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Galvanometer Optical Scanners
Galvanometer Optical Scanners
Overview
This document provides comprehensive technical specifications, model selection guidance, and usage recommendations for the GVM/GVMW series galvanometer optical scanners. These high-performance scanners feature precision optical analog sensors, low inertia, high torque, excellent linearity, and robust environmental resistance, enabling accurate and high-speed scanning of galvanometer mirrors.
1. Model Selection and Nomenclature
Scanner model numbers encode critical parameters such as mechanical scanning angle (±10° to ±40°), mirror inclusion and angle relative to cable, cable length, shaft form, and custom options. Wide-angle GVMW models are recommended for applications requiring high linearity at ±10° to ±20°. Special L1 models offer higher torque constants and impedance for efficient operation at lower currents. Usage beyond ±10° mechanical angle typically requires custom mirrors.
2. Mirror Specifications and Compatibility
Mirrors are classified by laser beam diameter, shape (horizontal/vertical elongation), substrate material (Silicon or Quartz), and coating type (Gold, Silver, Dielectric multilayer). Compatibility tables specify recommended mirror models and mounting methods (adhesive or clamp) for each scanner type. Mirror coatings are optimized for different laser wavelengths and thermal management, with silver coatings suited for visible lasers, gold for CO2 lasers, and dielectric multilayers for YAG lasers.
3. Scanner Model Specifications
Detailed parameters for multiple scanner models (e.g., GVM-0930S, GVM-2260 series, GVM-3113 series) include:
- Maximum mechanical scan angles up to ±40°
- Rotor inertia ranging from 0.012 to 17.1 g·cm² (excluding mirror and holder)
- Coil resistance and inductance with ±10% tolerance
- Torque constants from 8 to 57.3 mN·m/A
- Back EMF voltage constants
- Peak current ratings up to 21.8 A
- Maximum coil temperature of 110°C
- Weight between 15 g and 570 g depending on model
- Repeatability of 8 μrad
- Non-linearity within 0.1% at ±10°, increasing at wider angles
- Offset drift up to 10 μrad/°C and gain drift around 30 ppm/°C
Specifications assume use with Citizen Chiba Precision servo drivers and specified mirrors. Step response times vary with mirror/scanner combinations and are available upon request.
4. Connector and Cable Details
Standardized connectors (e.g., SM10B-ZPDSS-TF by J.S.T., DF3B series by Hirose) are used for sensor and motor connections. Pin assignments cover sensor outputs, AGC signals, shielding, and motor winding connections. Dedicated cables with selectable lengths (250mm to 3000mm) are required for proper operation.
5. Driver Models and Control Systems
Two main driver models are described: GVD0/GVDW0 and GVD2/GVDW2, supporting power supplies of ±15V or ±24V, maximum RMS currents of 2.5A, and peak currents up to 10A. Control options include:
- P Control: Proportional control offering high servo bandwidth and fast response but may have steady-state errors under friction or distortion.
- PI Control: Proportional-Integral control providing minimal steady-state errors and high repeatability, suitable for accuracy-critical applications.
Users should select control types based on application priorities between speed and precision.
6. Handling Precautions and Safety
- Verify product condition and wiring before powering to prevent damage.
- Avoid mechanical shocks, excessive bending, and stress on cables and shafts.
- Perform wiring in anti-static environments and avoid exposure to corrosive substances.
- Stop operation immediately if abnormal heat, smoke, noise, or vibration occurs.
- Use specified screws for mounting to ensure safety and product integrity.
- Product lifespan depends on load, operation mode, and environment; thorough testing is recommended.
7. Warranty and Repair Policy
The product carries a one-year warranty covering defects due to materials or workmanship under proper use. Repairs within this period are free but require product return. Damage from misuse or after one year is subject to paid repair. The company disclaims liability for transit damage; customers must ensure adequate packaging. Customers are advised not to disassemble products and to contact sales representatives for support.
8. Application Examples and Product Lineup
The GVM/GVMW series and associated products are used in diverse industries including semiconductor manufacturing (lithography, wafer inspection), medical and clinical equipment (OCT, cancer treatment devices), beauty equipment (nail art), measuring and analyzing instruments (LiDAR, electron microscopes), and factory automation (laser marking, robotics).
9. Additional Notes
- All angles referenced are mechanical angles.
- Moment of inertia values exclude mirrors and holders unless specified.
- Step response and dynamic characteristics depend on mirror/scanner combinations; consult manufacturer for detailed data.
- Mirror coatings balance reflectivity and thermal management; Si substrates offer high stiffness and heat dissipation.
- Product specifications and offerings may change without notice; customers should consult sales or authorized distributors for updates.
This document is essential for engineers and designers selecting precision galvanometer scanners and mirrors for high-accuracy optical scanning applications, providing detailed electrical, mechanical, optical, and assembly information to ensure optimal system integration and performance.
