Stylus Nano Profiler NS200/NS200-D - Surface micro-nano profile measurements

Product catalog summary

Description: The Stylus Nano Prof is an ultra-precision contact measuring instrument designed for surface roughness and microscopic profile measurements, such as micro-nano step height and film thickness. It features an ultra-flat object table, a visual navigation system with a 5MP colorful camera, and a motorized X/Y/Z stage with 360° rotation. The system is equipped with a powerful data collection and analysis system, ensuring excellent repeatability and reproducibility.

Applications: The Stylus Nano Prof is suitable for various applications including semiconductor large substrate glass, film on flexible components, step height measurement, etch rate measurement, chemico-mechanical polishing, PCB protrusion, window coating, wafer mask and chuck coating, polishing plate, AMOLED, LCD screen development, touch panel film thickness measurement, solar coating thin film, organic photodetectors, organic films on film and glass, and touch screen copper traces.

Parameters: The instrument features a constant micro force sensor adjustable between 1-50mg, a maximum scanning range of 55mm, and a maximum sample height of 50mm. It supports a maximum wafer size of 8 inches and offers step height repeatability of 5 Å at a range of 330μm or 10 Å at a range of 1050μm. The scanning speed ranges from 2μm/s to 10mm/s, with a maximum scan sampling point of 12000.

Specifications: The NS200/NS200-D models have a size of 630×610×500mm and weigh 40kg. They operate on AC100~240V, 50/60 Hz, 200W. The working environment requires humidity levels of 30~40% RH, temperature between 16~25°C, ground vibration of 6.35μm/s, audio noise ≤80dB, and air laminar flow ≤ 0.508 m/s.

Notes: Repeatability data is measured in a laboratory environment meeting VC-C standards with an anti-vibration table. The sensor range can be selected between 330μm and 1050μm, with probes installed via magnetic mounting. For features not requiring an ultra-large range probe, the 330μm option is recommended.

Catalog excerpts

Stylus Nano Profiler Stylus Nano Profiler NS200 I Application Surface micro-nano profile measurements ■ Powerful data collection and analysis system ■ Excellent repeatability and reproducibility Visual navigation system, 5MP colorful camera •Step height of deposited film • Step height of thin Film Resist • Etch rate measurement •Chemico-mechanical polishing (corrosion, pitting, bending) Large Substrate • PCB protrusion, step height • Window coating • Wafer mask • Wafer chuck coating • Polishing plate flexible component • Organic photodetector • Organic films printed on film and glass • Touch screen copper traces micro force sensor: 1-50mg adjustable Motorized X/Y/Z stage. Motorized 360° rotation Stylus Nano Profiler NS200/NS200-D is an ultra-precision contact measuring instrument for measurement of surface roughness and microscopic profile, such as micro-nano step height, film thickness. The NS200 uses a displacement sensor with sub-angstrom resolution, ultra-low noise signal acquisition, ultra-fine motion control, and calibration algorithms technology with excellent performance. Its contact force is extremely small, and there are no special requirements for measuring surface reflection characteristics, material types, and material hardness, consequently, it is widely used to measure microscopic surface for industries of semiconductors and compound semiconductors, high-brightness LEDs, solar energy, MEMS micro-electromechanical systems, touch screens, automotive and medical equipment. Glass substrate and display • Step height measurement during LCD screen development • Thickness measurement for touch panel film • Solar coating thin film *1 Repeatability data was measured in a laboratory environment that meets VC-C standards and it is equipped with an antivibration table. If these conditions are not met, the repeatability data will be doubled. *2 The sensor range can only be selected between 330|jm and 1050|jm. Probes are installed by magnetic mounting. If there are no features requiring an ultra-large range probe, it is recommended to use the 330|jm one.

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