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AVIA Family of DPSS Lasers

AVIA Family of DPSS Lasers

Product catalog summary

Introduction
The AVIA series of diode-pumped, solid-state (DPSS) Q-switched lasers are designed for high reliability and minimal downtime in manufacturing applications. They offer high repetition rates and output power from 3W to 45W at wavelengths of 266 nm, 355 nm, and 532 nm, focusing on maximizing uptime and availability.

Specifications and Features
AVIA lasers include features like PermAlign™ solder-bonded optics, field-replaceable pump diode modules, and smart power supplies with RS-232 interfaces. Technologies such as HGX UV generation, ThermEQ™, PulseEQ™, and PulseTrack™ ensure consistent pulse energy and control across various repetition rates.

Applications
These lasers are ideal for microelectronics applications, including semiconductor and solar cell manufacturing, and microvia drilling in PCBs and silicon. Specific models are optimized for tasks like silicon wafer dicing and LED screen patterning.

Performance and Reliability
Designed for 24/7 operation, AVIA lasers undergo comprehensive Failure Mode Effect Analysis to eliminate potential failure modes. The closed-loop design ensures optimized processes for specific applications, resulting in consistent processing and higher throughput.

Global Support and Serviceability
Coherent offers a global support network for quick response times, with products designed for easy serviceability, supported by extensive documentation and training.

Mechanical and System Specifications
Each laser model includes detailed mechanical specifications, such as dimensions and beam exit configurations. System specifications cover wavelength, average output power, pulse energy, pulse width, repetition rate range, spatial mode, power stability, and beam characteristics. The lasers are RoHS compliant and come with a 24-month or 10,000-hour warranty.

Conclusion
With over 40 years of experience, Coherent's AVIA lasers are trusted for their superior reliability and performance in demanding industrial applications.

System Specifications
Tests are conducted at the Optimized Repetition Rate with diode current set for Optimum Average Power. Adjustments may be necessary for different repetition rates, with specifications referenced to base plate temperature.

AVIA 532-23 Features

23W output at 532 nm wavelength.
PermAlign™ solder-bonded optics technology.
Ultra-long life Aluminum-Free Active Area (AAA™) laser diode material.
ThermEQ™ for uniform pulse energy across bursts.
PulseEQ™ for locked pulse energy across various rates.
PulseTrack™ for on-the-fly pulse energy control.
Excellent beam quality with M2 < 1.3.
Field replaceable pump diode modules.
Smart power supply with RS-232 interface.

Mechanical Specifications
Detailed dimensions for laser head and power supply are provided, including optional rack mount accessory specifications.

Performance Specifications

Wavelength: 532 nm.
Average Output Power: 17W at 60 kHz, 23W at 100 kHz, 20W at 129 kHz, 18W at 140 kHz.
Pulse Energy: 230 µJ at optimized repetition rate.
Pulse Width: <40 ns up to 100 kHz.
Pulse Repetition Rate Range: Single-shot to 300 kHz, optimized at 100 kHz.
Spatial Mode: TEMoo (M2 < 1.3).
Average Power Stability: <2% RMS over 8 hours.
Pulse-to-Pulse Stability: <3% RMS up to 100 kHz.
Polarization Ratio: >100:1 Horizontal.
Beam Diameter: 3.5 mm ±10%.
Beam Divergence: <0.4 mrad full angle.
Beam Pointing Drift: <25 µrad/°C.
Beam Circularity: 85%.
Warm-Up Time: <15 minutes from standby, <40 minutes from cold start.
Boresight Accuracy: ±0.5 mm and ±5 mrad.
RoHS Compliant.
Warranty: 24 months or 10,000 hours.

Contact Information
Coherent, Inc. provides contact details for various global offices, including phone numbers and email addresses for sales and support.

Catalog excerpts

AVIA Family of DPSS Lasers Superior Reliability & Performance

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AVIA Family of DPSS Lasers Overview of Laser Applications Silicon and Low-k Dielectric Scribing AVIA™ is a family of diode-pumped, solid-state, Q-switched lasers, available with average powers currently ranging from 3W to 45W. These lasers deliver high repetition rate and high output power at wavelengths of 266 nm, 355 nm and 532 nm. Beginning with a comprehensive Failure Mode Effect Analysis, we design our systems to meet your 24/7 operation’s requirements. Our design then addresses each potential failure mode with the intent of eliminating it. System performance is maximized though closed loop...

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AVIA Family of DPSS Lasers Overview of Laser Applications Solar Cell Manufacturing Semiconductor Manufacturing Microvia Drilling in PCBs and Silicon AVIA Compatibility Chart AVIA lasers enable a wide range of high precision microelectronics applications. µVia Hole Drilling AVIA 266-3 AVIA 355-5 AVIA 355-5-100 AVIA 355-7 x AVIA 355-10 x AVIA 355-14 x AVIA 355-20 AVIA 355-23 AVIA 355-23-250 AVIA 355-28 x AVIA 532-23 AVIA 532-30 AVIA 532-38 AVIA 532-45 Flex Circuit Cutting x x x x x x x x x Si Wafer Dicing/ Scribing x x x x x x x Touch- Screen Patterning x x x x x cSi Solar cSi Solar Cell PSG Cell...

