics A scanned chevron pattern exposure yields a single-crystal like region. of 2.5 μm wide with well-defined edges. Crystal growth at the solid/liquid interface appears and leads to a crystal length of 1-1.5 μm. The second exposure, half of the grating period shifted, melts the unprocessed area and produces a closed, homogeneous polycrystalline film. Speed Up Your Process The CRYSTALAS optical annealing system employs the mask imaging technique to generate polycrystalline thin films. Since only two laser...

CrystaLas System Design The schematic drawing of the CrystaLas optical system shows the optical beam path and all optical components necessary to perform high precision laser annealing. The entire optical set-up is mounted on a granite table that ensures the required mechanical stability. The length of the granite table can be varied to meet customer requirements. System Beam Entrance Projection Lens The way the laser beam enters the optical system can be individually adapted to any beam height and beam orientation of excimer lasers. The homogenizer consists of two pairs of lens arrays – two...

Coherent as your partner. To compete and succeed in today’s fast-paced research and manufacturing environments, you need a laser partner who understands your needs. A partner who can provide a wide range of technology solutions, and the support that goes with them. Since 1966, Coherent has been helping customers by providing complete laser-based solutions for a wide range of commercial and scientific applications. With a heritage of innovation and an uncompromising position on quality, Coherent is the most forward-thinking and diversified manufacturer of solid-state, gas, excimer and semiconductor...