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Linear Actuator

Product catalog summary

Overview: The document details specifications and features of miniaturized AC Servo Linear Actuators, including models like MALS-D18, MAS-D16, and others. These actuators are designed for precise positioning with diameters from 16 to 28 mm and strokes from 6 to 30 mm.

Key Features:

Compact and lightweight design.
High resolution from 0.24 to 0.625 μm.
Unidirectional repeat accuracy between 3 to 20 μm and bidirectional repeat accuracy between 5 to 25 μm.
Bidirectional positioning accuracy from 10 to 50 μm.
Ball screw models for high speed and longevity.

Specifications: Each series has specific parameters like stroke length, rated thrust, resolution, and accuracy. For instance, the MALS-D18 series offers a stroke of 6 to 20 mm, a rated thrust of 14.7 N, and a resolution of 0.5 μm.

Models for Special Environments: The MASC-D16 and MASC-D23 series are suitable for clean room applications.

Control and Compatibility:

Exclusive LAD-01 Series driver for smooth operation.
Compatible with manual micrometer heads.
Extension cables available for longer transmission distances.

Handling and Installation:

Use screw nuts to fix actuators to equipment to maintain accuracy.
Ensure proper preload to prevent backlash.
Actuator cables are not bending resistant; contact the manufacturer for such applications.

Safety Mechanisms: Actuators include end limit sensors for safe operation and preventing mechanical failures.

Procedures and Recommendations:

Mounting and Compatibility: Proper mounting is crucial for accuracy.
Driver and Cable Usage: Use the LAD-01 Series driver and compatible extension cables for extended distances.
Limit Switch Usage: Use limit switches to prevent rod sticking.

Safety Mechanisms: Actuators include an end limit sensor but lack a brake mechanism, so additional safety measures are advised.

Notes and Cautions:

Avoid exceeding rated thrust to prevent damage.
Contact the manufacturer for repeated bending stress applications.
Ensure torque does not exceed 1 Nm when attaching screws.

Driver Features: The LAD-01 Series driver is a 3-phase sine wave PWM drive driver, allowing parameter setting via USB and features like gain switching.

Control and Output: The driver supports various input and output signals and provides alarm outputs for conditions like encoder disconnection.

Specifications: The document specifies a DC 24V system with a peak current of 10 A and position control capabilities, with operating temperatures from 0 to 50°C.

Control and Display Functions: Supports multiple pulse systems and features alarm output reset and gain reduction.

Cable and Connector Specifications: Detailed instructions for selecting and using cables and connectors are provided.

Accuracy Measurement and Definitions: Defines accuracy measurement methods according to JIS B-6201 standards.

Special Environment Models: Customization options for environments like vacuum or clean rooms are available.

Cautions and Warranty: Emphasizes proper wiring and handling, with a one-year warranty period.

Specifications and Warnings: Warns against using excessively long screws for fixing drivers to avoid damage.

General Information: Information is subject to change without notice, and repairs may take several days.

Contact Information: Address and contact details for further inquiries are provided.

Product Applications and Lineup:

Semiconductor Equipment: Includes lithography machines and wafer inspection systems.
Medical Equipment: Includes denture processing machines and ultrasonic diagnostic systems.
Beauty Equipment: Includes handpieces for nail art.
Measuring Equipment: Includes LiDAR and electron microscopes.
Factory Automation: Includes laser marking machines and motors for robots.

Additional Resources: For more details, visit the provided website links.

Catalog excerpts

Linear Actuator

Open the catalog to page 1

Miniaturized Linear Actuator Stroke Unidirectional Repeat Accuracy 3∼20 μm High Resolution Rated Thrust Bidirectional Repeat Accuracy 5∼25 μm Bidirectional Positioning Accuracy 10∼50 μm Features: Our miniaturized AC Servo Linear Actuators are small, light weight, and straight-line type actuators that enable a high accuracy positioning. We adopted a hollow structured AC servo motor for motor part and a small and high-resolution optical rotary encoder for encoder part. The direct design without gearheads or other items also achieved precise and high resolution positioning. In addition to the above...

Open the catalog to page 2

: Standard Type : Standard Type (Cost-eﬀective Model) : Ball Screw Type : Ball Screw Type (Cost-eﬀective Model) : For Clean Room Outer Diameter *If not stated, it will be the standard 2000mm. Tapped Hole : N Type H : Tip with Flat Point R : Tip with Spherical Point N : Tip with Tapped Hole (For MAB, MALB and MALS only) Drawing for Fixing Actuator ● Please put the locking plate inbetween the accompanying screw nut and the actuator Accompanying screw nut to ﬁx an actuator Locking Plate 0.02 Note* 1: Please use the accompanying screw nut to ﬁx the actuator to your equipment. If the actuator...

