CEDRAT TECHNOLOGIES Innovation in Mechatronics Piezo Microscanning Mechanisms Microscanning is a key technique in high-resolution IR imaging field. It allows to increase the system resolution and improve the performance of imaging systems. This technique requires repeatability and short response time. Fig. 1: Typical microscanning patterns Two technologies are proposed by CEDRAT TECHNOLOGIES (CTEC): moving a lens with a XY25XS Stage or tilting a mirror with a DTT15XS mechanism. Microscanning technique consists in taking multiple images of the same scene, according to different pattern (Fig.1), while displacing each time the image over the detector plan by a distance equal to a fraction of the detector pitch. The undersampled frames of the scene are then used to form a single high-resolution frame. The XY25XS piezo stage shifts a focussing lens in the focal plane array along 2 axis X & Y (Fig.2). Fig. 2: Lens based microscanning system The DTT15XS mechanism tilts a mirror along 2 axis X & Y (Fig.3) MICROSCANNING WITH A XY STAGE > Copyright © CEDRAT TECHNOLOGIES | 10/2020 The piezoelectric stage XY25XS (Fig.4) is based on standard Amplified Piezo Actuator (APA®) and owns high stiffness. The stage can be equipped with Strain Gauges to get a very fine accuracy. Parasitic rotations are very limited. This compact stage can be customised in order to meet specifications in terms of mechanical integration and environment on board IR camera (Fig.5). Fig. 5: Catherine IR Camera using a customised XY25XS version, courtesy of Thales Optronique. Fig. 3: Mirror-based microscanning system Fig. 4: Standard XY25XS piezoelectric stage CEDRAT TECHNOLOGIES • 59 Chemin du Vieux Chêne • Inovallée • 38246 MEYLAN Cedex France • Tel. : +33 (0)4 56

Piezo Microscanning Mechanisms CEDRAT TECHNOLOGIES Innovation in Mechatronics > Typical performances are given in the following table (Table 1). This table is not exhaustive as many other XY Piezo Stages have been designed by CTEC starting with similar or other standard amplified piezo actuators (see brochure XY stages heritage). TYPICAL VALUE Nominal stroke Minimal stroke Voltage range Unloaded Blocked - free resonance frequency (3) Max. out of plane Z displacement > Driving (4) Height (5) Cross section Mass Table 1: Performances of the standard XY25XS piezoelectric stage Guaranted in labs environment....

Piezo Microscanning Mechanisms CEDRAT TECHNOLOGIES Innovation in Mechatronics MICROSCANNING WITH A TIP TILT PLATFORM > The piezoelectric DTT15XS (Fig.6) is based on standard Amplified Piezo Actuator (APA®) and owns high stiffness. The DTT mechanism can be equipped with a mirror and Strain Gauges to get a very fine accuracy. This DTT can be customised in order to meet specifications in terms of mechanical integration and environment on board IR camera. > PERFORMANCES PARAMETER TYPICAL VALUE Nominal stroke Minimal stroke Unloaded Blocked - free resonance frequency (3) loaded Blocked - free resonance...

CEDRAT TECHNOLOGIES Innovation in Mechatronics Piezo Microscanning Mechanisms ADVANTAGES OF CTEC MECHANISMS ( XY25XS & DTT15XS) • • • • • • • • • Solid state design High speed Life time > 1010 cycles Low chromatic aberration Low electric consumption Centring in case of failure Thermally compensation Ease of implementation Compact solution Compared to: • Prism pair (chromatic aberration) • Liquid crystals & polarizer (50% input signal attenuation) • Moving FPA (complicated & limited performances), KEYWORDS Dithering, microscanning, XY piezo stage, piezo microscanner, IR camera resolution, Tip...