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Intro 5 Series variation Sister product Valve types Air operated valve 2 port 2 port 2 port Manual valve Toggle valve Appearance, reference page AMD3*2 AMD2/3/4/5*··· Page 58 MMD··· Page 98 TMD··· Page 102 AMB··· Page 66 AMDZ/0 AMD4*2 AMD5*2 ··· Page 2 Option Application Chemical supply system Cleaning system Application: Chemical supply system Cleaning system Application: Chemical supply system Cleaning system Application: Chemical supply system Cleaning system Chemical supply system Cleaning system Chemical supply system Cleaning system Coater/developer Body material Orifice diameter or suction rate Stainless steel body Ø8/Ø10 PFA/PTFE body Ø6.3 to Ø10 Stainless steel body Ø16 PFA/PTFE body Ø14.7 to Ø16 Stainless steel body Ø20 PFA/PTFE body Ø1.6 to Ø4 PFA/PTFE body Ø20 Super type Pillar fitting Super 300 type Pillar fitting F-LOCK 20 series fitting F-LOCK 20A series fitting F-LOCK 60 series fitting Final lock fitting FLARTEC fitting PVC union joint Rc thread SUS weld tube Double barbed joint With flow rate adjustment With indicator With bypass For ammonia For nitric acid/ hydrofluoric acid For high temperatures (5 to 160 °C) With flow rate adjustment With indicator With flow rate adjustment With indicator With bypass For liquid ammonia For liquid nitric acid/hydrofluoric acid For high temperatures (5 to 160 °C) With flow rate adjustment With indicator With flow rate adjustment With indicator With bypass For ammonia For nitric acid/ hydrofluoric acid With flow rate adjustment With indicator With flow rate adjustment AMD0*2 ··· Page 6 Chemical supply system Cleaning system PFA/PTFE body Ø3 to Ø4 With flow rate adjustment With indicator For ammonia For nitric acid Connection (fitting type) Air operated valve 2 port Peripheral devices Regulator PYM ··· Page 122 PMM10 ··· Page 124 PMM20 ··· Page 126 Connection: Rc1/8/Rc1/4 (Ø8, Ø10 for PMM20.) Setting pressure range: 0.02MPa to 0.2MPa Application: Coater/developer Stainless steel body type ··· Page 16 Stainless steel body type ··· Page 24 Stainless steel body type ··· Page 32 PFA body type ··· Page 10 PFA body type ··· Page 20 PFA body type ··· Page 28 New

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Intro 6 AMDZ AMD0 High-pressure specifications AMGZ0 AMD0*2 AMD3*2 AMD4*2 AMD5*2 AMG00 AMG*02 GAMD**2 MMD*02 Flow AMD AMB characteristics GMMD*02 MMD*0 TMD*02 AMS AMDS TQAS KML Others Solenoid valve Fine regulator MMD3/4/502 PFA body type ··· Page 76 AMDS Stainless steel body type ··· Page 84 AMGZ/0 AMG3/4/502 GAMD3/4/5*2 ··· Page 36 ··· Page 40 ··· Page 48 GMMD3/4/502 AMS ··· Page 90 ··· Page 108 ··· Page 112 Chemical supply system Cleaning system Chemical supply system Cleaning system Chemical supply system Cleaning system Chemical supply system Cleaning system Coater/developer...

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