Rangu Diffusion Vacuum Pumps DF 1000-2800 A Busch Product identification

High Throughput Diffusion Pumps HS-16 HS-20 HS-32 NHS-35 Agilent Technologies Vacuum Products Division C€

High Throughput Diffusion Pumps Santovac® 5 Diffusion Pump Fluid of SANTOVAC FLUIDS, INC. Viton® is a registered trademark of E. I du Pont de Nemours and Company.

High Throughput Diffusion Pumps Contents Diffusion Pump Hazards . . . . . . . . . . . . . . . . . . . . . . . 1 Explosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 Pressurization Hazards . . . . . . . . . . . . . . . . . . . . 3 Dangerous Substances . . . . . . . . . . . . . . . . . . . . . 3 High Temperatures . . . . . . . . . . . . . . . . . . . . . . . 4 High Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Large Equipment and Heavy Weights . . . . . . . . . 4 Diffusion Pump Basics . . . . . . . . . . . . . . . . . . . . . . . . . 5 Pump Operation . ....

High Throughput Diffusion Pumps List of Figures Figure Caption Page 2 HS-16 Speed and Throughput Curves, 8.1 kW 8 Table Title Page

High Throughput Diffusion Pumps Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, replacement, or refund an equitable portion of the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole opinion of Seller, are due or traceable to defects...

High Throughput Diffusion Pumps Instructions for Use This equipment is designed for use by professionals. The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment. Agilent will not be held responsible for any events that occur due to non-compliance with these instructions, improper use by untrained persons, non-authorized interference with the equipment, or any action contrary to that proved for by specific national standards. This manual uses the following standard safety protocol: The warnings are for attracting the...

Declaration of Conformity Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità We Wir Nous Nosotros Wij Noi Agilent, Inc. 121 Hartwell Avenue Lexington, MA, 02421-3133 USA declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß dieses Produkt, déclarons sous notre seule responsabilité que le produit, declaramos, bajo nuestra sola responsabilidad, que el producto, verklaren onder onze verantwoordelijkheid, dat het product, dichiariamo sotto nostra...

High Throughput Diffusion Pumps This page intentionally left blank.

High Throughput Diffusion Pumps Designers of systems utilizing diffusion pumps must design out hazards wherever possible. For hazards that cannot be designed out, warnings, procedures, and instructions on proper use and servicing are provided. Please use guards, safety features, and interlocks as recommended. Refer to Table 1 for a list of general hazards and recommended actions, Table 2 on page 2 for a list of prohibited actions that can result in explosions, and Table 3 on page 3 for a list of pressurization hazards that can result in damage to equipment. THE INSTALLATION, OPERATION, AND SERVICING...

Explosion □ Operation of the diffusion pump without continuous evacuation below 0.5 Torr (0.67 mbar), or without coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluids in a hot pump (above 300 °F or 150 °C) can cause an explosion. Such an explosion can violently expel valves and other hardware, slam open doors that are not designed for appropriate pressure relief, or burst other components of the vacuum system. Serious injury or death may result from expelled parts, doors, shrapnel, and shock waves. □ Three elements...

Table 3 Pressurization Hazards Pressurization Hazards □ Large vacuum pumps and their components are designed for vacuum service; they are not designed to be pressurized which could cause them to burst possibly expelling shrapnel at lethal velocities. Serious accidents have been caused by intentional pressurization of vacuum systems and their components. □ Never pressurize any part of a vacuum system for test or any other purpose. □ Always provide pressure relief when designing diffusion pumps into systems and ensure that pressure relief motion is limited to safe envelopes. □ Never permit the...

High Temperatures □ Hot Surfaces: Boiler temperatures reach 530 °F (275 °C) which can cause serious burns. Always ensure that surfaces have cooled to near room temperature before touching them. □ Hot Cooling Water and Steam: The water used to cool the pump can reach scalding temperatures. Touching or rupture of the cooling surface can cause serious burns. Water left inside Quick Cool coils from previous use turns to steam when the pump is reheated. This steam must be allowed to escape without contacting personnel. Whenever possible, design the water system with interlock valves so that power...

High Throughput Diffusion Pumps Diffusion Pump Basics Pump Operation The diffusion pump works by heating the pump fluid to its boiling point. The vapors travel upward inside the jet assembly and are accelerated out and downward through the jet nozzles toward the cool outer walls of the pump, where the vapor condenses back into a fluid. As the vapor passes the inlet, it picks up elements of the gas to be exhausted and carries them to the ejector and out of the pump via the foreline. The pump’s ability to reach low pressures is governed in part by the inlet size. The gas migrates by thermal motion...