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Mass Flow Controllers for Gases

Mass Flow Controllers for Gases
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Mass Flow Controllers for Gases

Product catalog summary
Introduction
The document introduces the concept of gases, emphasizing their unique properties and the necessity for precise regulation in industrial applications. Bürkert, with over 60 years of experience in fluid control, offers a wide range of products, focusing on the flow of gaseous substances. Their Mass Flow Meters (MFM) and Mass Flow Controllers (MFC) are noted for their accuracy and efficiency.
Fascination Bürkert
Bürkert is a leading supplier of Fluid Control Systems, providing a comprehensive range of products from solenoid valves to sensors. The company values experience, courage, and closeness, offering extensive services and innovative solutions in gas handling applications.
Product Overview
The document outlines Bürkert's product range, including solenoid valves, process valves, pneumatic systems, sensors, and mass flow controllers, each designed for specific applications to ensure precise and safe handling of gases and liquids.
Measuring Principle
The thermal mass flow measurement principle is explained, using a heating element and temperature sensors to determine the mass flow rate of gases, preferred over volume flow measurement due to gas compressibility.
Mass Flow Controllers – Setup and Functioning
Mass Flow Controllers (MFCs) are compact devices that control the mass flow of gases, maintaining a preset flow rate despite disturbances. They consist of a flow sensor, electronics, and a solenoid control valve, noted for their efficiency and ease of installation.
Industrial Communication
The document details the communication capabilities of Bürkert's devices, including standard signals, RS-232/485, Modbus-RTU, and various fieldbus options like PROFIBUS-DP and CANopen.
Device Platform EDIP
Bürkert's EDIP (Efficient Device Integration Platform) is a system solution for integrating multiple devices, enhancing communication and control capabilities.
System Solutions and Applications
Bürkert offers system solutions tailored to specific applications, such as burner technology and fuel cell applications, where high precision and reproducibility are crucial.
Technical Terms and Units
The document includes a section on technical terms and units, providing clarity on the measurements and specifications used throughout the document.
Conclusion
Bürkert's Mass Flow Controllers and Meters are designed for high precision and efficiency in gas handling applications, supported by a robust product range and extensive industry experience.
Sensor Technologies
  • MEMS Sensor: Utilizes a secondary channel for flow measurement with a silicon chip, offering quick response times and high sensitivity.
  • Capillary Sensor: Features a stainless steel capillary with temperature-dependent resistances, suitable for aggressive gases, providing a linear relationship between outlet voltage and mass flow rate.
Solenoid Control Valves
These valves use electromagnetic forces to control gas flow, ideal for closed process control loops due to their precise control positions and short response times.
Calibration
Calibration aligns the sensor's measuring signal range with the flow rate control range, crucial for accurate measurement and control, especially when switching between different gases.
Digital Control Electronics
The microprocessor system processes flow rate values and controls the actuator, offering benefits like reduced drift and software-based control, with communication options via analogue or digital interfaces.
Industrial Communication
Fieldbus and Industrial Ethernet systems offer advantages like reduced wiring costs and efficient data transmission. Bürkert's MFC/MFM products support various communication standards, enhancing integration and flexibility.
EDIP (Efficient Device Integration Platform)
EDIP standardizes operation and communication for process instruments, offering a modular architecture and a software tool for configuration and parameterization.
Bürkert Communicator Software
This tool allows users to monitor and configure device settings, perform firmware updates, and manage licenses, supporting graphical programming for customized control functions.
f(x) Program
The document discusses the f(x) program used for setting up control loops via graphical programming within the Bürkert Communicator software, highlighting its application in controlling gas mixtures and the advantages of using Bürkert's system solutions.
Specifications
The f(x) program allows importing existing programs and detects mass flow to calculate flow ratios for system participants, supporting error monitoring and processing of additional input/output signals if the SCU has the appropriate modules.
System Control
The SCU with customized software can control all functionalities of integrated büS capable field devices, which is not possible with standard gateways or PLCs. The document provides a system example involving various components like solenoid valves and pressure transmitters.
System Solutions
Bürkert offers comprehensive system solutions that simplify procurement and installation, ensuring safety with fewer sealing points. The modular system engineering allows easy upgrades and integration of components.
Applications
Typical applications include flame control, plasma control, and atmosphere control in various industries. MFCs and MFMs are used to provide precise gas mixtures for these applications.
Configuration
The document outlines the configuration process for MFM/MFC, including calibration, process data requirements, and communication setup, emphasizing the importance of correct calibration and configuration for optimal performance.
Technical Terms and Units
The appendix provides definitions and conversions for technical terms and units related to flow rate, pressure, and temperature, ensuring clarity in understanding the specifications and configurations.
Global Presence
Bürkert's global presence is highlighted, with offices in numerous countries, ensuring accessibility and support worldwide.
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Catalog excerpts

Mass Flow Controllers for Gases-1

burkert FLUID CONTROL SYSTEMS Product Overview

 Open the catalog to page 1
Mass Flow Controllers for Gases-2

Bürkert | Mass Flow Controller Introduction The term “gas” has its origin in the Greek word for chaos. Coincidence? Probably not! Gases are peculiar. They are volatile, sometimes reactive, and always expansive. This means that gases have very special handling requirements. Process gases are indispensable in industrial manufacturing. From coating and hardening surfaces, right through to the fermentation processes used in the pharmaceutical world. Inert gases are used for example to protect packaged foodstuffs against the effect of atmospheric oxygen and in metal processing to prevent the oxidisation...

