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Product Overview Mass Flow Controller for Gases

Product Overview Mass Flow Controller for Gases
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Product Overview Mass Flow Controller for Gases

Product catalog summary
Introduction
The document introduces the concept of gases, emphasizing their unique properties and the necessity for precise regulation in industrial applications. Bürkert, with over 60 years of experience in fluid control, offers a wide range of products, focusing on the flow of gaseous substances. Their Mass Flow Meters (MFM) and Mass Flow Controllers (MFC) are noted for their accuracy and efficiency.
Fascination Bürkert
Bürkert is a leading supplier of Fluid Control Systems, providing a comprehensive range of products from solenoid valves to sensors. The company values experience, courage, and closeness, offering extensive services and innovative solutions in gas handling applications.
Product Overview
The document outlines Bürkert's product range, including solenoid valves, process valves, pneumatic systems, sensors, and mass flow controllers, each designed for specific applications to ensure precise and safe handling of gases and liquids.
Measuring Principle
The thermal mass flow measurement principle is explained, using a heating element and temperature sensors to determine the mass flow rate of gases, preferred over volume flow measurements due to gas compressibility.
Mass Flow Controllers – Setup and Functioning
Bürkert's Mass Flow Controllers are compact devices that maintain a preset flow rate despite disturbances, consisting of a flow sensor, electronics, and a solenoid control valve. The document details their setup and functioning, highlighting ease of installation and integration into control loops.
Industrial Communication
The document highlights the communication capabilities of Bürkert's MFC/MFM types, supporting Industrial Ethernet and fieldbus communication, offering flexibility for process integration and cost-effectiveness for applications with multiple devices.
Technical Specifications
Detailed technical specifications for various MFC/MFM types are included, covering full-scale ranges, sensor technology, body material, media compatibility, pressure, temperature, accuracy, repeatability, settling time, protection class, and communication options.
Sensor Types
Inline Sensor: Operates in Constant Temperature Anemometer (CTA) mode, allowing precise mass flow measurement with quick response times and low contamination susceptibility.
MEMS Sensor: Measures flow in a secondary channel using a silicon chip, offering quick response times and high sensitivity at low flow rates.
Capillary Sensor: Uses a secondary channel without direct contact with the medium, employing a Wheatstone bridge circuit, suitable for aggressive gases.
Solenoid Control Valve
These valves use electromagnetic forces for precise gas flow control, ideal for closed process control loops.
Calibration
Calibration aligns the sensor's signal range with the flow rate control range, typically calibrated for specific gases with conversion factors for others, based on DAkkS and NIST references.
Digital Control Electronics
The microprocessor system processes flow rate values and controls the actuator, supporting both analogue and digital communication with auto-optimization features for process-dependent settings.
Industrial Communication
Discusses the advantages of fieldbus and Industrial Ethernet systems, highlighting reduced wiring costs and enhanced integration capabilities. Bürkert's products support various communication protocols, including PROFIBUS, CANopen, and Industrial Ethernet.
EDIP (Efficient Device Integration Platform)
Standardizes operation, communication, and interfaces of Bürkert devices, facilitating integration and interaction among field devices, including the proprietary büS system bus and the Bürkert Communicator software tool for device configuration and monitoring.
Functional Groups and System Control
Outlines the definition of functional groups for input and output values, including procedures for factory reset and diagnosis. Emphasizes control loop analysis, error message logging, and device status display. Highlights the autotune function for automatic valve control range adjustments.
User-f(x) Program and System Solutions
Simplifies the implementation of functionalities in industrial plants by outsourcing specific control loops, allowing easy setup via graphical programming within the Bürkert Communicator software. Useful for controlling gas mixtures and can be integrated into the System Control Unit (SCU) for enhanced functionality.
System Engineering and Modular Solutions
Bürkert's system engineering capabilities offer comprehensive solutions with a single order number, reducing procurement and installation work. The modular system engineering allows easy upgrades and integration of various components.
Typical Applications
Examples include flame control, plasma control, and atmosphere control, where MFCs and MFMs provide precise gas mixtures for various industrial processes.
Configuration and Calibration
Involves determining whether the gas is to be controlled or measured, the medium to be controlled, and the process data available. Calibration requires knowledge of the gas mixture composition, medium temperature, and pressure values.
Technical Terms and Units
The appendix provides definitions and conversions for various technical terms and units related to flow rate, pressure, temperature, and valve authority.
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Catalog excerpts

Product Overview Mass Flow Controller for Gases-1

Product Overview [email protected] www.burkert.com Bürkert Fluid Control Systems Christian-Bürkert-Straße 13 -17 74653 Ingelfingen Germany Mass Flow Controllers for Gases

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Product Overview Mass Flow Controller for Gases-2

Bürkert | Mass Flow Controller Introduction The term “gas” has its origin in the Greek word for chaos. Coincidence? Probably not! Gases are peculiar. They are volatile, sometimes reactive, and always expansive. This means that gases have very special handling requirements. Process gases are indispensable in industrial manufacturing. From coating and hardening surfaces, right through to the fermentation processes used in the pharmaceutical world. Inert gases are used for example to protect packaged foodstuffs against the effect of atmospheric oxygen and in metal processing to prevent the oxidisation...

