Contour GT-X 3D Optical Microscope
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Catalog excerpts

Contour GT-X 3D Optical Microscope - 1

ContourGT-X 3D Optical Microscope Automated, Gage-Capable Metrology for R&D and Production The fully automated, large-sample ContourGT-X 3D Optical Microscope combines unmatched measurement capabilities with highest vertical resolution over the industry’s largest field of view. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, this flagship of the ContourGT® product line offers the ultimate gage-capable 3D optical microscopy solution. Only the ContourGT-X incorporates Bruker’s patented tip/tilt head a patented self-calibrating laser reference, integrated pattern recognition, and a host of other proprietary interferometry innovations. No other metrology system provides the non-contact accuracy, throughput, and operator convenience for such a vast range of production metrology and imaging applications. Benchmark for Accuracy and Robustness Unique metrology sensor design with patented dual-LED light source Self-calibrating, metrology optimizing laser reference Integral vibration-isolation floor-mount cabinet Fastest, Easiest Nanometer-Scale Measurements Fully automated measurement capabilities (focus, intensity, tip/tilt head, staging, FOV) Nanometer-scale resolution on high-contour surfaces Most Powerful Measurement and Analysis Streamlined, customizable production interface Real-time automated measurement optimization Extensive library of filters and customizable analysis options Innovation with Integrity Optical Microscopy

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Contour GT-X 3D Optical Microscope - 2

Lateral Resolution 0.38µm min (Sparrow criterion); 0.13µm (with AcuityXR™); 0.01µm (with NanoLens™) Step Height Accuracy Step Height Repeatability 114µm / sec (with standard camera) 0.05%-100% Up to 40° (shiny surfaces); Up to 87° (rough surfaces) Up to 100mm Sample Weight 200mm (8in.) automated (standard); 300mm (12in.) automated (optional); 0.5µm encoders Tip/Tilt Function ±6° automated, computer-controlled tip/tilt head Optical Metrology Module Patented dual-LED illumination; Single-objective adapter; Optional automated or manual turret Available Zoom Lenses Standard monochrome: 640x480;...

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