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3D Optical Surface Profilometer SuperView W3

3D Optical Surface Profilometer SuperView W3
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3D Optical Surface Profilometer SuperView W3 - 1

3D Optical Surface Profilometer SuperView W3 3D Optical Surface Profilometer Large-scale microscopic 3D form and roughness Light Source Video System Objective Lens Optical Zoom Lens Turret Motorized 5 holes turret Large table Applicable for 12" wafer One-key automatic measurement Travel Range Load Capacity Control Method Travel Range Control Method Z- Stroke Scanning Range Z Resolution Roughness RMS Repeatability *1 Accuracy *2 Step Height Measurement Repeatability *2 Operating environment: No strong magnetic ﬁeld, no corrosive gas Environmental vibration: VC-C or better Working temperature: 0°C~30°C ﬂuctuation <2°C/60min Compressed air: 0.6Mpa oil-free, water-free Relative humidity: 5%~95% RH, no condensation Note: *1 Measure Sa 0.2nm silicon wafer in a laboratory environment according to the ISO 25178 *2 Measure standard 5μm steps height block in a laboratory environment according to the ISO 10610-1:2009 Dedicated Functions for Semiconductor Field Measure profile trenches after laser grooving in the dicing process. Measure ﬁlm step-height of wafer ranging from 1nm~1mm. Measure roughness of silicon cut sheet after grinding process, and can measure dozens of small areas to obtain the average value by one click. Support 6", 8" and 12" wafer measurement, and easy switch between 3 sizes of vacuum chucks by one click automaticall

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