IO-Link Compatible Compact Flow Rate Controller RAPIFLOW ® IO-Link makes it possible! Predictive maintenance from a flow rate controller

Supports the IoT generation! Flow rate controller equipped with predictive maintenance functions Equipped with high-speed response micro-machined sensor chip Stainless steel body [Applicable fluids/flow rates] AIR Resin body [Applicable fluids/ flow rates] AIR Rectifying mechanism reduces pressure loss and improves reproducibility Introducing the IO-Link model IO-Link is a digital communication standard for sensors/actuators at factory sites. (IEC 61131-9) Unlike analog communication, it enables the transmission of parameters and event data. Digital signal Constant monitoring via digital data...

System error detection (predictive maintenance) [System abnormality warning functions] Pressure drop In addition to self-detection functions for detecting the deterioration of sensors and proportional solenoid valves, abnormalities with peripheral systems can also be detected. Outputs an alarm signal via IO-Link. IO-Link Master Filter clogging IO-Link Enhances Conventional Features ● Various settings are possible with key operations Remote control and configuration is possible remotely. • Input method switching • Preset memory value input • low rate control / forced OFF state switching F ● 4...

Applications Used in various fields Applicable fluids RAPIFLOW is available for a wide variety of applications in industries such as machinery, automobiles, precision components, and cutting-edge fields such as semiconductors and biotechnology, medical care, foodstuffs, and more. Flow rate (L/min) Wire bonding Ideal for tension control of wire bonding that requires high precision. Floating transport system of glass Ideal for float (non-contact) transportation of large FPD glass. Flow rate management Available with a broad flow rate range. Flow rate control of air is possible. Control of N2 gas...

RAPIFLOW ® FCM Series Variation Applicable fluids/flow rate control range Flow rate control range (L/min) Applicable fluids 0.01 0.1 1 10 100 Port size Body material Rc1/4 9/16-18 UNF 1/4" double barbed fitting 1/4" JXR male fitting Communication specifications Descriptions Communication protocol Communication protocol version Transmission bit rate Port type Process data length (input) Process data length (output) Data storage SIO mode support

Compact flow rate controller RAPIFLOW IO-Link ● For air, nitrogen, argon, oxygen, city gas, methane, propane (flow rate range: 0.5 to 100 L/min) For hydrogen, helium (flow rate range: 0 to 20 L/min) ● ■ FCM Series for air, nitrogen, argon, oxygen, city gas, methane, propane Valve drive method *1 Low differential pressure type (Stainless steel only) Flow rate range *1 Port size, body material Control range Response *1 time Accuracy Repeatability Temperature characteristics Pressure characteristics Standard differential pressure *4 Working pressure differential *5 Max. working pressure *5 H6/H8...

Pressure Standard differential pressure, working pressure differential *4, 5 (Standard model) Flow rate range *1 0005 0010 Flow rate range *1 L0002 Standard differential pressure (kPa) Working pressure differential (kPa) Standard differential pressure (kPa) Working pressure differential (kPa) Max. working pressure (kPa) Standard differential pressure (kPa) Working pressure differential (kPa) Max. working pressure (kPa) Standard differential pressure (kPa) Working pressure differential (kPa) Max. working pressure (kPa) Standard differential pressure (kPa) Working pressure differential (kPa) Max....

FCM Series ■ FCM Series for hydrogen, helium Valve drive method Proportional solenoid valve - When not energized: Closed Full scale flow rate Port size Flow rate range *1 1/4" double barbed fitting (stainless steel) 1/4" JXR male fitting (stainless steel) Response time Control Control range Temperature characteristics Within ±0.2% F.S./°C (base temperature 25°C) Pressure characteristics Within ±1% F.S. per 98 kPa (standard differential pressure reference) Refer to the separate table Refer to the separate table Refer to the separate table Proof pressure Operating ambient temperature, operating...

Pressure Standard differential pressure, Working pressure differential Flow rate range *1 0005 0010 Standard differential pressure (kPa) H2 Working pressure differential (kPa) Standard differential pressure (kPa) Working pressure differential (kPa) Display, integrating functions 0002 Display resolution Integrating Display resolution functions *7 Pulse output rate Display range Flow rate display Display range Flow rate range *1 0005 0010 *1: low rate converted to volumetric flow rate at 20°C, 1 barometric pressure (101 kPa). Full scale stands for max. scale flow rate in the flow rate range. F...

FCM Series ■ Air, nitrogen, argon, oxygen, city gas, methane, propane How to order FCM Model No. Code Flow rate range Flow rate range Applicable fluids Low differential pressure model Standard differential pressure model (Stainless steel only) 0 to 100 L/min (resin body only) 0 to 0.5 L/min 0 to 1 L/min 0 to 2 L/min 0 to 5 L/min 0 to 10 L/min 0 to 20 L/min 0 to 1 L/min 0 to 2 L/min 0 to 5 L/min 0 to 10 L/min Oxygen (oil-prohibited specifications) Port size, body material Port size, body material direction rate range : 0 to 1 L/min B Applicable fluids : Compressed air, nitrogen C Port size, body...

■ For hydrogen, helium How to order FCM A Flow rate range Flow rate range Applicable fluids 0002 0005 Port size Port size 8A 1/4" double barbed fitting 4RM D Input signal E Display direction Display direction Forward direction Reverse direction L type (female) / straight (male) 3 m Straight (female), straight (male) 3 m One side straight (female) 3 m A ● Flow rate range : 0 to 2 L/min B ● Applicable fluids : Hydrogen C : Rc1/4 ● Port size D ● Input signal : IO-Link E ● Display direction : Reverse direction F : Straight (female), straight (male) 3 m ● Cable G : Bracket ● Bracket H ● Traceability...