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Precision optics
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Precision optics - 1

Precision optics. – Microlithography (EUV, DUV) – Sensors and filters – Laser and mirror coatings – Camera lenses and systems – Night vision and distance control – Microscopes and telescopes – Optoelectronics – Consumer optics – Catalog optics

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Precision optics - 2

Precision Optics. thin-film technology, we devel and manufacture vacuum de equipment for a broad range of applications.

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Precision optics - 3

Originally, the foundation for the Bühler Leybold Optics company’s present-day success was laid by i ­nventors Ernst Leybold and Wilhelm Carl Heraeus 160 years ago. Today, we are a globally active hightech company, with the business area’s headquarters in Alzenau (Germany)and subsidiaries in Cary (USA) and Beijing (China). Worldwide, we employ over 300 employees dedicated solely to thin-film c ­ oating applications. A top priority for us is innovation leadership in key areas such as sputtering, P ­ ECVD, plasma-assisted evaporation, machine automation and related software, as well as...

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Precision optics - 4

Precision Optics. Solutions for precision optics. Customer benefits are our daily business. As an important step toward expanding the Advanced Materials Business within Bühler with a strategic focus on environmentally friendly and energy-saving technology, Leybold Optics was acquired in May 2012. With this acquisition, Leybold Optics became part of a family-owned conglomerate of specialists and technology partners for plant, equipment and services for manufacturing advanced materials and for processing basic foods. Not only does Bühler now hold the leading market position in the field of...

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Precision optics - 6

Precision Optics. Leybold Optics – portfolio overview. Solutions for every challenge. SYRUSpro series Our SYRUSpro vacuum coater series sets the industry bench­ ark m in production and R&D. This classic evaporation system produces excellent coatings at extremely competitive deposition rates and is also available in special configurations for infrared (IR) and ultra­ violet (UV) wavelength regimes. Page 8 ARES series High productivity, lowest cost of ownership, production-proven. These are the highlights of the ARES series that has been deve­ loped to meet the requirements of...

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Precision optics - 7

NESSY series The NESSY series is our latest-generation magnetron-sputtering system mainly used for the production of extreme ultraviolet (EUV) mirrors under ultra-high vacuum (UHV) conditions – for mass production and product development. Page 22 DEIMOS Astronomical substrates of up to 4.5 m in diameter can be precisely sputtered within DEIMOS coaters, achieving highest reflectivity and durability values. The ease of substrate exchange is another noteworthy advantage. Page 26 STARpro Based on a single-reactive magnetron configuration, the STARpro allows the manufacture of multiple-layer...

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Precision optics - 8

Precision Optics. SYRUSpro series. Unsurpassed performance and productivity. 1   Planetary systems, calottes or full-domes 6   Network integration and remote access 2   Proprietary optical monitoring systems 7   Customized thermal evaporator setups 3   Optimized heater assembly (bottom and/or top) 8   Proprietary electron-beam guns 4   Ergonomic human-machine interface 9   Proprietary plasma sources Applications: –  Edge filters (short and long pass) –  Notch filters –  Narrow bandpass filters –  Dichroic color filters –  Polarization beam splitters –  (Super) AR coatings – Endoscopes – ...

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Key benefits: - Far IR to deep UV wavelength spectrum - Co-evaporation from two sources, with dual-rate and thickness control - Leybold Optics LION and APSpro ion sources - Integrated proprietary optical monitoring system - Outstanding versatility through variety of options - Eight different chamber sizes (700 up to 2800 mm) - Substrates up to 1.1 m in size - Fully modular and customizable concept - Benchmark in cost-per-piece SYRUSpro series -the benchmark for 24/7 optical-filter volume production The SYRUSpro series is quite simply the industry benchmark in production and R&D. Decade-long...

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Precision optics - 10

Precision Optics. SYRUSpro series. Manifold options and peerless flexibility. SYRUSpro series – a universe full of options The enormous range of options in the equipment of a SYRUSpro coater is one of its key features that make the difference and allows a perfect match to customer needs. The process library and the company’s experience with challenging specifications for IR, DUV and even extreme wavelength regimes are unrivaled in the industry. Broadest portfolio and experience in the market Able to offer up to 8 different chamber sizes, Bühler Leybold Optics has the broadest experience to...

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Precision optics - 11

(*) To be defined in accordance with customer requirements Pumping systems: Fore-vacuum: - Standard pumps - Dry pumps High-vacuum: - Turbomolecular pumps - Diffusion pumps - Cryogenic pumps Heating systems: Precise temperature ramp-up Optional: - Front or rear-side heating - Ceramic or metal heaters - Control via thermocouple or pyrometric, intermittent on substrate - High- or low-power sources High-temperature option (> 400° C)

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Precision optics - 12

Precision Optics. Premium components for SYRUSpro. Substrate holders Pallet substrate holders for Segmented domes in variety Planetary drive-systems with flat rotation fast loading times Single-boat thermal-resistance Triple-boat thermal-resistance Optical monitoring High-power plasma sources Single-wavelength monitoring system Broadband optical-monitoring system LEYBOLD OPTICS APSpro with LEYBOLD OPTICS LION 300

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Precision optics - 14

Precision Optics. ARES series. Getting the optimum in value for your investment. 1   Quartz-crystal monitoring 2   Optical monitoring system 3   Visualization in Chinese 4   Network connection and remote access 5   Fully-modular concept 6   Compact footprint 7   Proprietary ion sources 8  Proprietary electronbeam guns 9  Optimized equipment ­configuration ARES series – cost-effective production with high performance The ARES series is Bühler Leybold Optics’ system for cost-opti­ ized m mass-production of optical components especially designed for East Asian countries. The configuration is...

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