Open the catalog to page 3

Standard Type Cost-Effective Model ● Stroke When ordering a 200 mm long cable, please add -03 at the end of the model number. With Tapped Hole Type : 1.5 mm Rated Thrust Maximum Speed Screw Lead Unidirectional Repeat Accuracy Bidirectional Positioning Accuracy Bidirectional Repeat Accuracy Average Inverse Error Limit Sensor Hall Sensor Tapped Hole : N Type M2 with Depth of 4 (Note* 9) Note* 1: When the motor rotates in the CW direction viewed from rod side, it moves to the direction of the arrow. Note* 2: Please be sure to use the limit switch. If not used, the rod may get stuck in the back and...

Open the catalog to page 4

Standard Type/ Extra Thin When ordering a 200 mm long cable, please add -03 at the end of the model number. ■Speciﬁcation Items Stroke Rated Thrust Rated thrust Resolution Max Maximum Speed speed Screw Lead Sc rew lead Unidirectional repeatable Unidirectional Repeat Accuracy accuracy Bidirectional Accuracy Bidirectional Positioningpositioning accuracy Bidirectional repeatable accuracy Bidirectional Repeat Accuracy Average Average Inverse Error reversal error Limit Sensor Limit sensor Hall Sensor Note* 1: When the motor rotates in the CW direction viewed from rod side, it moves to the direction...

Open the catalog to page 5

Standard Type When ordering a 200 mm long cable, please add -03 at the end of the model number. With Tapped Hole Type : 1.5 mm 推 Rated 力 Thrust Rated thrust 速度 Max Maximum Speed speed 一方向繰り返 Unidirectional Repeat Accuracy accuracy し精度 Unidirectional repeatable 両方向位置決 Bidirectional Positioningpositioning accuracy め精度 Bidirectional Accuracy 両方向繰り返 Bidirectional Repeat Accuracy し精度 Bidirectional repeatable accuracy 平転 Average Inverse Error reversal error 誤差 Average リミットセン Sensor Limit sensor Limit サ寸重製 Hall Sensor Tapped Hole : N type Note* 1: When the motor rotates in...

Open the catalog to page 6

Standard Type When ordering a 200 mm long cable, please add -03 at the end of the model number. Rated Thrust Resolution Maximum speed Screw Lead Unidirectional Repeat Accuracy Bidirectional Positioning Accuracy Bidirectional Repeat Accuracy Average Inverse Error Limit Sensor Hall Sensor Note* 1: When the motor rotates in the CW direction viewed from rod side, it moves to the direction of the arrow. Note* 2: Please be sure to use the limit switch. If not used, the rod may get stuck in the back and cannot be restored. Note* 3: The logic of limit switch is normally closed (NC). Please connect the...

Open the catalog to page 7

High Speed/ Long Life Type With Tapped Hole 3×M3 with Depth 4 On φ24 Circumference When ordering a 200 mm long cable, please add -03 at the end of the model number. With Tapped Hole Type : 1.5 mm ■ Speciﬁcation Items Stroke Rated Thrust Maximum Thrust in a Short Time Resolution Maximum Speed Screw Lead Unidirectional Repeat Accuracy Bidirectional Positioning Accuracy Bidirectional Repeat Accuracy Average Inverse Error Limit Sensor Hall Sensor Tapped Hole : N Type Note* 1: When the motor rotates in the CW direction viewed from rod side, it moves to the direction of the arrow. Note* 2: Please be...

Open the catalog to page 8

High Speed/ Long Life Type 3×M3 with Depth 4 On φ24 Circumference With Tapped Hole M3 with Depth 5 When ordering a 200 mm long cable, please add -03 at the end of the model number. With Tapped Hole Type: 6mm Maximum Thrust for a Short Time Rated Thrust Resolution Maximum Speed Screw Lead Unidirectional Repeat Accuracy Bidirectional Positioning Accuracy Bidirectional Repeat Accuracy Average Inverse Error Limit Sensor Hall Sensor Tapped Hole : N Type M3 with Depth 5 (Note* 9) Note* 1: When the motor rotates in the CW direction viewed from rod side, it moves to the direction of the arrow. Note*...

Open the catalog to page 9

Models for Special Environments ● Linear Actuator for Clean Room Applicable to Clean Class 100 When ordering a 200 mm long cable, please add -03 at the end of the model number. ■ Speciﬁcation Items Stroke Rated Thrust Resolution Maximum Speed Screw Lead Unidirectional Repeat Accuracy Bidirectional Positioning Accuracy Bidirectional Repeat Accuracy Average Inverse Error Limit Sensor Hall Sensor Note* 1: When the motor rotates in the CW direction viewed from rod side, it moves to the direction of the arrow. Note* 2: Please be sure to use the limit switch. If not used, the rod may get stuck in the...

Open the catalog to page 10

Open the catalog to page 11

Linear Actuator

Linear Actuator

Catalog excerpts

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