Function-oriented vacuum suction unit 3QR negative pressure switching unit MV3QRA1/MV3QRB1 Series NEGATIVE PRESSURE SWITCHING UNIT MV3QRA1/MV3QRB1 SERIES "Positive pressure source no longer needed!" All functions integrated compactly

High-speed stabilization of suction transpo without need for a positive pressure sourc Pressure sensor Vacuum filter Solenoid valve Atmospheric pressure Positive pressure Atmospheric pressure Overshooting Zero blowing air!! * Blowing small workpiece always an issue Vacuum pressure 3QR negative pressure switching unit Electric response and pressure waveform Vacuum pressure During vacuum separation, positive pressure is not used, so there is no fear of miniscule chips being blown about. Solenoid valve Optimal for small workpiece suction transportation!!

uction unit Transfers electric parts by suction. 3QR Transfer unit Packaging or transfer head Application example Electric parts Packaged substrate Discrete chip tray Wafer Vacuum break valve unnecessary Vacuum break valve unnecessary ● Desorption by evacuation without positive pressure requires no countermeasures for blowing chips. ● No need for adjustment of burst pressure, flow rate or timing ● Now slimmer with elimination of the vacuum break valve Our company’s previous model of pressure selector unit with vacuum breaker High flow rate solenoid valve contributed to increases in speeds related...

3QR negative pressure switching unit ● Self reset type, self hold type ●2-position universal type 　　　 (Self reset) 2 Unit common specifications 3QR negative pressure switching unit Type without sensor　MV3QR Type with sensor　MV3QR※-V1 Descriptions Manifold station no. Working fluid Max. working pressure MPa Min. working pressure kPa MPa Proof pressure Ambient temperature °C Fluid temperature °C Vibration/shock m/s2 Atmosphere 2-10 stations Low vacuum 0 Low vacuum: -100 1.05 (Low vacuum: -101kPa) 0.5 (Low vacuum: -101kPa) -5 to 50 (no freezing) 0 to 50 (no freezing) 5 to 50 50 or less / 300 or...

Pressure sensor specifications Descriptions Supply voltage Current consumption Pressure detection method Diffused semiconduction pressure switch Ambient temperature Working pressure Proof pressure Dust proof Output voltage Zero point voltage Linearity Analog output Temperature characteristics Output current 1±0.1V ±0.5%F.S. max ±2%F.S. max 1mA max (Load resistance: 5kΩ and over) Wire length Analog output voltage - Pressure characteristics ● Lead wire color and descriptions Wire color Brown Power supply (DC10.8 to 30V) +DC10.8-30V (Brown) ANALOG OUT (Black) main circuit Black Analog output (1...

Solenoid position Port size Note 1: For electric connection with the grommet lead wire (300mm), B solenoid position 2 single (self- hold) and E large flow rate (H) is not selectable. Note 2: In the case of B solenoid position “2” 2 single (self -holding), E flow rate “H” and G pressure “4” cannot be selected. Note 3: Combination with a masking plate. Combination of A and B type cannot be made. Furthermore, combination of solenoid position “1”and “2” is not available. 〈Example of model number〉 Model : MV3QRA1 (Body porting) Solenoid position : 2-position single C Port size : φ4 push-in fitting...

Dimensions (MV3QRA110-M5) ・2-position single solenoid (Self reset): Grommet lead wire ・C-connector (C2・C2※・C3) Lead wire AWG26 Length: 300 to 2000 mm (C2・C2※・C3) Lead wire length: 300 (AWG#26, outer diameter φ1.35) L L1=L-8 14 Lead wire AWG26 Length: 300 to 2000 mm (D2・D2※・D3) Non-locking manual override Vacuum filter VSFJ-44 (Attachment) φ6 push-in fitting 2 port Vacuum filter VSFJ-66 (Attachment)

MV3QRA/MV3QRB Series Dimensions (MV3QRA120-M5) ・2-position single solenoid (self hold): C-connector (C2・C2※・C3) n-Plug (FPL-M5) Lead wire AWG Length: 300 to 2000 mm (C2・C2※・C3) Lead wire AWG Length: 300 to 2000 mm (D2・D2※・D3) Non-locking manual override Non-locking manual override Vacuum filter VSFJ-44 (Attachment) φ6 push-in fitting 2 port Vacuum filter VSFJ-66 (Attachment)

Dimensions ( ) ・2-position single solenoid (Self reset): Grommet lead wire 14 Lead wire AWG26 Length: 300 to 2000 mm (C2・C2※・C3) Lead wire length: 300 (AWG#26, outer diameter φ1.35) L 4 33.4 Lead wire AWG26 Length: 300 to 2000 mm (D2・D2※・D3) ・φ4 push-in fitting (GS4・GS4F) Vacuum filter VSFJ-44 (Attachment) Non-locking manual override ・φ6 push-in fitting (GS6・GS6F) Vacuum filter VSFJ-66 (Attachment)

MV3QRA/MV3QRB Series Dimensions (MV3QRB120-M5) ・2-position single solenoid (Self hold): C-connector (C2・C2※・C3) 14 Lead wire AWG Length: 300 to 2000 mm (C2・C2※・C3) ・D-connector (D2・D2※・D3) Lead wire AWG Length: 300 to 2000 mm (D2・D2※・D3) Non-locking manual override ・φ4 push-in fitting (GS4・GS4F) Vacuum filter VSFJ-44 (Attachment) Non-locking manual override Vacuum filter VSFJ-66 (Attachment)

Dimensions (MV3QRA110-M5　　-V1) type with sensor ・2-position single solenoid (Self reset): Grommet lead wire Lead wire AWG26 Length: 300 to 2000 mm (C2・C2※・C3) Lead wire AWG26 Length: 1000mm Lead wire length: 300 (AWG#26, outer diameter φ1.35) L 4 Analog pressure sensor ・φ4 push-in fitting (GS4・GS4F) Vacuum filter VSFJ-44 (Attachment) Non-locking manual override Vacuum filter VSFJ-66 (Attachment)

MV3QRA/MV3QRB Series Dimensions (MV3QRB120-M5　　-V1) type with sensor ・2-position single solenoid (Self hold): C-connector (C2・C2※・C3) 14 Non-locking manual override Lead wire AWG Length: 300 to 2000 mm (C2・C2※・C3) Lead wire AWG Length: 300 to 2000 mm (D2・D2※・D3) Lead wire AWG26 Length: 1000mm Analog pressure sensor ・φ4 push-in fitting (GS4・GS4F) Vacuum filter VSFJ-44 (Attachment) 2 port φ4 push-in fitting Non-locking manual override Vacuum filter VSFJ-66 (Attachment)

Internal structure and parts list Internal structure and parts list ●Solenoid valve manifold with sensor 9 Parts name Fluoro rubber Sensor adapter Aluminum alloy Nitrile rubber/Steel Stainless steel Connector socket assembly Solenoid valve Stainless steel (Diffused semiconductor strain gauge) Pressure Sensor Manifold base Aluminum alloy * Regarding internal structure of the installed solenoid valve, and concerning the principle of operation, please refer to 3 port direct acting valve 3QRA1 / 3QRB1 series (CC-1020). Solenoid valve C/D-connector wiring methods ● 2-position single solenoid (Self...