AVIA Family of DPSS Lasers Superior Reliability & Performance

AVIA Family of DPSS Lasers Overview of Laser Applications Silicon and Low-k Dielectric Scribing AVIA™ is a family of diode-pumped, solid-state, Q-switched lasers, available with average powers currently ranging from 3W to 45W. These lasers deliver high repetition rate and high output power at wavelengths of 266 nm, 355 nm and 532 nm. Beginning with a comprehensive Failure Mode Effect Analysis, we design our systems to meet your 24/7 operation’s requirements. Our design then addresses each potential failure mode with the intent of eliminating it. System performance is maximized though closed loop...

AVIA Family of DPSS Lasers Overview of Laser Applications Solar Cell Manufacturing Semiconductor Manufacturing Microvia Drilling in PCBs and Silicon AVIA Compatibility Chart AVIA lasers enable a wide range of high precision microelectronics applications. µVia Hole Drilling AVIA 266-3 AVIA 355-5 AVIA 355-5-100 AVIA 355-7 x AVIA 355-10 x AVIA 355-14 x AVIA 355-20 AVIA 355-23 AVIA 355-23-250 AVIA 355-28 x AVIA 532-23 AVIA 532-30 AVIA 532-38 AVIA 532-45 Flex Circuit Cutting x x x x x x x x x Si Wafer Dicing/ Scribing x x x x x x x Touch- Screen Patterning x x x x x cSi Solar cSi Solar Cell PSG Cell...

Visit the Coherent Website 19 Superior Reliability & Performance • www.Coherent.com • [email protected]

AVIA 266-3 Solid-State Q-Switched Ultraviolet Lasers Features • 3W of 266 nm at 30 kHz • Total Pulse Control system • Excellent beam quality • PermAlign™ solder-bonded optics technology • ThermEQ™ for uniform pulse energy across a burst of pulses • Ultra-long life AAA™ (Aluminum-free Active Area) laser diode material • PulseEQ™ for locked pulse energy across a range of pulse repetition rates • Field replaceable pump diode modules • PulseTrack™ for on-the-fly pulse energy control • Smart power supply with RS-232 interface Mechanical Specifications Laser Head BEAM EXIT Side View 127 mm (5.0 in.)...

Solid-State Q-Switched Ultraviolet Lasers AVIA Wavelength (nm) Average Output Power (W)2 Optimum Average Power Pulse Energy at Optimized Rep Rate (µJ) Pulse Width (ns) Pulse Repetition Rate Range (kHz) Operational Optimized Spatial Mode3 Average Power Stability (RMS 2σ over 8 hours) Pulse-to-Pulse Stability (RMS 1σ) Polarization Ratio3 1/e2 Beam Diameter (mm)3 Beam Divergence Full Angle (mrad)3 Beam Pointing Drift (µrad/°C)4 Beam Circularity Warm-Up Time (typical) Boresight Accuracy RoHS Compliant Warranty 1 2 3 4 266-3 266 3 at 30 kHz 100 <20 ns up to 30 kHz Single-shot to 300 30 TEMoo (M2 <1.3)...

AVIA 355-5/355-5-100 Solid-State Q-Switched Ultraviolet Lasers Features • ThermEQ™ for uniform pulse energy across a burst of pulses • Excellent beam quality M2 <1.3 • PermAlign™ solder-bonded optics technology • PulseEQ™ for locked pulse energy across a range of pulse repetition rates • Field replaceable pump diode module • Smart power supply with RS-232 interface • PulseTrack™ for on-the-fly pulse energy control • HGX UV generation technology • Total Pulse Control system Mechanical Specifications Laser Head Rear View Side View Water Ports Power Supply Beam Exit Optional Rack Mount Accessory...

Solid-State Q-Switched Ultraviolet Lasers AVIA 355-5 355-5-100 Wavelength (nm) 355 Average Output Power (W)2 Optimum Average Power 3 at 30 kHz Pulse Energy at Optimized Rep Rate (µJ) 100 25 Pulse Width (ns) <20 ns up to 30 kHz <30 ns up to 100 kHz Pulse Repetition Rate Range (kHz) Operational Single-shot to 300 Optimized 50 100 Spatial Mode3 TEMoo (M2 <1.3) Average Power Stability (RMS 2σ over 8 hours) <2% Pulse-to-Pulse Stability (RMS 1σ) <5% up to 60 kHz <7% up to 100 kHz Polarization Ratio3 >100:1 Horizontal 1/e2 Beam Diameter (mm)3 2.5 ±10% Beam Divergence Full Angle (mrad)3 <0.5 <0.3 Beam...

AVIA 355-7/355-10/355-14 Solid-State Q-Switched Ultraviolet Lasers Features • Excellent beam quality • Total Pulse Control system • PermAlign™ solder-bonded optics technology • ThermEQ™ for uniform pulse energy across a burst of pulses • Ultra-long life AAA™ (Aluminum-free Active Area) laser diode material • PulseEQ™ for locked pulse energy across a range of pulse repetition rates • Field replaceable pump diode module • PulseTrack™ for on-the-fly pulse energy control • Smart power supply with RS-232 interface • HGX UV generation technology Mechanical Specifications Laser Head BEAM EXIT Side View...

Solid-State Q-Switched Ultraviolet Lasers AVIA 355-7 355-10 355-10-20 Wavelength (nm) 355 Average Output Power (W)2 4.5 at 30 kHz 6 at 30 kHz 6.5 at 45 kHz 8.5 at 45 kHz Optimum Average Power 7 at 60 kHz 10 at 60 kHz 6 at 20 khz 5.5 at 80 kHz 8 at 80 kHz 8.5 at 30 kHz 4.5 at 100 kHz 6.5 at 100 kHz 10 at 40 khz 10 at 50 kHz 6.5 at 80 kHz Pulse Energy at Optimized Rep Rate (µJ) 117 167 300 140 200 Pulse Width (ns) <35 ns <35 ns <23 ns <40 ns <35 ns up to 60 kHz up to 60 kHz up to 20 kHz up to 100 kHz up to 70 kHz Pulse Repetition Rate Range (kHz) Operational Single-shot to 300 Optimized 60 60 20...

AVIA 355-20/355-23/355-28 Solid-State Q-Switched Ultraviolet Lasers Features • ThermEQ™ for uniform pulse energy across a burst of pulses • Excellent beam quality • PermAlign™ solder-bonded optics technology • PulseEQ™ for locked pulse energy across a range of pulse repetition rates • THG crystal shifter for long life and stable UV power output • Field replaceable pump diode modules • PulseTrack™ for on-the-fly pulse energy control • Smart power supply with RS-232 interface Mechanical Specifications Laser Head Beam Dump Beam Exit Side View Front View Power Supply Rack Mount Bracket LASER EMISSION...