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Product Overview Mass Flow Controller for Gases-3

Fascination Bürkert Welcome to the Fascinating World of Fluid Control Systems Bürkert Product Program Measurement and control: When it comes to working with liquids and gases, we are at your side − as a manufacturer of We are one of the few suppliers on the market to cover the complete control loop. Our current product range sophisticated products, as a problem-solver with an eye for the big picture, and as a partner offering you reliable advice. extends from solenoid valves through process and analytical valves to pneumatic actuators and sensors. Since we started in 1946, we have developed into...

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Product Overview Mass Flow Controller for Gases-4

Bürkert | Mass Flow Controller & Mass Flow Meter Product Overview All Mass Flow Controller (MFC)/Meter (MFM) work at a nominal voltage of 24V DC, have a low pressure drop and do not require flow conditioning at the inlet or outlet. Full scale ranges (273.15 K, 1013.25 mbar) Sensor technology Inline Sensor Body material Stainless steel, aluminium Neutral, non-contaminated gases Turn-down ratio Capillary Sensor MEMS Sensor Stainless steel Stainless steel, aluminium Stainless steel Stainless steel, aluminium Aggressive, toxic gases Neutral, non-contaminated gases Settling time Protection class Standard...

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Product Overview Mass Flow Controller for Gases-5

Bürkert | Mass Flow Controller & Mass Flow Meter Product Overview All Mass Flow Controller (MFC)/Meter (MFM) work at a nominal voltage of 24V DC, have a low pressure drop and do not require flow conditioning at the inlet or outlet. Type Full scale ranges (273.15 K, 1013.25 mbar) Sensor technology 8746 (MFC / MFM)1 20 - 1500 lN  / min (N2), MFM up to 2500 lN/min (N2) Inline Sensor Body material Media 1:50 - Fieldbus gateway module (Type ME23) - nput and output modules of proprietary büS (Type ME29) I - Backplane module (Type BEF1) SCU add-ons: I/O modules (Type ME24) - I / O modules 4AO - I / O...

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Product Overview Mass Flow Controller for Gases-6

Bürkert | Measuring Principle The Measuring Principle of Thermal Mass Flow Mass Flow Controllers − Setup and Functioning The physical law is well known – heat always flows towards lower temperatures. So if a body has All Mass Flow Controllers from Bürkert are compact devices that control the mass flow of gases. a higher temperature than its environment, it will give off its heat energy to the neighbouring mass. They control a preset flow rate reference value – regardless of disturbance variables such as pres- So our thermal/calorimetric measurement technique utilises this principle, i. e. heat...

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Product Overview Mass Flow Controller for Gases-7

Bürkert | Setup and Functioning Inline Sensor MEMS Sensor The Inline sensor works in the CTA operating mode (Constant Temperature Anemometer), whereby In contrast to the Inline sensor, with which the mass flow in the main channel is measured, the an electrical heating resistance (RS) and a measurement resistance (RT) are regulated at a constant MEMS sensor determines the values directly in a secondary channel. In detail: A laminar flow temperature difference. Both resistances are directly placed in the flow channel; three more resist- element brought into the main channel ensures the necessary...

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Product Overview Mass Flow Controller for Gases-8

Bürkert | Setup and Functioning Capillary Sensor Solenoid Control Valve Types 8710/8700, 8715/8705 As with the MEMS sensor, a laminar flow element also causes a pressure drop in the main channel Solenoid control valves are electromagnetic control valves. They open to specific stroke positions – with the capillary sensor. A part of the total flow rate flows through a parallel running secondary depending on the control signal. Two forces counter one another in the valve: one a spring, and the channel. The decisive differences: the capillary sensor has no direct contact with the medium. The other...

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Product Overview Mass Flow Controller for Gases-9

Bürkert | Mass Flow Controllers Digital Control Electronics The sensor’s measuring signal range is unambiguously assigned to the flow rate control or measur- The electronic microprocessor system processes the set point and actual flow rate values. In ad- ing range with the calibration. Extremely precise flow references are used to set the flow rate values dition it also controls the actuator (solenoid control valve). In case of analogue sensor signals the and record the respective sensor signals. If the flow curve is registered, the electrical inputs and out- control electronics have the task...

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Product Overview Mass Flow Controller for Gases-10

Industrial Communication – with Fieldbus and Ethernet With the introduction of fieldbuses in the 1980s, information technology came into play at the field level of automation. Manufacturer-driven, fieldbus systems arrived on the market one after another. Well known and wide spread representatives are PROFIBUS, CANopen and DeviceNet. Basic advantages to conventional, hardwired architectures include reduced wiring costs (hardware) and easy integration of single components into an industrial plant (software). These are key factors in process automation. Strong competition for fieldbus systems is...

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Product Overview Mass Flow Controller for Gases-11

EDIP (Efficient Device Integration Platform) User interface of the Bürkert Communicator. The graphical programming interface User-f(x) is integrated into this software. The User-f(x) allows to program customized system control functions – e.g. for gas blending. The term EDIP stands for Efficient Device Integration Platform. It is the new Bürkert device platform which standardizes the operation, communication and interfaces of many process instruments (e.g. sensors, mass flow controllers). With EDIP all büS devices from Bürkert can be integrated into the proprietary büS system and can be operated...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.