Catalog excerpts
Optical Scanners GVM/GVMW-����S GVM/GVMW-����L/����L� GVM/GVMW-����S GVM/GVMW-����L/����L�
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ガルバノ光学スキャナ Galvanometer Optical Scanners 光学式の高精度アナログセンサを搭載した、高性能・高信頼性ガルバノ スキャナ ( ガルバノメーター・ガルバノモーター・ガルバノスキャナモー ター ) です。 低イナーシャ、高トルク、高精度リニアリティ、高位置精度、優れた温度 特性、湿度の影響が少ない、などの特徴を有しており、レーザ用ミラー ( ガルバノミラー ) を高速・高精度に広範囲に走査することが可能です。 Our GVM Series is the high performance and high reliability galvanoscanner (or called as galvanometer/galvanomotor/galvanoscanner motor)
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Galvanometer Optical Scanners Contents ■ 型式選定・説明 Model Selection・Model Number ●スキャナ ●ミラー Scanner Mirror Galvanometer Optical Scanner
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Scanner Model Number スキャナ種別 Scanner Type Registered Custom Number GVM : 標準スキャナ Standard Scanner GVMW : 広角スキャナ Wide Scanner 無記号：標準ラインアップ品 No Number : Standard Product *It is only used for customized products スキャナ機種 Scanner Model ����S, ����L, ����L�, ����S, ����L, ����L�, ����, ����, ����, ����, ���� With or Without Mirror � ：ミラー無し Without mirror M ：ミラー付き With mirror 振れ角 ( 機械角 ) Scanning Angle (Mechanical Angle) �：±��° �：±��° �：±��° �：±��° �：±��° C：カスタム ケーブル長 Cable Length Bumpers set for ±��° scanning Bumpers set for ±��° scanning Bumpers set for ±��° scanning Bumpers set for ±��° scanning Bumpers...
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Mirror Model Number レーザビーム径 Laser Beam Diameter �：φ �mm �：φ �.�mm �：φ ��mm �： ー �：φ ��mm �：φ ��mm �：φ ��mm �：φ �mm C ：カスタム Customized mirror No Number: Standard Product *It is only used for customized products �：Ag ( 銀 ) コーティング (����nm & ���nm用 ) (����nm用 ) Customized mirror Customized substrate ミラーモデル Mirror Model 接着固定 Fixed to shaft by adhesive クランプ固定 Clamped with screws スキャナ Scanner GVM-3113 のミラーに関してはお問い合わせください Please contact us for the mirror for GVM-3113 Compatible holder type The above table is a reference chart for a mechanical angle of ± 10. GVM-1445L シリーズと GM2 の組み合わせは接着固定となります。 If combining...
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This drawing indicates the combination with GM7 mirror assembly. ‘ The values of the specification are based on the combination of Citizen Chiba Precision Servo Driver and Mirror. * All angles shown are in mechanical angles. * We can provide the data including step response time by preferred combination of the mirror size and the scanner. Please contact our sales representatives for more details. (Some combinations may not be available.) The moment of inertia is a reference value without the mirror or the mirror holder.
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‘ The values of the specification are based on the combination of Citizen Chiba Precision Servo Driver and Mirror. * All angles shown are in mechanical angles. * We can provide the data including step response time by preferred combination of the mirror size and the scanner. Please contact our sales representatives for more details. (Some combinations may not be available.) The moment of inertia is a reference value without the mirror or the mirror holder.
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This drawing indicates the combination with GM0 mirror assembly. Dedicated connection cable is required. ( please see page18 for more details ) ‘ The values of the specification are based on the combination of Citizen Chiba Precision Servo Driver and Mirror. * All angles shown are in mechanical angles. * We can provide the data including step response time by preferred combination of the mirror size and the scanner. Please contact our sales representatives for more details. (Some combinations may not be available.) The moment of inertia is a reference value without the mirror or the mirror holder....
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‘ The values of the specification are based on the combination of Citizen Chiba Precision Servo Driver and Mirror. * All angles shown are in mechanical angles. * We can provide the data including step response time by preferred combination of the mirror size and the scanner. Please contact our sales representatives for more details. (Some combinations may not be available.) The moment of inertia is a reference value without the mirror or the mirror holder.
Open the catalog to page 9
" The values of the specification are based on the combination of Citizen Chiba Precision Servo Driver and Mirror. * All angles shown are in mechanical angles. * We can provide the data including step response time by preferred combination of the mirror size and the scanner. Please contact our sales representatives for more details. (Some combinations may not be available.) "The moment of inertia is a reference value without the mirror or the mirror holder.
Open the catalog to page 10
Select cable length from options (page 3) This drawing indicates the combination with GM2 mirror assembly. The values of the specification are based on the combination of Citizen Chiba Precision Servo Driver and Mirror. * All angles shown are in mechanical angles. * We can provide the data including step response time by preferred combination of the mirror size and the scanner. Please contact our sales representatives for more details. (Some combinations may not be available.) The moment of inertia is a reference value without the mirror or the mirro
Open the catalog to page 11
This drawing indicates the combination with GM4 mirror assembly. ±t§ Specifications HUtt Repeatability The values of the specification are based on the combination of Citizen Chiba Precision Servo Driver and Mirror. * All angles shown are in mechanical angles. * We can provide the data including step response time by preferred combination of the mirror size and the scanner. Please contact our sales representatives for more details. (Some combinations may not be available.) *The moment of inertia is a reference value without the mirror or the mirror holde
Open the catalog to page 12
■ GVM/GVMW-2510 l'5iDSK(P.3) Select cable length from options (page 3) Mirror + Scanner This drawing indicates the combination with GM5 mirror assembly. ^ g Items ‘ The values of the specification are based on the combination of Citizen Chiba Precision Servo Driver and Mirror. * All angles shown are in mechanical angles. * We can provide the data including step response time by preferred combination of the mirror size and the scanner. Please contact our sales representatives for more details. (Some combinations may not be available.) The moment of inertia is a reference value without the mirror...
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