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Mass Flow Controllers for Gases-3

Fascination Bürkert Welcome to the Fascinating World of Fluid Control Systems Bürkert Product Program Measurement and control: When it comes to working with liquids and gases, we are at your side − as a manufacturer of We are one of the few suppliers on the market to cover the complete control loop. Our current product range sophisticated products, as a problem-solver with an eye for the big picture, and as a partner offering you reliable advice. extends from solenoid valves through process and analytical valves to pneumatic actuators and sensors. Since we started in 1946, we have developed into...

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Mass Flow Controllers for Gases-4

Bürkert | Mass Flow Controller & Mass Flow Meter Product Overview All Mass Flow Controller (MFC)/Meter (MFM) work at a nominal voltage of 24V DC, have a low pressure drop and do not require flow conditioning at the inlet or outlet. Full scale ranges (273.15 K, 1013.25 mbar) Sensor technology Inline Sensor Body material Stainless steel, aluminium Neutral, non-contaminated gases Turn-down ratio Capillary Sensor MEMS Sensor Stainless steel Stainless steel, aluminium Stainless steel Aggressive, toxic gases Neutral, non-contaminated gases Settling time Protection class Standard signal, RS-232 or RS-485,...

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Mass Flow Controllers for Gases-5

Burkert | Mass Flow Controller & Mass Flow Meter All Mass Flow Controller (MFC)/Meter (MFM) work at a nominal voltage of 24V DC, have a low pressure drop and do not require flow conditioning at the inlet or outlet. 1) Type suitable for ATEX Zone 2, Kat 3, IIC, T4 2) In buS-modus up 32 MFC/MFM can be connected to a system control unit (SCU), e.g. of type ME2X. The SCU processes and translates the internal buS communication to industrial fieldbus / Ethernet standards (PROFIBUS DP, PROFINET, Ethernet/Ip Modbus TCP, EtherCAT). Furthermore, the SCU can be extended by I/O modules and as an option a...

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Mass Flow Controllers for Gases-6

Bürkert | Measuring Principle The Measuring Principle of Thermal Mass Flow Mass Flow Controllers − Setup and Functioning The physical law is well known – heat always flows towards lower temperatures. So if a body has All Mass Flow Controllers from Bürkert are compact devices that control the mass flow of gases. a higher temperature than its environment, it will give off its heat energy to the neighbouring mass. They control a preset flow rate reference value – regardless of disturbance variables such as pres- So our thermal/calorimetric measurement technique utilises this principle, i. e. heat...

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Mass Flow Controllers for Gases-7

Bürkert | Setup and Functioning Inline Sensor MEMS Sensor The Inline sensor works in the CTA operating mode (Constant Temperature Anemometer), whereby In contrast to the Inline sensor, with which the mass flow in the main channel is measured, the an electrical heating resistance (RS) and a measurement resistance (RT) are regulated at a constant MEMS sensor determines the values directly in a secondary channel. In detail: A laminar flow temperature difference. Both resistances are directly placed in the flow channel; three more resist- element brought into the main channel ensures the necessary...

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Mass Flow Controllers for Gases-8

Bürkert | Setup and Functioning Capillary Sensor Solenoid Control Valve Types 8710/8700, 8715/8705 As with the MEMS sensor, a laminar flow element also causes a pressure drop in the main channel Solenoid control valves are electromagnetic control valves. They open to specific stroke positions – with the capillary sensor. A part of the total flow rate flows through a parallel running secondary depending on the control signal. Two forces counter one another in the valve: one a spring, and the channel. The decisive differences: the capillary sensor has no direct contact with the medium. The other...

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Mass Flow Controllers for Gases-9

Bürkert | Mass Flow Controllers Digital Control Electronics The sensor’s measuring signal range is unambiguously assigned to the flow rate control or measur- The electronic microprocessor system processes the set point and actual flow rate values. In addi- ing range with the calibration. Extremely precise flow references are used to set the flow rate values tion it also controls the actuator (solenoid control valve). Furthermore, the control electronics con- and record the respective sensor signals. If the flow curve is registered, the electrical inputs and out- vert the sensor signal into a...

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Mass Flow Controllers for Gases-10

Industrial Communication – with Fieldbus and Industrial Ethernet With the introduction of fieldbuses in the 1980s, information technology came into play at the field level of automation. Manu­ facturer-driven, fieldbus systems arrived on the market one after another. Well known and wide spread representatives are PROFIBUS, CANopen and DeviceNet. Basic advantages to conventional, hardwired architectures include reduced wiring costs (hardware) and easy integration of single components into an industrial plant (software). These are key factors in process automation. Strong competition for fieldbus...

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Mass Flow Controllers for Gases-11

EDIP (Efficient Device Integration Platform) User interface of the Bürkert Communicator. The graphical programming interface (f(x)) is integrated into this software. The f(x) allows to program customized system control functions – e.g. for gas blending. The term EDIP stands for Efficient Device Integration Platform. It is the new Bürkert device platform which standardizes the operation, communication and interfaces of many process instruments (e.g. sensors, mass flow controllers). With EDIP all büS devices from Bürkert can be integrated into the proprietary büS system and can be operated with...

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