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Visit the Coherent Website 19 Superior Reliability & Performance • www.Coherent.com • [email protected]

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AVIA 266-3 Solid-State Q-Switched Ultraviolet Lasers Features • 3W of 266 nm at 30 kHz • Total Pulse Control system • Excellent beam quality • PermAlign™ solder-bonded optics technology • ThermEQ™ for uniform pulse energy across a burst of pulses • Ultra-long life AAA™ (Aluminum-free Active Area) laser diode material • PulseEQ™ for locked pulse energy across a range of pulse repetition rates • Field replaceable pump diode modules • PulseTrack™ for on-the-fly pulse energy control • Smart power supply with RS-232 interface Mechanical Specifications Laser Head BEAM EXIT Side View 127 mm (5.0 in.)...

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Solid-State Q-Switched Ultraviolet Lasers AVIA Wavelength (nm) Average Output Power (W)2 Optimum Average Power Pulse Energy at Optimized Rep Rate (µJ) Pulse Width (ns) Pulse Repetition Rate Range (kHz) Operational Optimized Spatial Mode3 Average Power Stability (RMS 2σ over 8 hours) Pulse-to-Pulse Stability (RMS 1σ) Polarization Ratio3 1/e2 Beam Diameter (mm)3 Beam Divergence Full Angle (mrad)3 Beam Pointing Drift (µrad/°C)4 Beam Circularity Warm-Up Time (typical) Boresight Accuracy RoHS Compliant Warranty 1 2 3 4 266-3 266 3 at 30 kHz 100 <20 ns up to 30 kHz Single-shot to 300 30 TEMoo (M2 <1.3)...

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AVIA 355-5/355-5-100 Solid-State Q-Switched Ultraviolet Lasers Features • ThermEQ™ for uniform pulse energy across a burst of pulses • Excellent beam quality M2 <1.3 • PermAlign™ solder-bonded optics technology • PulseEQ™ for locked pulse energy across a range of pulse repetition rates • Field replaceable pump diode module • Smart power supply with RS-232 interface • PulseTrack™ for on-the-fly pulse energy control • HGX UV generation technology • Total Pulse Control system Mechanical Specifications Laser Head Rear View Side View Water Ports Power Supply Beam Exit Optional Rack Mount Accessory...

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Solid-State Q-Switched Ultraviolet Lasers AVIA 355-5 355-5-100 Wavelength (nm) 355 Average Output Power (W)2 Optimum Average Power 3 at 30 kHz Pulse Energy at Optimized Rep Rate (µJ) 100 25 Pulse Width (ns) <20 ns up to 30 kHz <30 ns up to 100 kHz Pulse Repetition Rate Range (kHz) Operational Single-shot to 300 Optimized 50 100 Spatial Mode3 TEMoo (M2 <1.3) Average Power Stability (RMS 2σ over 8 hours) <2% Pulse-to-Pulse Stability (RMS 1σ) <5% up to 60 kHz <7% up to 100 kHz Polarization Ratio3 >100:1 Horizontal 1/e2 Beam Diameter (mm)3 2.5 ±10% Beam Divergence Full Angle (mrad)3 <0.5 <0.3 Beam...

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AVIA 355-7/355-10/355-14 Solid-State Q-Switched Ultraviolet Lasers Features • Excellent beam quality • Total Pulse Control system • PermAlign™ solder-bonded optics technology • ThermEQ™ for uniform pulse energy across a burst of pulses • Ultra-long life AAA™ (Aluminum-free Active Area) laser diode material • PulseEQ™ for locked pulse energy across a range of pulse repetition rates • Field replaceable pump diode module • PulseTrack™ for on-the-fly pulse energy control • Smart power supply with RS-232 interface • HGX UV generation technology Mechanical Specifications Laser Head BEAM EXIT Side View...

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Solid-State Q-Switched Ultraviolet Lasers AVIA 355-7 355-10 355-10-20 Wavelength (nm) 355 Average Output Power (W)2 4.5 at 30 kHz 6 at 30 kHz 6.5 at 45 kHz 8.5 at 45 kHz Optimum Average Power 7 at 60 kHz 10 at 60 kHz 6 at 20 khz 5.5 at 80 kHz 8 at 80 kHz 8.5 at 30 kHz 4.5 at 100 kHz 6.5 at 100 kHz 10 at 40 khz 10 at 50 kHz 6.5 at 80 kHz Pulse Energy at Optimized Rep Rate (µJ) 117 167 300 140 200 Pulse Width (ns) <35 ns <35 ns <23 ns <40 ns <35 ns up to 60 kHz up to 60 kHz up to 20 kHz up to 100 kHz up to 70 kHz Pulse Repetition Rate Range (kHz) Operational Single-shot to 300 Optimized 60 60 20...

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AVIA 355-20/355-23/355-28 Solid-State Q-Switched Ultraviolet Lasers Features • ThermEQ™ for uniform pulse energy across a burst of pulses • Excellent beam quality • PermAlign™ solder-bonded optics technology • PulseEQ™ for locked pulse energy across a range of pulse repetition rates • THG crystal shifter for long life and stable UV power output • Field replaceable pump diode modules • PulseTrack™ for on-the-fly pulse energy control • Smart power supply with RS-232 interface Mechanical Specifications Laser Head Beam Dump Beam Exit Side View Front View Power Supply Rack Mount Bracket LASER EMISSION...

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