3D Optical Surface Profilometer SuperView W1
6Pages

3D Optical Surface Profilometer SuperView W1 White Light Interferometry Nano 3D Surface Form and Roughness Interference Lens Sonic Vibration Isolation The shell is separated from the internal motion unit, which effectively isolates the transmission of sound wave vibration. Different magnification lenses are selectable for various test objects with smooth or coarse surface. 3D Re-Establishment Unique re-establishment algorithm can filter noises of surface of test object. Vacuum Object Table Vacuum Object Table is specially customized for semi-conducting wafers, so influence from feeble air flowing to test object is eliminated in measurement. Air-Bearing Isolation System Built-in air bearing isolation system can isolate the vibration. Air pressure of the machine can be supplied by air compressor or inflators. Easy Level Improve the re-establishment accuracy and adjust stripe width by adjusting tilt of object table. Convenient joystick Easy to control X/Y/Z movement, speed and light source brightness; Emergency stop button.

[ Application] It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system. Cut sheet, Coated sheet, profi l e, radi us of curvature Ultraprecise Machining MicroNano Materials Roughness, microcosmic Surface profi l e and roughness, area, vol ume [ Application Case ] Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness,...

[ XtremeVision 3D Software ] Integration software: Measurement and analysis are operated in the same interface; With pre-set analytic parameters, the software automatically generates measurement data, and achieves rapid CNC measurement. Auto Measurement: After set measuring ranges & points and related parameters, multi-area can be measured. After set analytic program, more than 10 files can be analyzed by Stitching Measurement: one click, finally data result and statistical graph are generated After set the measuring range Partial measurement: and parameters, large area Can select any area...

[ Technical Parameters ] Model No. Light source Video system Standard Field of View Travel range Load capacity Control method Z-axis travel range Z-axis stroke scanning range Z-axis scanning speed Z-axis Resolution Lateral Resolution Characters of Test Object Super-smoothing surface, coarse surface; Reflectivity 0.05%~100% Power Supply Standard Configuration 1) Host machine Optional Configuration 1) Parfocal objective lens: 2.5X, 5X, 10X, 50X, 2) High speed camera 4) Parfocal objective lens: 10× 5) Motorized X & Y object table 4) Motorized 5 holes turret 6) Manual 3 holes turret 6) 4.7μm...

3D Optical Surface Profilometer SuperView W3 Large-scale microscopic 3D form and shape ■ Large table ■ Applicable for 12" wafer ■ One-key automatic measurement [ Dedicated Functions for Semiconductor Field ] • Measure profile trenches after laser grooving in the dicing process. Measure film step-height of wafer ranging from 1nm~1mm. Measure roughness of silicon cut sheet after grinding process, and can measure dozens of small areas to obtain the average value by one click. Support 6", 8" and 12" wafer measurement, and easy switch between 3 sizes of vacuum chucks by one click automa

[ Technical Parameters ] Model No. Light source Video system Standard Field of View Travel range Load capacity Control method Z-axis travel range Z-axis stroke scanning range Z-axis scanning speed Z-axis Resolution Lateral Resolution Characters of Test Object Super-smoothing surface, coarse surface; Reflectivity 0.05%~100% Power Supply Size Weight Standard Configuration 1) Host machine Optional Configuration 1) Parfocal objective lens: 2.5X, 5X, 10X, 50X, 2) High speed camera 4) Parfocal objective lens: 10× 5) Motorized X & Y object table 4) Motorized 5 holes turret 6) Manual 3 holes turret...