Compact flow rate controller RAPIFLOW ● For air, nitrogen, argon, oxygen, city gas, methane, propane (flow rate range: 0.5 to 100 L/min) ● Hydrogen, helium (flow rate range: 0 to 20 L/min) F (Filtr) R (Reg) L (Lub) Drain Separ Mech Press SW Res press exh valve ■ FCM Series for air, nitrogen, argon, oxygen, city gas, methane, propane Specifications Item Outdrs FRL Adapter Joiner Press Gauge CompFRL LgFRL PrecsR VacF/R Clean FR ElecPneuR AirBoost Speed Ctrl Silncr CheckV/ other Fit/Tube Nozzle Air Unit PrecsCompn Electro Press SW ContactSW AirSens PresSW Cool Air Flo Sens/Ctrl WaterRtSens TotAirSys (Total Air) TotAirSys (Gamma) Gas generator RefrDry DesicDry HiPolymDry MainFiltr Dischrg etc Anti-bac/Bacremove Filt Film Resist FR Proportional solenoid valve When not energized: Closed AI (Air, nitrogen) AR (Argon) O2 (Oxygen) LN (City gas) C1 (Methane) C3 (Propane) Full scale flow rate 9500 500 mL/min ● ● ● ● ● ● 0001 1 L/min ● ● ● ● ● ● 0002 2 L/min ● ● ● ● ● ● 0005 5 L/min ● ● ● ● ● ● 0010 10 L/min ● ● ● ● ● ● Flow rate 0020 20 L/min ● ● 0050 50 L/min range *1 ● ● 0100 100 L/min (resin) ● Note 1 L9500 500 mL/min ● ● ● ● ● L0001 1 L/min ● ● ● ● ● L0002 2 L/min ● ● ● ● ● L0005 5 L/min ● ● ● ● ● L0010 10 L/min ● ● ● ● ● AI Compressed air, nitrogen ● AR Argon ● Applicable O2 Oxygen (oil-prohibited specifications) ● fluids *2 LN City gas (13A) Note 3 ● Note 2 C1 Methane (CH4 100%) ● C3 Propane (C3H8 100%) ● H6 ø6 push-in, resin (excluding 50, 100 L/min) ● Port size, H8 ø8 push-in, resin ● *3 8A Rc 1/4, stainless steel ● ● ● ● ● ● Body material UF 9/16-18UNF, stainless steel ● ● ● ● ● ● 3 to 100% F.S. Guaranteed accuracy range Within 0.5 sec. to setting ±5% F.S. (TYP.) 9500 to 0020,L9500 to L0010 Response time *1 Within 1 sec. to setting ±5% F.S. (TYP.) 0050 to 0100 Within ±3% F.S. Accuracy Control Within ±1% F.S. Repeatability Within ±0.2% F.S./°C (25°C (77°F) reference) Temperature characteristics Within ±1% F.S. per 98 kPa (≈14 psi) (standard differential pressure reference) Pressure characteristics Refer to the separate table Standard differential pressure Note 4 Refer to the separate table Operating differential pressure range Note 5 Refer to the separate table Pressure Max. working pressure Note 5 490 kPa (≈71 psi, 4.9 bar) H6/H8 (Resin body) Proof pressure *3 980 kPa (≈140 psi, 9.8 bar) 8A/UF (SUS body) 0 (32°F) to 50°C (122°F), 90% RH or less (no condensation) Operating ambient temperature, humidity 0 to 10 VDC (6.7 kΩ) / 4 points (2 bit) 0 Input 0 to 5 VDC (10 kΩ) / 4 points (2 bit) 1 *4 signal/ 4 to 20 mADC (250 Ω) / 4 points (2 bit) 2 Preset input Parallel 10 bit/none P Analog output: 1 to 5 V (connecting load impedance 500 kΩ and over) AN Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less I/O Analog output: 1 to 5 V (connecting load impedance 500 kΩ and over) AP Output Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less *5 Switch output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less signal SN Error output: NPN open collector output, 50 mA or less, voltage drop 2.4 V or less Switch output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less SP Error output: PNP open collector output, 50 mA or less, voltage drop 2.4 V or less 7-segment LED 3-digit, indicator accuracy: control accuracy ±1 digit Display method Flow rate display Refer to the separate table Display range, display resolution Refer to the separate table Integrating functions 24 VDC ± 10% (stabilized power supply with ripple rate 2% or less) Power supply voltage Power supply 250mA or less Current consumption Note 11 Unrestricted in vertical/horizontal direction Mounting orientation Polyamide resin, fluoro rubber, stainless steel, alumina, semiconductor silicon, soldering H6/H8 (Resin body) Wetted section materials *3 Stainless steel, fluoro rubber, alumina, semiconductor silicon, soldering 8A/UF (SUS body) Approx. 200g H6/H8 (Resin body) Weight *3 Approx. 480g 8A/UF (SUS body) IEC standards IP40 or equivalent Degree of protection Protection circuit Note 6 Power reverse connection protection, switch output

Standard differential pressure, operating differential pressure Note 4, Note 5 1 MPa ≈ 145.0 psi, 1 MPa = 10 bar (Standard model) Std diff press (kPa) Operating diff press (kPa) Max. working pressure (kPa) Std diff press (kPa) Operating diff press (kPa) Max. working pressure (kPa) Std diff press (kPa) Operating diff press (kPa) Max. working pressure (kPa) Std diff press (kPa) Operating diff press (kPa) Max. working pressure (kPa) Std diff press (kPa) Operating diff press (kPa) Max. working pressure (kPa) Flow rate range *1 0005 0010 Oil-ProhR Med Press FR No Cu/ PTFE FRL Flow rate range *1 L0002...

■ FCM Series for hydrogen, helium Specifications Valve drive method Proportional solenoid valve When not energized: Closed Full scale flow rate Port size SlowStart fluids Note 2 Anti-bac/Bacremove Filt Film Resist FR Flow rate range L (Lub) Drain Separ Mech Press SW Res press exh valve 1/4" double barbed fitting Guaranteed accuracy range Response time Within 0.5 sec. to setting ±5% F.S. (TYP.) Within ±3% F.S. Adapter Joiner Press Gauge Standard differential pressure Refer to the separate table Operating differential pressure range Refer to the separate table Temperature characteristics Within...

Standard differential pressure, operating differential pressure Operating diff press (kPa) 10 (≈1.5 psi) to 50 (≈7.2 psi) 30 (≈4.4 psi) to 80 (≈12 psi) 30 (≈4.4 psi) to 80 (≈12 psi) 30 (≈4.4 psi) to 80 (≈12 psi) Drain Separ Mech Press SW Res press exh valve Operating diff press (kPa) 20 (≈3 psi) to 100 (≈15 psi) 50 (≈7.3 psi) to 150 (≈22 psi) 50 (≈7.3 psi) to 150 (≈22 psi) 50 (≈7.3 psi) to 150 (≈22 psi) Max. working pressure (kPa) Display, integrating functions 0020 Anti-bac/Bacremove Filt Film Resist FR display Note 10 Display resolution Display range Display resolution Display range Note 8...