PV Sputter Web Coating System SOLAR Web 750 sp

Customer Benefit The Web 750 sp is an advanced Vacuum Coating Plant designed for the sputter deposition of thin films onto metal web as used in the Photovoltaic Industry for example. The special web winding and transport system allows sensitive surfaces to be coated without any mechanical contact to the coated web surface. The central web handling chamber can be separated from the coating sections by special valves allowing for loading/ unloading of the web coils without breaking the vacuum in the coating sections. Efficient gas separation of the two process chambers by means of a differentially...

The Web Handling Section Loading/ unloading of the web is done in the central web handling module. Winder and unwinder coils are mounted on a cart that can be moved in front of the vacuum chamber for convenient web exchange. The winding system allows for the use of a protective interleaf in the uncoated state and/or after coating. A servo drive system employing 4 independent motors is used to drive the web coils under controlled tension. In-situ measurement equipment can be installed in the web handling section for on-line process control. Coating Rolls Both coating chambers include a coating...

Process Section I Process section I can be employed for: • Pre-treatment of the web • RF sputtering using up to 6 planar RF magnetrons (other process equipment possible) Features: • All process equipment is installed on a 2-axis motor driven door flange allowing convenient service and maintenance of the equipment. • Process equipment can stay connected to power supply, cooling water, and gas supply while the door flange is opened.

Process Section II Process section II can be employed for: • DC or pulsed DC sputtering using up to 10 rotary cylindrical magnetrons (other process equipment possible) • Post-treatment of the web Features: • All process equipment is installed on a 2-axis motor driven door flange allowing convenient service and maintenance of the equipment. • Process equipment can stay connected to power supply, cooling water, and gas supply while the door flange is opened.

Process Control Control of the process parameters in the Web 750 sp is performed in order to achieve reproducible coating properties. The control of plasma parameters and thin film properties like thickness and conductivity can be implemented. For transparent coatings on metallic web an optical online monitor is available. An especially designed sensor head allows specular and non-specular reflection to be measured. From the VIS- NIR reflection data film thickness and conductivity of TCOs can be extracted. Composition of the deposited film can be analyzed using X-ray fluorescence. Technical Parameters...

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